24 results about "Plasma radiation" patented technology

The present invention relates to a method for laser-machining a workpiece (1) by means of a laser-machining device (100), wherein the laser-machining device (100) has a laser-beam-generation source (2), a process head (4) and a spectrometer (5). The spectrometer (5) makes it possible to monitor plasma radiation (6) produced during laser-machining, which offers advantages in process control.

The application discloses a kind of particle evolution simulation methods based on multi-component plasma radiation effect in tokamak, belong to magnetic confinement controlled nuclear fusion technical field.Firstly, the evolution of impurity density distribution, electron density distribution and ion density distribution is calculated, then continuous radiation and linear radiation are calculated, and then a variety of plasma radiation is accurately added inside magnetic island.Calculating the magnetic field configuration under the plasma radiation correction, and continue to calculate the evolution of plasma total radiation and related parameters under advanced magnetic field configuration, so repeated calculation, achieve the simulation effect of long time evolution.The application realizes the calculation of impurity, electron and ion real-time dynamic distribution, and can also calculate the evolution of a variety of plasma radiation under real three-dimensional magnetic field configuration, and then obtain the plasma related parameter profile at any time;Meanwhile, the spatial distribution of plasma radiation and the situation of magnetohydrodynamic instability under advanced magnetic field configuration are more accurately described.

The invention discloses a low-attenuation Xe-LPP extreme ultraviolet light source generation device based on differential air exhaust, and the device comprises a vacuum system which is used for creating an EUV transmission environment; the laser system is used for providing high-energy driving laser; the gas supply system is used for providing a gas target material into the cavity; the spraying device is used for spraying a target material to a laser focus, so that strong laser and Xe atoms interact to generate plasma radiation EUV; the triaxial piezoelectric displacement table is used for accurately positioning the nozzle; the differential pumping system is used for inhibiting diffusion and accumulation of the target gas in the vacuum system; the signal generator is used for synchronizing the opportunity of laser emission and target material spraying so as to ensure that the laser can act on the target material; the EUV energy meter is used for detecting the radiation intensity of the 13.5 nm wavelength of the light source; the EUV camera is used for shooting plasma images; and the computer is used for recording, analyzing and calculating signals and data of the EUV energy meter and the EUV camera. Finally, the EUV light source which is low in attenuation and high in stability is provided and used for metering detection in semiconductor photoetching.

The invention provides a trace element LIBS dynamic monitoring device and method based on a flat-topped beam, and belongs to the technical field of laser beam shaping and laser-induced breakdown spectroscopy, and the trace element LIBS dynamic monitoring device comprises a laser emission unit used for generating a pulse-type Gaussian distribution laser beam; the light beam shaping and focusing unit is composed of an aspherical lens group based on a Galileo structure, and is used for shaping the incident Gaussian distribution laser beam into a flat-topped light beam with uniformly distributed energy on an image plane, and focusing the flat-topped light beam into a light spot; the sample chamber is used for containing a lubricating oil sample to be detected; the spectral signal acquisition unit is used for collecting and transmitting spectral signals generated by plasma radiation; and the control and data processing unit is used for processing data and controlling dynamic monitoring. According to the invention, the Gaussian beam is shaped into the flat-topped beam through the aspheric lens group and is focused, so that the stability and quantitative precision of LIBS (Laser-induced Breakdown Spectroscopy) detection are improved.

This invention discloses a multi-energy quasi-monoenergy soft X-ray spectrometer for plasma radiation measurement, belonging to the field of X-ray detection technology. It includes an aperture group, an objective lens unit, and an image plane detector array with time resolution. The aperture group is used to define the incident solid angle of each measurement channel and suppress stray radiation. The objective lens unit consists of multiple quasi-monoenergy multilayer mirrors, each mirror surface corresponding to an independent measurement channel and including a background channel. Multiple measurement channels share a single energy point. The image plane detector array corresponds one-to-one with each measurement channel, forming a soft X-ray detection system with time-resolved measurement capabilities. This invention, using the above spectrometer, effectively avoids measurement uncertainties caused by the convolution inversion of energy spectrum distribution and energy response function, and is suitable for online soft X-ray energy spectrum diagnosis of inertial confinement fusion plasmas such as lasers and Z-pinch.

The present application relates to the technical field of lithium ion batteries, and discloses porous graphene, a preparation method thereof, and application of a conductive agent containing the porous graphene; the preparation method of the porous graphene comprises the following steps: S1, dissolving a weak base in water to form an activation solution; S2, adding graphene into the activation solution to obtain a suspension; the suspension is subjected to heating pretreatment to obtain an activation product; and S3, the activation product is subjected to plasma treatment to obtain the porous graphene. Through the synergistic effect of weak base pretreatment and plasma etching pore treatment, the preparation of the porous graphene is realized in a mild environment of low alkali and low temperature. The method is simple, efficient, low in cost, green and environmentally friendly, low in energy consumption, easy to industrialize, and can prepare the porous graphene with different pore sizes and different pore amounts by changing the plasma radiation conditions.

The invention discloses a plasma spray gun cooling gas nozzle module which comprises a plasma spray gun, a group of independent nozzle bodies distributed in an annular array are arranged at the spray end of the plasma spray gun, the number of the independent nozzle bodies is 3-8, and the gas flow of each independent nozzle body can be independently adjusted. A spiral flow deflector is arranged in the air inlet section of the independent nozzle main body; a porous diffusion structure is arranged on the wall of the outlet section of the independent nozzle main body; a miniature thermocouple and a cooling flow channel are arranged in the wall of the independent nozzle body, and a liquid cooling medium is introduced into the cooling flow channel. The cooling gas nozzles can synchronously move along with the spray gun, the plasma spraying device is suitable for various plasma spraying scenes, the multiple cooling nozzles are adopted, cooling gas is evenly covered, and uniform cooling and overheating (the temperature difference gt and 200 DEG C) are conducted on the local part of a workpiece; the arrangement of the porous diffusion structure enables the nozzle not to deform even if the nozzle is radiated by plasma for a long time.

The present application relates to a preparation method of isotropic pitch for coating and spinning, which uses ethylene tar, catalytic cracking slurry, medium-low temperature coal tar, bio-tar and other aromatic-rich heavy oil as raw material, carries out hydrogenation stabilization and isomerization modification on the raw material by adopting ebullated bed reaction form, obtains pre-polymerized pitch under the induced polymerization of oxygen-containing linear polymer in the ebullated bed hydrogenation tail oil, carries out oxidation cross-linking reaction under the action of plasma radiation, further improves the softening point and carbon residue value of the obtained isotropic pitch product, and inhibits the generation of mesophase optical structure, and the molecular weight distribution of the isotropic pitch product is relatively concentrated, which exhibits excellent coating performance and homogeneous melting and spinning performance.

A module for a laser-generated plasma radiation source, comprising: a first optical device; a second optical device; and a reverse beam monitoring device. The first optical device is arranged to receive a first beam of radiation having a first wavelength and a second beam of radiation having a second wavelength, and to direct the first beam of radiation and the second beam of radiation to form a combined beam of radiation propagating along a common optical path towards the second optical device. The second optical device includes a polarization beam splitter. The second optical device is arranged to receive the combined beam of radiation and to direct at least a first portion of the combined beam of radiation towards a target region. The second optic is further arranged to receive a reflected portion of the first portion of the combined radiation beam and to direct the reflected portion towards the reverse beam monitoring device. Related methods are also disclosed.

The invention discloses a gas target dual-channel nozzle for an extreme ultraviolet light source and an extreme ultraviolet light source system and method. The nozzle structure is mainly composed of a nozzle body, a first gas channel, a second gas channel and a cooling channel. A nozzle is fixed to a three-dimensional displacement table for moving alignment, the gas spraying speed and density are controlled through a control system, the nozzle is kept in a stable use state through a water cooling system, a gas target prepared by the nozzle is bombarded by driving laser generated by a laser system, and then plasma radiation extreme ultraviolet light is generated. According to the invention, the ablation influence of the high-energy plasma on the nozzle in the actual use process is fully combined, and key factors such as the ejection angle and the convergent point of the gas are considered at the same time. The double-gas-flow-channel nozzle provided by the invention is suitable for preparing a gas target material needing protective gas, and can be used for efficiently preparing a high-concentration gas target material for a long time.

The invention discloses an ion isolation device for protecting an off-axis EUV collecting mirror based on an electromagnetic field. The ion isolation device comprises an EUV light source system, a conical cavity, a direct-current voltage generator, an electrode plate, a permanent magnet, a Mo / Si multilayer film collecting mirror, an EUV camera, a Faraday cup and a computer, the EUV light source system is arranged in a vacuum cavity, provides enough energy through laser, excites a target material, generates plasma radiation EUV, and generates debris and high-energy ions along with the generation of the debris and the high-energy ions; the conical cavity isolates the vacuum cavity from the electrode plate and maintains the air pressure in the cavity stable; the direct-current voltage generator provides voltage for the electrode plates; the electrode plate generates an electric field; the permanent magnet generates a magnetic field, and the electric field and the magnetic field act on high-energy ions, so that the ions are deflected, an isolation effect is achieved, and the Mo / Si multilayer film collecting mirror is protected; the Mo / Si multilayer film collecting mirror focuses an EUV light spot of plasma radiation to an IF point; the EUV camera is used for recording the imaging of an IF point and the shape and size of a light spot; the Faraday cup is used for recording the beam intensity of the ion debris; the computer is used for recording, analyzing and calculating images and signals of the EUV camera and the Faraday cup, adjusting electronic controls such as the displacement table, isolating high-energy ions, preventing the high-energy ions from directly damaging the collecting mirror, and effectively prolonging the service life of the EUV collecting mirror.

The application discloses an array type radiation heat probe for measuring plasma radiation heat flow density, which comprises a detection element, a thermocouple, a mounting base, a fixing base and a fixing buckle. The mounting base and the fixing base are provided with through holes; the mounting base is placed on the fixing base; the fixing buckle is welded on the fixing base; the thermocouple penetrates through the mounting base, the fixing base and the fixing buckle, and a detection head is exposed at the mounting base; the thermocouple is fixed through the fixing buckle; the detection element is placed on the mounting base and is fixedly contacted with the detection head of the thermocouple through ceramic screws. The application solves the problem that the thermocouple cannot directly measure the heat flow density, utilizes the heat conduction of the copper sheet and the temperature measurement of the thermocouple, adopts an array type distribution, and indirectly measures the radial radiation heat flow density which is radiated from the plasma to the vacuum wall due to the ion diffusion.

The utility model relates to the technical field of plasma, and provides an EUV light source generating device, which comprises a vacuum cavity used for maintaining a vacuum environment; normal-temperature liquid metal alloy is arranged in the liquid metal spray generating device, and the liquid metal spray generating device is used for spraying liquid metal liquid drops into the vacuum cavity; the microwave emitter is used for applying a microwave field to the vacuum cavity to enable the liquid metal liquid drops to generate plasmas; and the spectrum filtering module is used for extracting extreme ultraviolet band light of the plasma radiation. According to the EUV light source generating device provided by the utility model, a liquid metal spraying technology is combined with microwave plasma laser, the path dependence of the traditional EUV light source depending on laser or discharge is broken through, a solid tin target or xenon is replaced by normal-temperature liquid metal alloy, and the problem of high energy consumption of target material transportation and melting in the traditional technology is solved; by means of microwave non-contact energy transfer, the problem of high cost of a laser system or ablation of a discharge electrode is solved.

The present invention relates to a method for laser processing of a workpiece (1) with a laser processing device (100), wherein the laser processing device (100) comprises a laser beam generating source (2), a processing head (4) and a spectrometer (5). The spectrometer (5) enables monitoring of plasma radiation (6) generated during laser processing, which offers advantages in process control.

The application provides a kind of agricultural soil heavy metal detection method and system based on laser-induced breakdown spectroscopy, related to heavy metal detection technical field, by collecting the temperature and humidity data, moisture content data of the agricultural soil to be detected, and corresponding detection batch information;According to the above two types of data, the process of generating plasma when simulating the excitation of the agricultural soil to be detected by using digital twin simulation model and laser-induced breakdown spectroscopy is generated, target laser energy parameters and target acquisition parameters are generated to collect the optical signal of the plasma radiation generated by the agricultural soil to be detected;After separating the target waveband signal from the optical signal, correction, conversion, baseline correction and outlier rejection processing are carried out, to obtain the corrected digital signal, and a multi-waveband feature set is extracted from the corrected digital signal, the set is cross-validated, combined with the detection batch information, to generate the heavy metal detection result of the agricultural soil to be detected, to improve the precision, stability and adaptability of heavy metal detection.

The invention discloses a multi-energy-point quasi-single-energy soft X-ray spectrometer for plasma radiation measurement, and belongs to the technical field of X-ray detection, the multi-energy-point quasi-single-energy soft X-ray spectrometer comprises a diaphragm group, an objective lens unit and an image plane detector array with time resolution capability, and the diaphragm group is used for limiting incident solid angles of all measurement channels and inhibiting stray radiation; the objective lens unit is composed of a plurality of quasi-monoenergy multilayer film reflectors, the mirror surface of each quasi-monoenergy multilayer film reflector corresponds to an independent measurement channel and comprises a background channel, and the plurality of measurement channels share one energy point; and the image plane detector arrays are in one-to-one correspondence with the measurement channels to form a soft X-ray detection system with a time resolution measurement function. By the adoption of the spectrometer, measurement uncertainty caused by energy spectrum distribution and energy response function convolution inversion is effectively avoided, and the spectrometer is suitable for online soft X-ray energy spectrum diagnosis of laser, Z pinch and other inertial confinement fusion plasmas.

The invention discloses a marine aerosol laser-induced breakdown spectroscopy detection system based on spatial heterodyne, which comprises a coupling module, a spatial heterodyne spectrum interference imaging module and an inversion and quantitative output module, the coupling module is used for generating and transporting an aerosol sample, performing induced breakdown on aerosol particles by high-repetition-frequency pulse laser, laterally collecting plasma radiation light and coupling the radiation light into a subsequent spectrum detection and spatial heterodyne interference imaging channel; the spatial heterodyne spectrum interference imaging module is of a slit-free interference type spectrum structure and comprises an optical fiber coupling and collimating unit, a beam splitting element, two symmetrically arranged diffraction gratings, an imaging lens and a camera detection unit; and the inversion and quantitative output module is used for carrying out data processing on the acquired images and videos and carrying out spectrum inversion. According to the invention, the existing marine aerosol LIBS detection technology is improved in the aspects of continuous background suppression, high repetition frequency adaptability, system simplification, quantitative analysis performance and the like, and the method has a definite engineering application value.

The invention relates to a glass solidified body detection method based on shear thickening nano-enhanced LIBS (laser-induced breakdown spectroscopy), and belongs to the field of glass solidified body detection. Shear thickening gel is prepared from a nano-particle solution and a high polymer material according to a preset proportion; taking a proper amount of shear thickening gel, uniformly smearing the shear thickening gel on the surface of the glass solidified body, and standing to form a shear thickening gel coating; and performing LIBS (laser-induced breakdown spectroscopy) detection on the glass solidified body covered with the shear thickening gel coating to obtain the element content and distribution information of the glass solidified body. Laser impact force is dispersed by using the solid-like characteristic generated when the shear thickening gel is impacted by laser, and a glass solidified body is protected from being damaged by laser impact; the laser-induced plasma radiation spectrum intensity is improved by utilizing the nano-particle conduction electron oscillation and surface plasmon resonance effect in the action process of the laser and the nano-particles in the gel. Therefore, the detection safety and sensitivity are synchronously improved in the process of detecting the glass solidified body elements by LIBS (Laser-induced Breakdown Spectroscopy).

The utility model belongs to the technical field of plasma radiation device, especially relates to a radio frequency linear plasma generating device with impedance module, including the accommodating space and impedance module that are composed of main part and air inlet plate, the main part includes the first main body and second main body that are matched, is provided with ceramic pipe and the electrode that sets up in ceramic pipe in accommodating space, the first main body and second main body are enclosed after combination with the air inlet channel and the discharge cavity that are formed with the ceramic pipe and the air inlet channel intercommunication between them, impedance module one end is connected with the electrically conductive column, one end is connected radio frequency connector, the other end is connected air inlet plate ground connection. Relative to the prior art, the utility model passes through the matching impedance design module, makes input cable temperature rise < 60 DEG C, improves cable use time length. Matching network power consumption is reduced from 350W to 80W, and the reduction is 55%. Improve the hydrophilicity, and the contact angle is optimized from > 60 DEG to < 10 DEG. The problem that radio frequency linear plasma cleaning machine can only one kind of frequency radio frequency power supply is solved.

The invention discloses preparation of a hydroxyl-functionalized indium-based catalyst and application of the hydroxyl-functionalized indium-based catalyst in radiation activation CO2 reduction, and the preparation method comprises the following steps: using absolute ethyl alcohol as a solvent, carrying out solvothermal reaction on an indium source and ethylene glycol, centrifuging a product, collecting solids, and cleaning to obtain the hydroxyl-functionalized indium-based catalyst. The hydroxyl functionalized indium-based catalyst is used for catalyzing plasma radiation to reduce CO2, and catalyzing CO2 and H2O to generate CH4, CO and H2 under the plasma radiation condition. According to the hydroxyl functionalized InOx (OH) 3-2x catalyst prepared by the preparation method disclosed by the invention, the CO2 conversion rate of 45.3% and the CH4 selectivity of 35% are realized. The hydrogen bond microenvironment effectively reduces the energy barrier of OH and H adsorbed on the surface generated by water molecule dissociation, and provides a rich hydrogen active source for the reaction. The hydrogen bond network can serve as a proton rapid channel, so that protons generated by water dissociation are promoted to directionally migrate along hydrogen bonds, the CO2 hydrogenation reaction kinetics is remarkably improved, and the generation of a deep hydrogenation product CH4 is enhanced.

The application provides a method for real-time in-situ online non-contact measurement of a magnetic field on a surface of a first wall material, comprising the following steps: a high-energy nanosecond pulse laser ablation is used to ablate the first wall material in different magnetic field intensity areas and generate laser plasma by using an endoscope structure; the laser plasma radiates a spectral signal with wall element characteristic information during a cooling process; an optical collection system with an endoscope structure is used to collect laser plasma radiation light and couple the collected plasma radiation light to a multicore optical fiber; the collected plasma radiation light is coupled to a spectrometer; spectral data are transmitted to a computer for analysis by using the spectrometer; a splitting distance and a spatial distribution characteristic of a spectral characteristic peak under different magnetic field intensities are extracted and compared with standard spectra under different directions and different magnetic field intensities in an established database to screen a standard spectrum with the highest correlation coefficient; a magnetic field intensity and a direction corresponding to the standard spectrum are found in the database and displayed to realize measurement of the magnetic field intensity and the direction.

The invention relates to the technical field of laser welding quality monitoring, in particular to a laser welding quality real-time evaluation method based on data analysis. The method comprises the steps that in the laser welding process, reflected light signals of a welding keyhole area and plasma radiation signals above a molten pool are synchronously collected at the same sampling frequency; performing detrending processing on the two paths of signals respectively, and extracting high-frequency fluctuation components; calculating a cross-correlation function of the two paths of high-frequency fluctuation components based on the sliding time window, and generating a coupling stability index; a dynamic judgment threshold value is generated based on the energy fluctuation variance of the plasma radiation signal, and the larger the energy fluctuation variance is, the lower the threshold value is; and comparing the coupling stability index with a dynamic judgment threshold to judge the keyhole instability defect. Through dynamic coupling analysis of the keyhole reflected light and the plasma radiation signal, real-time evaluation of the welding quality is achieved, and the welding defect can be accurately recognized without complex sensor fusion.

The invention discloses a laser light path control method and system for micropore machining, and belongs to the technical field of laser precision machining, and the method comprises the steps: obtaining surface light feedback data of a to-be-machined area, judging the surface integrity based on the surface light feedback data, and generating a machining permission instruction when the judgment is passed; in response to the processing permission instruction, negative spatial angular dispersion distribution is preset for a laser beam to counteract positive dispersion distortion generated by subsequent scanning deflection, so that a to-be-processed light field of which the wavefront is subjected to space-time calibration is constructed; executing spiral scanning by using a to-be-processed light field, modulating pulse frequency based on real-time scanning linear velocity, and generating a cut-off signal when entering a track center singular region; plasma radiation characteristics in the scanning process are monitored, and an instruction for switching to a concentric ring pumping track from spiral scanning is generated when slag discharging blockage is recognized. According to the method, the plasma radiation characteristics in the scanning process are monitored, so that the process stability and the yield of deep hole machining are improved.

The invention relates to the technical field of solid-state electrolytes, and particularly discloses a method for inhibiting lithium dendrites by using an LLZO solid-state electrolyte. The method comprises the following steps: S1, performing plasma reaction treatment on LLZO powder to obtain doped modified LLZO powder; s2, performing laser irradiation treatment on the doped and modified LLZO powder, and performing compaction and sintering to obtain an electrolyte sheet; and S3, dropwise adding the SbCl3 suspension on the two surfaces of the electrolyte sheet, carrying out vacuum drying, and carrying out a reaction on the dried electrolyte sheet and molten lithium to obtain the LLZO solid electrolyte containing the multi-layer structure. The LLZO solid electrolyte with a multi-layer structure is formed through the transition layer formed through plasma radiation treatment, the amorphous layer formed through laser radiation treatment and the low-melting-point metal chloride coating combined with the in-situ lithiation technology, and the problems of poor interface contact and lithium dendrite growth are successfully solved through the combined action of the transition layer, the amorphous layer and the low-melting-point metal chloride coating combined with the in-situ lithiation technology.