Real-time automatic analysis of low temperature plasma laser Thomson scattering diagnostic spectroscopy method

Abstract

The invention relates to the technical field of low-temperature plasma diagnosis and provides a method for automatically analyzing a low-temperature plasma laser Thomson scattering diagnostic spectrum in real time. The method comprises a step 1 of collecting and acquiring spectral data including a Thomson scattering spectrum, a rotational Raman scattering spectrum, a plasma radiation background spectrum and an intensity calibration coefficient; a step 2 of preprocessing the acquired spectral data; a step 3, based on the least square method, theoretically fitting the laser Thomson scattering spectrum by using a Gaussian function; a step 4 of absolutely calibrating the intensity of the laser Thomson scattering spectrum; a step 5 of, based on the least squares method, theoretically fitting the rotational Raman scattering spectrum by using a rotational Raman scattering formula; and a step 6 of calculating a plasma parameter. The method can quickly acquire the electron temperature and the electron density of the low-temperature plasma, and improves the accuracy and efficiency of the laser Thomson scattering spectrum data analysis.

Description

technical field [0001] The invention relates to the technical field of low-temperature plasma diagnosis, in particular to a real-time automatic analysis method of low-temperature plasma laser Thomson scattering diagnosis spectrum. Background technique [0002] In low-temperature plasma, free electrons can quickly respond to the external electromagnetic field, obtain energy from the electromagnetic field, and affect the temperature and density of other particles (such as atoms, molecules, and free radicals) through collisional excitation or ionization reactions. Therefore, it is very necessary to accurately measure the temperature and density of free electrons in the plasma. In the low-temperature plasma diagnostic technology, the Langmuir probe (Langmuir Probe) is the most commonly used method. However, this method requires probes to be inserted into the plasma to measure relevant parameters, which is an intrusive measurement that easily interferes with the operating state ...

AI Technical Summary

Problems solved by technology

[0004] The present invention mainly solves the problems of high complexity, low data processing efficiency, and poor effect in the processing of laser Thomson scattering spectrum in the prior art, and proposes a real-time automatic analysis method for low-temperature plasma laser Thomson scattering diagnostic spectrum , to quickly obtain the low-temperature plasma electron temperature and electron density

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