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47 results about "Plasma radiation" patented technology

Plasma radiation mainly refers to the electromagnetic radiation emitted from plasma, which is mainly emitted by free electrons that transform into other free states or bound states of atoms and ions, and also by bound electrons that transform into other bound states, including line radiation, recombination radiation, bremsstrahlung, cyclotron radiation and di-electron radiation, etc., covering a wavelength range from infrared to X-rays.

Visible light bremsstrahlung diagnostic device and fusion plasma electron density profile measurement method

The invention discloses a visible light bremsstrahlung diagnostic device and a fusion plasma electron density profile measurement method. The visible light bremsstrahlung diagnostic device comprises a vacuum chamber, an objective lens, an optical fiber, a spectrograph and a spectrum detector. The vacuum chamber is used for generating plasma and is provided with an observation window; the objective lens, the optical fiber, the spectrograph and the spectrum detector are sequentially connected to form an optical diagnosis system for observation, and correspondingly, the front end of the objective lens faces the observation window, and visible light bremsstrahlung radiation of the plasma is observed through the observation window. The fusion plasma electron density profile measurement method comprises the following steps: S100, measurement: measuring plasma radiation through the visible light bremsstrahlung radiation diagnosis device; and S200, calculation: calculating the electron density profile of the plasma through a formula. Compared with an existing contact type measurement method, the visible light bremsstrahlung radiation diagnosis device and the fusion plasma electron density profile measurement method are a non-contact and interference-free measurement method.
Owner:SOUTHWESTERN INST OF PHYSICS

High-temperature high-density plasma generation and radiation opacity measurement method

The invention discloses a high-temperature high-density plasma generation and radiation opacity measurement method, which comprises the following steps: clamping a target material by using low-density low-Z-element foam to form a sandwich structure sample, and synchronously and directly driving the sandwich sample from two sides by using multiple beams of smooth nanosecond laser, the preparation temperature reaches 1,000,000 DEG C, and the electron density reaches 1 * 1023 pieces per cubic centimeter; then generating an X-ray source through the action of one or more nanosecond laser beams and the high-Z material, measuring the absorption spectrum of the X-ray source penetrating through the target plasma, the backlight spectrum of the X-ray source not penetrating through the target plasma and the self-emission spectrum of the target plasma through a spectrograph, and finally realizing the measurement of the radiation opacity of the high-temperature and high-density plasma. The high-temperature and high-density plasma radiation opaqueness measurement device has the beneficial effects that the high-temperature and high-density plasma radiation opaqueness measurement of which the temperature reaches 1,000,000 DEG C and the electron density reaches 1 * 1023 per cubic centimeter is realized on a million-joule nanosecond laser device.
Owner:LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS

A module for a laser-produced plasma radiation source

A module for a laser-produced plasma radiation source includes: first optics; second optics; and a reverse beam monitoring apparatus. The first optics are arranged to receive a first radiation beam having a first wavelength and a second radiation beam having a second wavelength and to direct the first and second radiation beams so as to form a combined radiation beam propagating along a common optical path toward the second optics. The second optics includes a polarizing beam splitter. The second optics are arranged to receive the combined radiation beam and to direct at least a first portion of the combined radiation beam towards a target region. The second optics are further arranged to receive a reflected portion of the first portion of the combined radiation beam and to direct the reflected portion towards the reverse beam monitoring apparatus. Associated methods are also disclosed.
Owner:ASML NETHERLANDS BV

Backpack type laser-induced breakdown spectroscopy analysis system

The invention relates to the technical field of spectral analysis, in particular to a knapsack type laser-induced breakdown spectroscopy analysis system which comprises a laser, an optical control system, a probe, a spectrometer, an industrial personal computer, a sample to be detected and a knapsack, and the laser, the spectrometer and the industrial personal computer are all arranged in a main bin of the knapsack. The industrial personal computer is electrically connected with the laser, the optical control system and the spectrograph, one side of the backpack main bin is connected with a handheld probe, and the optical control system is arranged in the probe; laser emitted by the laser enters the optical control system to be focused, the focused laser is output from the probe and is used for burning a to-be-detected sample, plasma radiation generated by the to-be-detected sample is received by the probe and is transmitted to the spectrograph, and the spectrograph is used for completing spectrum detection and transmitting a detection result to the industrial personal computer; and the industrial personal computer performs qualitative and quantitative analysis on elements contained in the to-be-detected sample according to the detection result. The invention provides a portable spectral analysis system.
Owner:CHANGZHOU COLLEGE OF INFORMATION TECHNOLOGY

Method for laser-machining a workpiece

The present invention relates to a method for laser-machining a workpiece (1) by means of a laser-machining device (100), wherein the laser-machining device (100) has a laser-beam-generation source (2), a process head (4) and a spectrometer (5). The spectrometer (5) makes it possible to monitor plasma radiation (6) produced during laser-machining, which offers advantages in process control.
Owner:PULSAR PHOTONICS GMBH

A method, system, device and storage medium for spectral line intensity correction

ActiveCN120031760BImage enhancementImage analysisPlasma shapingStreaming data
This application is applicable to the field of spectral detection technology, and provides a spectral line intensity correction method, system, device and storage medium, including: obtaining plasma information of a sample; the plasma information of the sample includes the full width at half maximum of the plasma radiation spectrum of the sample, plasma event stream data, and the number of events generated based on the plasma event stream data; reconstructing a plasma image according to the plasma event stream data; forming a plasma shape contour based on the plasma shape contour features extracted from the plasma image, and calculating the area of the region enclosed by the plasma shape contour; inputting the area of the region enclosed by the plasma shape contour, the number of events, and the full width at half maximum of the plasma radiation spectrum into a spectral line intensity correction model to generate a corrected spectral line intensity. This application improves the accuracy of quantitative analysis of spectral line intensity in related technologies.
Owner:TSINGHUA SHENZHEN INTERNATIONAL GRADUATE SCHOOL

Contaminant trap unit and light source device

A contaminant trap unit and a light source device are provided that can improve the maintenance efficiency of a film trap. A contaminant trap unit according to an embodiment of the present invention comprises a detachable member and at least one film trap. The contaminant trap unit is attached to an opening of a chamber main body having an outlet for plasma radiation and an opening different from the outlet. The detachable member covers the opening and is configured to be attached to / detachable from the chamber main body. The at least one film trap comprises a plurality of films for trapping contaminants from the plasma and is connected to the detachable member such that the plurality of films are arranged on a path of radiation from the plasma to the outlet, wherein the detachable member is attached to the chamber main body.
Owner:USHIO INC

High-pressure laser maintaining plasma light source device with multiple windows

The invention provides a high-pressure laser maintenance plasma light source device with multiple windows, and relates to the technical field of plasma generation and maintenance. The basic structure of the device comprises an adjustable electrode insulation packaging system, a light path collection system with specific wavelength selection, and a circulating water cooling system. The adjustable electrode insulation packaging system is arranged in the center of the light source device and used for generating an initial plasma area, and the electrode distance and the electrode tip shape can be changed according to actual requirements. The light path collecting system with specific wavelength selection is arranged in the light source device and is used for selectively collecting plasma radiation light and transmitting the plasma radiation light to the light outlet window, and the collected radiation wave band can be selected according to actual requirements and the divergence angle of the radiation light output by the light source device can be changed; the circulating water cooling system is arranged outside the light source device and used for reducing the temperature of the light source device in the working process. According to the scheme, an adjustable electrode insulation packaging system is integrally designed, the light source device is provided with a light path collecting system with an enhancing effect and specific wavelength selection, parts are simplified, assembly is easy, the occupied size is small, and the laser maintaining plasma light source device with the high-pressure-resistant capacity in the working process is achieved.
Owner:HANGZHOU INTERNATIONAL INNOVATION INSTITUTE OF BEIHANG UNIVERSITY +1

A particle evolution simulation method based on multi-component plasma radiation effect in tokamak

The application discloses a kind of particle evolution simulation methods based on multi-component plasma radiation effect in tokamak, belong to magnetic confinement controlled nuclear fusion technical field.Firstly, the evolution of impurity density distribution, electron density distribution and ion density distribution is calculated, then continuous radiation and linear radiation are calculated, and then a variety of plasma radiation is accurately added inside magnetic island.Calculating the magnetic field configuration under the plasma radiation correction, and continue to calculate the evolution of plasma total radiation and related parameters under advanced magnetic field configuration, so repeated calculation, achieve the simulation effect of long time evolution.The application realizes the calculation of impurity, electron and ion real-time dynamic distribution, and can also calculate the evolution of a variety of plasma radiation under real three-dimensional magnetic field configuration, and then obtain the plasma related parameter profile at any time;Meanwhile, the spatial distribution of plasma radiation and the situation of magnetohydrodynamic instability under advanced magnetic field configuration are more accurately described.
Owner:DALIAN UNIV OF TECH

Low-attenuation Xe-LPP extreme ultraviolet light source generation device based on differential air exhaust

The invention discloses a low-attenuation Xe-LPP extreme ultraviolet light source generation device based on differential air exhaust, and the device comprises a vacuum system which is used for creating an EUV transmission environment; the laser system is used for providing high-energy driving laser; the gas supply system is used for providing a gas target material into the cavity; the spraying device is used for spraying a target material to a laser focus, so that strong laser and Xe atoms interact to generate plasma radiation EUV; the triaxial piezoelectric displacement table is used for accurately positioning the nozzle; the differential pumping system is used for inhibiting diffusion and accumulation of the target gas in the vacuum system; the signal generator is used for synchronizing the opportunity of laser emission and target material spraying so as to ensure that the laser can act on the target material; the EUV energy meter is used for detecting the radiation intensity of the 13.5 nm wavelength of the light source; the EUV camera is used for shooting plasma images; and the computer is used for recording, analyzing and calculating signals and data of the EUV energy meter and the EUV camera. Finally, the EUV light source which is low in attenuation and high in stability is provided and used for metering detection in semiconductor photoetching.
Owner:SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI

Spectral system and method for rapidly detecting macroscopic parameters of single-particle energetic material

The invention belongs to the field of energetic material detonation performance detection, and particularly provides a macroscopic parameter rapid detection spectrum system and method.The system comprises an optical lens set, the optical lens set comprises a beam expanding lens, a first dichroscope, a second dichroscope and a third dichroscope, and a microscope objective is arranged on the downstream of the optical path of the optical lens set; the beam expander is used for receiving a laser pulse emitted by the pulse laser, the first dichroscope is used for receiving a light beam emitted by the visible light source, the second dichroscope is used for reflecting a sample optical signal transmitted by the third dichroscope into the CMOS camera, the third dichroscope is used for reflecting a plasma spectrum transmitted by the microscope objective to the convex lens, and the convex lens is used for reflecting the plasma spectrum transmitted by the microscope objective to the visible light source. An optical fiber is arranged on the side, away from the third dichroscope, of the convex lens and connected with the spectrograph, and the microscope objective is arranged above the sample table. According to the spectrum system, the energetic material single particle micro-explosion is loaded through laser to generate plasma, plasma radiation spectrum information is collected, and parameter prediction of the energetic material is achieved.
Owner:HUBEI SANJIANG AEROSPACE JIANGHE CHEM TECH

Laser pumped plasma light source and plasma ignition method

The light source includes an inflated chamber having a radiation plasma region maintained by a focused beam of a CW laser. The plasma ignition device is a pulsed laser system that generates first and second laser beams focused inside the chamber. The first laser beam provides optical breakdown, and after the optical breakdown, the second laser beam ignites the plasma, whose volume and density are sufficient to maintain a stable plasma by the CW laser after the end of the second laser pulse. Preferably, the first laser beam is generated in a Q-switching mode, and the second laser beam is generated in a free-running mode. The technical results include ensuring high reliability of plasma ignition, creating on this basis an electrode-free high-brightness broadband light source with high spatial and power stability, and providing the ability to collect broadband plasma radiation within a spatial angle greater than 9 sr.
Owner:ISTEQ BV +1

Droplet generator nozzle

A nozzle for a droplet generator for a laser-generated plasma radiation source is provided. The nozzle comprises a glass capillary tube used for emitting liquid drops; and a nozzle adapter, the nozzle adapter comprising a through-hole, and wherein the glass capillary is at least partially disposed in the through-hole. The nozzle further comprises a glass ferrule, the glass capillary tube is connected to the nozzle connector through the glass ferrule, and the shape of the glass ferrule is consistent with that of the through hole of the nozzle connector. A method of manufacturing a nozzle for a droplet generator is also provided.
Owner:ASML NETHERLANDS BV

Model training methods, material testing methods, systems and equipment

The present application is applicable to the field of spectral detection technology and provides a model training method, a material detection method, a system, and an apparatus, comprising: obtaining a sample training set; wherein each sample data in the sample training set includes plasma radiation spectrum data, plasma characteristic data, and sample label information corresponding to each sample; using the plasma radiation spectrum data and the plasma characteristic data of each sample as input and the sample label information corresponding to each sample as output, to train a neural network model; the plasma radiation spectrum data includes first plasma radiation spectrum data of each sample and / or plasma radiation spectrum data obtained after preprocessing the first plasma radiation spectrum data. The present application improves the accuracy of material classification.
Owner:TSINGHUA SHENZHEN INTERNATIONAL GRADUATE SCHOOL

Preparation method of anisotropic gold nanoparticles

The invention belongs to the field of materials, and discloses a preparation method of anisotropic gold nanoparticles, which comprises the step of performing plasma radiation on a mixed solution of acid or salt containing gold element, a surfactant and ethanol to obtain the anisotropic gold nanoparticles. The anisotropic gold nanoparticles can be rapidly synthesized in one step through plasma radiation of a mixed solution of gold-containing acid or salt, a surfactant and ethanol, and the obtained gold nanoparticles can stably exist in the solution in a colloidal form; the preparation is carried out through interaction between plasma and a mixed solution, the overall energy consumption is low, and environmental friendliness is facilitated.
Owner:XIAMEN UNIV

Droplet generator nozzle

A nozzle is provided for a droplet generator for a laser-produced plasma radiation source. The nozzle comprises a glass capillary for emitting droplets and a nozzle fitting comprising a throughbore, wherein the glass capillary is at least partially disposed in the throughbore. The nozzle further comprises a glass ferrule coupling the glass capillary to the nozzle fitting, the glass ferrule being conformed to a shape of the throughbore of the nozzle fitting. A method of manufacturing a nozzle for a droplet generator is also provided.
Owner:ASML NETHERLANDS BV

Arrangement and method for joining components

The invention relates to an arrangement (1) for joining components (B1, B2) by means of at least one joining element (2). According to the invention, the arrangement (1) comprises a joining device (3) which has: - an actuator-driven joining tool (4) designed to drive the joining element (2) into the components (B1, B2) at a joining point, and - a laser beam heating device (5) or plasma beam heating device designed to heat the joining point before driving in the joining element (2). Furthermore, the invention relates to a method for joining components (B1, B2).
Owner:MERCEDES BENZ GROUP AG

Trace element LIBS (Laser-induced Breakdown Spectroscopy) dynamic monitoring device and method based on flattop beam

The invention provides a trace element LIBS dynamic monitoring device and method based on a flat-topped beam, and belongs to the technical field of laser beam shaping and laser-induced breakdown spectroscopy, and the trace element LIBS dynamic monitoring device comprises a laser emission unit used for generating a pulse-type Gaussian distribution laser beam; the light beam shaping and focusing unit is composed of an aspherical lens group based on a Galileo structure, and is used for shaping the incident Gaussian distribution laser beam into a flat-topped light beam with uniformly distributed energy on an image plane, and focusing the flat-topped light beam into a light spot; the sample chamber is used for containing a lubricating oil sample to be detected; the spectral signal acquisition unit is used for collecting and transmitting spectral signals generated by plasma radiation; and the control and data processing unit is used for processing data and controlling dynamic monitoring. According to the invention, the Gaussian beam is shaped into the flat-topped beam through the aspheric lens group and is focused, so that the stability and quantitative precision of LIBS (Laser-induced Breakdown Spectroscopy) detection are improved.
Owner:SHANDONG NORMAL UNIV

A multi-point quasi-monochromatic soft x-ray spectrometer for plasma radiation measurements

This invention discloses a multi-energy quasi-monoenergy soft X-ray spectrometer for plasma radiation measurement, belonging to the field of X-ray detection technology. It includes an aperture group, an objective lens unit, and an image plane detector array with time resolution. The aperture group is used to define the incident solid angle of each measurement channel and suppress stray radiation. The objective lens unit consists of multiple quasi-monoenergy multilayer mirrors, each mirror surface corresponding to an independent measurement channel and including a background channel. Multiple measurement channels share a single energy point. The image plane detector array corresponds one-to-one with each measurement channel, forming a soft X-ray detection system with time-resolved measurement capabilities. This invention, using the above spectrometer, effectively avoids measurement uncertainties caused by the convolution inversion of energy spectrum distribution and energy response function, and is suitable for online soft X-ray energy spectrum diagnosis of inertial confinement fusion plasmas such as lasers and Z-pinch.
Owner:TONGJI UNIV +1

Porous graphene and method for preparing the same, and use of the conductive agent comprising the same

The present application relates to the technical field of lithium ion batteries, and discloses porous graphene, a preparation method thereof, and application of a conductive agent containing the porous graphene; the preparation method of the porous graphene comprises the following steps: S1, dissolving a weak base in water to form an activation solution; S2, adding graphene into the activation solution to obtain a suspension; the suspension is subjected to heating pretreatment to obtain an activation product; and S3, the activation product is subjected to plasma treatment to obtain the porous graphene. Through the synergistic effect of weak base pretreatment and plasma etching pore treatment, the preparation of the porous graphene is realized in a mild environment of low alkali and low temperature. The method is simple, efficient, low in cost, green and environmentally friendly, low in energy consumption, easy to industrialize, and can prepare the porous graphene with different pore sizes and different pore amounts by changing the plasma radiation conditions.
Owner:CHENGDU ORGANIC CHEM CO LTD CHINESE ACAD OF SCI

Cooling gas nozzle module of plasma spray gun

The invention discloses a plasma spray gun cooling gas nozzle module which comprises a plasma spray gun, a group of independent nozzle bodies distributed in an annular array are arranged at the spray end of the plasma spray gun, the number of the independent nozzle bodies is 3-8, and the gas flow of each independent nozzle body can be independently adjusted. A spiral flow deflector is arranged in the air inlet section of the independent nozzle main body; a porous diffusion structure is arranged on the wall of the outlet section of the independent nozzle main body; a miniature thermocouple and a cooling flow channel are arranged in the wall of the independent nozzle body, and a liquid cooling medium is introduced into the cooling flow channel. The cooling gas nozzles can synchronously move along with the spray gun, the plasma spraying device is suitable for various plasma spraying scenes, the multiple cooling nozzles are adopted, cooling gas is evenly covered, and uniform cooling and overheating (the temperature difference gt and 200 DEG C) are conducted on the local part of a workpiece; the arrangement of the porous diffusion structure enables the nozzle not to deform even if the nozzle is radiated by plasma for a long time.
Owner:HUANENG NANJING GAS TURBINE POWER GENERATION CO LTD +1

Adjusting system and method for plasma radiation of fusion device

The invention discloses a fusion device plasma radiation adjusting system and method, and relates to the technical field of controlled nuclear fusion device thermal load protection and radiation control, plasma radiation distribution signals are measured, and flow and distribution of particles are controlled by using an ultrasonic molecular beam system according to different control requirements, so that the fusion device plasma radiation can be adjusted. Therefore, plasma radiation is controlled, and radiation control in different ranges and degrees is realized.
Owner:SOUTHWESTERN INST OF PHYSICS

Process for the preparation of isotropic pitch for coating and spinning

The present application relates to a preparation method of isotropic pitch for coating and spinning, which uses ethylene tar, catalytic cracking slurry, medium-low temperature coal tar, bio-tar and other aromatic-rich heavy oil as raw material, carries out hydrogenation stabilization and isomerization modification on the raw material by adopting ebullated bed reaction form, obtains pre-polymerized pitch under the induced polymerization of oxygen-containing linear polymer in the ebullated bed hydrogenation tail oil, carries out oxidation cross-linking reaction under the action of plasma radiation, further improves the softening point and carbon residue value of the obtained isotropic pitch product, and inhibits the generation of mesophase optical structure, and the molecular weight distribution of the isotropic pitch product is relatively concentrated, which exhibits excellent coating performance and homogeneous melting and spinning performance.
Owner:CHINA UNIV OF PETROLEUM (EAST CHINA)

Module for laser-generated plasma radiation source

A module for a laser-generated plasma radiation source, comprising: a first optical device; a second optical device; and a reverse beam monitoring device. The first optical device is arranged to receive a first beam of radiation having a first wavelength and a second beam of radiation having a second wavelength, and to direct the first beam of radiation and the second beam of radiation to form a combined beam of radiation propagating along a common optical path towards the second optical device. The second optical device includes a polarization beam splitter. The second optical device is arranged to receive the combined beam of radiation and to direct at least a first portion of the combined beam of radiation towards a target region. The second optic is further arranged to receive a reflected portion of the first portion of the combined radiation beam and to direct the reflected portion towards the reverse beam monitoring device. Related methods are also disclosed.
Owner:ASML NETHERLANDS BV

Transmission tower aging detection method and system

Embodiments of the present invention disclose a method and system for detecting aging of transmission line towers. The method includes: transmitting a pulsed laser beam to a target area on a transmission line tower via a laser, wherein the pulsed laser beam acts on the target area to generate plasma, wherein the target area is located at any position on the transmission line tower; receiving a plasma radiation beam via a spectrum acquisition device and converting the plasma radiation beam into a spectral signal; acquiring an elemental spectrum of an aging element or an anti-aging element from the spectral signal; determining the content of the aging element or the anti-aging element in the transmission line tower based on the elemental spectrum; and determining whether the transmission line tower is aged based on the content of the aging element or the anti-aging element in the transmission line tower. The technical solution of the embodiments of the present invention implements aging detection of transmission line towers, improving detection efficiency and accuracy.
Owner:YUNNAN POWER GRID CO LTD ELECTRIC POWER RES INST

Gas target dual-channel nozzle for extreme ultraviolet light source and extreme ultraviolet light source system and method

The invention discloses a gas target dual-channel nozzle for an extreme ultraviolet light source and an extreme ultraviolet light source system and method. The nozzle structure is mainly composed of a nozzle body, a first gas channel, a second gas channel and a cooling channel. A nozzle is fixed to a three-dimensional displacement table for moving alignment, the gas spraying speed and density are controlled through a control system, the nozzle is kept in a stable use state through a water cooling system, a gas target prepared by the nozzle is bombarded by driving laser generated by a laser system, and then plasma radiation extreme ultraviolet light is generated. According to the invention, the ablation influence of the high-energy plasma on the nozzle in the actual use process is fully combined, and key factors such as the ejection angle and the convergent point of the gas are considered at the same time. The double-gas-flow-channel nozzle provided by the invention is suitable for preparing a gas target material needing protective gas, and can be used for efficiently preparing a high-concentration gas target material for a long time.
Owner:SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI

Ion isolation device and method for protecting off-axis EUV collecting mirror based on electromagnetic field

The invention discloses an ion isolation device for protecting an off-axis EUV collecting mirror based on an electromagnetic field. The ion isolation device comprises an EUV light source system, a conical cavity, a direct-current voltage generator, an electrode plate, a permanent magnet, a Mo / Si multilayer film collecting mirror, an EUV camera, a Faraday cup and a computer, the EUV light source system is arranged in a vacuum cavity, provides enough energy through laser, excites a target material, generates plasma radiation EUV, and generates debris and high-energy ions along with the generation of the debris and the high-energy ions; the conical cavity isolates the vacuum cavity from the electrode plate and maintains the air pressure in the cavity stable; the direct-current voltage generator provides voltage for the electrode plates; the electrode plate generates an electric field; the permanent magnet generates a magnetic field, and the electric field and the magnetic field act on high-energy ions, so that the ions are deflected, an isolation effect is achieved, and the Mo / Si multilayer film collecting mirror is protected; the Mo / Si multilayer film collecting mirror focuses an EUV light spot of plasma radiation to an IF point; the EUV camera is used for recording the imaging of an IF point and the shape and size of a light spot; the Faraday cup is used for recording the beam intensity of the ion debris; the computer is used for recording, analyzing and calculating images and signals of the EUV camera and the Faraday cup, adjusting electronic controls such as the displacement table, isolating high-energy ions, preventing the high-energy ions from directly damaging the collecting mirror, and effectively prolonging the service life of the EUV collecting mirror.
Owner:SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI

An arrayed bolometer for measuring the radiant heat flux of a plasma

ActiveCN115915561BNuclear energy generationPlasma techniqueHeat flowRadiant heat flux
The application discloses an array type radiation heat probe for measuring plasma radiation heat flow density, which comprises a detection element, a thermocouple, a mounting base, a fixing base and a fixing buckle. The mounting base and the fixing base are provided with through holes; the mounting base is placed on the fixing base; the fixing buckle is welded on the fixing base; the thermocouple penetrates through the mounting base, the fixing base and the fixing buckle, and a detection head is exposed at the mounting base; the thermocouple is fixed through the fixing buckle; the detection element is placed on the mounting base and is fixedly contacted with the detection head of the thermocouple through ceramic screws. The application solves the problem that the thermocouple cannot directly measure the heat flow density, utilizes the heat conduction of the copper sheet and the temperature measurement of the thermocouple, adopts an array type distribution, and indirectly measures the radial radiation heat flow density which is radiated from the plasma to the vacuum wall due to the ion diffusion.
Owner:HEFEI INSTITUTE OF PHYSICAL SCIENCE CHINESE ACADEMY OF SCIENCES

EUV light source generating device

The utility model relates to the technical field of plasma, and provides an EUV light source generating device, which comprises a vacuum cavity used for maintaining a vacuum environment; normal-temperature liquid metal alloy is arranged in the liquid metal spray generating device, and the liquid metal spray generating device is used for spraying liquid metal liquid drops into the vacuum cavity; the microwave emitter is used for applying a microwave field to the vacuum cavity to enable the liquid metal liquid drops to generate plasmas; and the spectrum filtering module is used for extracting extreme ultraviolet band light of the plasma radiation. According to the EUV light source generating device provided by the utility model, a liquid metal spraying technology is combined with microwave plasma laser, the path dependence of the traditional EUV light source depending on laser or discharge is broken through, a solid tin target or xenon is replaced by normal-temperature liquid metal alloy, and the problem of high energy consumption of target material transportation and melting in the traditional technology is solved; by means of microwave non-contact energy transfer, the problem of high cost of a laser system or ablation of a discharge electrode is solved.
Owner:TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI

Methods for laser processing of a workpiece

The present invention relates to a method for laser processing of a workpiece (1) with a laser processing device (100), wherein the laser processing device (100) comprises a laser beam generating source (2), a processing head (4) and a spectrometer (5). The spectrometer (5) enables monitoring of plasma radiation (6) generated during laser processing, which offers advantages in process control.
Owner:PULSAR PHOTONICS GMBH