System and method for diagnosing plasma parameters
A plasma and parameter technology, applied in the field of plasma, can solve the problems of limited diagnostic accuracy and diagnostic range, large dependence, and inability to apply in a wide range, so as to improve diagnostic accuracy and diagnostic range, and make up for the interaction between electric field and magnetic field. The effect of action
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[0023] In order to make the above objects, features and advantages of the present invention more comprehensible, specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0024] An embodiment of the present invention provides a system for diagnosing plasma parameters, combining figure 1 As shown, it includes: a vacuum electrode, a data processing device 4, a data collection device 5, a gas environment maintaining device, a Langmuir probe 6, and a glow discharge tube 7; The vacuum electrode is suitable for providing the required power for glow discharge; the gas environment maintaining device is connected to the glow discharge tube 7 and is suitable for providing the required gas environment for glow discharge; the Langmuir The probe 6 is connected to the data processing device 4 through the data collection device 5; the data collection device 5 is suitable for collecting the voltage on the Langmuir probe 6 ...
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