1179 results about "Broadbanding" patented technology

The invention belongs to the technical field of radar wave-absorbing materials, and discloses a double-sided wave-absorbing broadband stealth composite material and a preparation method thereof. The broadband stealth composite material with the double-sided wave absorbing function comprises a non-metal-based composite material body and at least five metamaterial layers arranged in the thickness direction of the non-metal-based composite material body at intervals. The number of the metamaterial layers is an odd number, a middle metamaterial layer is arranged in the middle of the metamaterial layers in the thickness direction, and the rest metamaterial layers are symmetrically distributed on the two sides of the middle metamaterial layer; the metamaterial layer comprises conductive pattern units which are periodically arranged; the relative dielectric constant of the nonmetal-based composite material body is not greater than 10; the double-sided wave-absorbing broadband stealth composite material does not contain a metal reflecting layer. When electromagnetic waves with the frequency of 1-18 GHz vertically enter the material, the transmissivity of the material is small (smaller than-13 dB, namely smaller than 5%), and meanwhile the material has low reflectivity in a broadband. And the preparation method is simple to operate and easy to realize large-scale production.

A system can communicate broadband cellular communications with a user equipment. The system can direct the user equipment to perform iterations of transmitting a keep alive report periodicity signal according to a packet data convergence protocol protocol data unit format. The system can, in response to determining that a consecutive threshold number of keep alive report periodicity signals of the iterations of transmitting the keep alive report periodicity signal has not been received, initiate a user equipment release transaction with regard to the user equipment.

The invention discloses a broadband full-Stokes polarization imaging device based on non-orthogonal four-channel polarization beam splitting, which comprises a dielectric substrate, a non-orthogonal polarization beam splitting metasurface and a focal plane detection array, and is characterized in that the non-orthogonal polarization beam splitting metasurface is composed of a plurality of sub-wavelength unit structures; the sub-wavelength unit structure is a single-layer anisotropic medium nano-column array and is configured to perform intrinsic-loss-free non-orthogonal four-channel beam splitting on incident light and form four spatially separated focuses on the same focal plane, and polarization states corresponding to the four channels form a regular tetrahedron measurement base on a Poincare sphere; therefore, full Stokes parameter measurement is completed by four pixels; the sub-wavelength unit structure forms a super-pixel unit, and the super-pixel unit is aligned and integrated with a focal plane detection array in a two-dimensional array form to form a compact polarization camera facing focal plane segmentation. The device is simple in structure, easy to integrate with the CMOS front end, small in device size, low in power consumption and high in mass production feasibility.

The invention relates to a time domain broadband adaptive beam forming method and system based on Chebyshev weighting, and belongs to the field of array signal processing. Aiming at the technical problems of poor real-time performance and high sidelobe of the existing broadband beam forming, the method comprises the following steps of: dividing a received broadband signal into a plurality of sub-bands, obtaining an optimal weight vector for each sub-band by adopting a minimum linear constraint iterative algorithm after down-conversion, constructing an expected response of an FIR filter according to each weight, obtaining a filter coefficient through L2 norm convex optimization, and finally obtaining a high sidelobe beam according to the expected response of the FIR filter. And performing time domain weighting on each array element signal by using a filter bank, and outputting a directional beam. According to the method, the calculated amount is low, a main lobe and interference null can be formed in real time in a broadband, and a certain side lobe height is kept.

The invention discloses an ONU gateway connection switching method, device and equipment of a PON network and a medium, the method is suitable for terminal equipment, and the method comprises the following steps: acquiring signal quality of a plurality of ONU gateways in a communication range, and determining a second ONU gateway of which the signal quality is superior to that of a currently connected first ONU gateway from the signal quality; establishing a second connection with the second ONU gateway, and keeping a first connection with the first ONU gateway; transmitting traffic data corresponding to the terminal device through the first connection and the second connection; and when the traffic data transmitted by the second connection meets the target traffic data distribution condition, disconnecting the first connection. According to the method, non-inductive switching is achieved through double-connection parallel transmission of flow data, service interruption in the switching process is effectively avoided, network continuity and user experience are improved, and the method can be applied to fiber to room (FTTR), enterprise-level fiber to room (FTTR-B) and broadband fusion terminal products.

The invention discloses a broadband and high-efficiency true time delay reflective array antenna, and belongs to the technical field of antenna engineering. Through the design of the broadband horn feed antenna, the broadband butterfly-shaped dipole antenna and the real-time-delay coaxial transmission line, high-efficiency directional radiation is realized. The gain bandwidth of the multi-layer patch type reflective array antenna is much larger than that of a traditional multi-layer patch type reflective array antenna; compared with a traditional transmission line phase modulation type reflective array antenna, due to stable time delay and shielding and no resonant structure, the antenna has better gain stability, and an in-band gain curve is increased approximately linearly. Finally, the antenna is simple in structure and can be realized only by a single-layer patch structure and a common coaxial transmission cable, and high-cost laminated patch processing is not needed.

The invention provides a rapid broadband signal detection and identification method and device based on a time-frequency graph, and the method comprises the steps: converting a broadband signal into a time-frequency graph, and inputting the time-frequency graph into a YOLO-X network for signal time-frequency positioning after the time-frequency graph is preprocessed; constructing a complete signal instance containing a Welch power spectrum based on a positioning result; outputting signal category and confidence evaluation through two-stage feature analysis; and finally, realizing automatic processing or expert secondary discrimination according to a confidence threshold. According to the method, deep learning and signal processing technologies are fused, and the signal detection speed, the recognition accuracy and the decision reliability in a complex electromagnetic environment are remarkably improved.

The present application discloses a low-cost and high-performance radio-frequency amplifier, comprising an input stage circuit, a common-gate stage circuit, and an output load circuit. The input stage circuit implements conversion from a single-ended signal to a differential signal, implements input impedance matching, and converts an inputted radio-frequency voltage signal into a radio-frequency current signal. The input stage circuit comprises a first three-coil transformer, consisting of a primary coil, a secondary coil, and a third coil. The common-gate stage circuit transmits the radio-frequency current signal outputted by the input stage circuit to the output load circuit, increases the withstand voltage and equivalent output impedance of the circuit, and implements gain control in at least two modes. The output load circuit converts the radio-frequency current signal from the common-gate stage circuit into a radio-frequency voltage signal, implements conversion from a differential signal to a single-ended signal, and outputs an amplified radio-frequency voltage signal. The present application provides a radio-frequency amplifier having a small size, broadband matching, high linearity, a large dynamic range, and low design complexity.

The invention discloses an on-line insulation monitoring system and method for a national railway vehicle, and relates to the technical field of on-line insulation monitoring, and the system comprises a detection signal injection module which is used for injecting a preset broadband active detection signal, and synchronously collecting a response signal set transmitted through a vehicle body grounding network; the fingerprint feature construction module is used for constructing network fingerprint features in a current insulation state; the spatial distribution atlas acquisition module is used for carrying out inversion calculation to obtain an admittance spatial distribution atlas of the whole vehicle; and the insulation abnormal area identification module is used for identifying an insulation abnormal area. According to the invention, the technical problems of long troubleshooting time and poor accuracy caused by incapability of online real-time monitoring of the insulation state of the vehicle body grounding network of the national railway vehicle and low abnormal area positioning precision in the prior art are solved, and online monitoring of the insulation state of the vehicle body grounding network of the national railway vehicle and accurate positioning of the abnormal area are realized. And the efficiency and the accuracy of insulation fault checking are improved.

The invention discloses a broadband dual-circularly-polarized low-cost phased-array antenna array element, which comprises an antenna radiation structure and a slot feed structure which are arranged independently from each other, and is characterized in that the antenna radiation structure comprises a parasitic radiation layer, a first dielectric substrate, an excitation radiation layer and a second dielectric substrate which are arranged in a laminated manner; the slot feed structure comprises a slot layer, a third dielectric substrate, a strip-shaped transmission line and a fourth dielectric substrate; the antenna layer structure and the slot feed structure realize electromagnetic coupling transmission through the slot layer; a hollow symmetrical structure is arranged in the middle of the first dielectric substrate, and the hollow part is used as an air medium to reduce dielectric loss; the gap layer is provided with a multidirectional coupling gap structure; the strip-shaped transmission line is provided with at least two feed ports, and dual circularly polarized radiation is formed in the antenna layer structure through excitation of different feed ports. The antenna radiation layer has no metal through hole or blind hole, can be processed in a layered manner, has the advantages of low processing cost and high yield, and ensures impedance bandwidth while realizing dual circular polarization.

The invention relates to the technical field of radio frequency signal processing, and discloses a digital filtering repair method and system for signal distortion, and the method comprises the steps: obtaining a frequency domain amplitude-frequency response and a phase response; constructing a phase compensation amount by adopting piecewise polynomial fitting and a phase inversion mechanism; a complex number logarithm domain mapping mechanism is adopted to execute composite frequency response inversion; constructing a switchable hybrid digital filter with an amplitude path and a phase path coupled in parallel; multi-band adaptive scheduling is executed; and outputting the radio frequency baseband signal stream. The technical problems that in the prior art, frequency response nonlinear distortion in a broadband range cannot be dealt with by adopting a fixed template or a single-path filter, and particularly, a high-precision and low-delay dynamic compensation effect cannot be realized in a scene that multi-band coupling interference exists in a radio frequency ADC channel with the bandwidth exceeding 800MHz are solved. Due to the fact that the switchable hybrid digital filter is constructed, accurate modeling and flexible recovery of distortion characteristics in broadband signals are achieved.

The invention provides a probe frequency response calibration parameter determining method, a probe frequency response calibration parameter measuring system and a storage medium, and the probe frequency response calibration parameter determining method introduces a composite test signal including a steady-state frequency sweep signal and a transient pulse signal. De-embedding calculation is carried out on a data set which is obtained under the two conditions that a probe is not connected to a calibration system and the probe is connected to the calibration system and responds to the same test signal, namely amplitude division is carried out to eliminate link gain deviation, phase subtraction is carried out to strip channel phase deviation, accurate extraction of the independent frequency response characteristic of the probe is achieved, and the accuracy of the independent frequency response characteristic of the probe is improved. Therefore, the frequency response calibration parameter of the probe is determined. According to the invention, system errors introduced by a test environment and a rear-end measurement link are eliminated, the calibration precision of the amplitude-frequency characteristic and the phase-frequency characteristic of the probe in a full working frequency band is improved, and a reliable basis is provided for implementation of accurate real-time anti-distortion compensation in actual signal acquisition of measurement equipment such as an oscilloscope and the like; and the reduction authenticity of the whole measurement system in the high-frequency and broadband signal test is ensured.

The invention discloses a frequency band self-optimization and dynamic anti-interference combined system for broadband carrier communication. The system comprises a spectrum sensing fusion layer, a combined control engine, a dynamic anti-interference executor and a frequency band optimization executor, the spectrum sensing fusion layer sends the normalized spectrum data to a joint control engine; the combined control engine sends a decision instruction and allocates hardware resources based on the spectrum data; the dynamic anti-interference executor judges the interference type according to the interference characteristics to obtain a corresponding anti-interference strategy, and the hardware module is controlled to execute the anti-interference strategy; and the frequency band optimization executor performs quality detection on each preset frequency band in the service idle period, obtains scores of each preset frequency band based on a frequency band quality scoring model, and selects the preset frequency band with the highest score as a target frequency band so as to switch the current frequency band to the target frequency band. According to the invention, a double-layer collaborative decision-making mechanism is adopted, and millisecond-level dynamic anti-interference and minute-level frequency band optimization are combined.

The invention belongs to the technical field of communication, and particularly relates to a broadband, high-gain and circularly-polarized filtering folded transmission array antenna, which comprises a planar integrated feed source antenna, an SIW-Mini-SMP transition structure, a reflection type cross polarization converter RCPC and a transmission type metasurface TMMS capable of effectively generating circularly-polarized electromagnetic waves. The working frequency range of the antenna is 12.0 GHz to 18.3 GHz, the antenna covers the whole Ku wave band, the bandwidth is 41.6%, and the antenna has remarkable broadband characteristics; high gain is kept in the working frequency band, the peak gain is 22.64 dBic, and the advantage of high gain is shown.

The invention discloses a broadband low-power-consumption receiving and transmitting shared phase shifter which comprises a differential signal common port, a frequency sampling and control circuit, a dual-mode orthogonal generation circuit and a passive vector modulation synthesis circuit. The differential signal common port comprises a common input / output port interface of RF + and RF-differential radio frequency signals; the frequency sampling and control circuit is composed of a frequency sampling circuit, a frequency detection circuit and a logic control unit. The dual-mode orthogonal generation circuit is composed of a frequency selection change-over switch, a multi-phase filter, a coupling transformer, a matching network 1 and a matching network 2. The passive vector modulation synthesis circuit is composed of two passive vector modulation arrays and two combining / power dividing circuits.

A deep-learning-based method for eliminating a broadband effect and a synthesized-beam effect in low-frequency Square Kilometre Array (SKA) is provided. The method includes: establishing a frequency-domain extraction module, a feature enhancement module, and a frequency-domain gating module; constructing, based on the frequency-domain extraction module, the feature enhancement module, and the frequency-domain gating module, a neural network model based on a frequency-domain self-attention mechanism; performing primary feature extraction on an input image based on the feature enhancement module to obtain a low-level feature; inputting the low-level feature into the frequency-domain gating module and performing downsampling to achieve feature encoding, so as to obtain an encoded feature; inputting the encoded feature into the frequency-domain extraction module and performing frequency-domain attention computation and upsampling to achieve feature decoding, so as to obtain a decoded feature; and inputting the decoded feature into the feature enhancement module to obtain a target restored image.

The invention designs a broadband intermediate-frequency heterogeneous integrated communication transceiving micro module and a three-dimensional packaging method, and belongs to the technical field of advanced packaging. The micro module comprises a TSV silicon adapter plate, a Fan-out module, an HTCC ceramic substrate and a digital chip. The TSV silicon adapter plate adopts a high-resistance silicon substrate, and a coaxial shielding TSV structure is arranged on the TSV silicon adapter plate and comprises an inner layer signal through hole and an outer layer grounding layer. A frequency synthesizer chip and a radio frequency chip are embedded in the Fan-out module, and high-density horizontal interconnection is realized through a plurality of redistribution layers. The HTCC ceramic substrate is of a multi-layer laminated structure, and an impedance matching network is arranged in the HTCC ceramic substrate. The three-dimensional packaging method comprises the steps of TSV silicon adapter plate preparation, Fan-out module processing, digital chip stacking and system-level integration. High-density packaging of the radio frequency chip and the digital chip is achieved through the three-dimensional heterogeneous integrated architecture, and low-loss transmission of broadband signals is guaranteed through the coaxial shielding TSV structure and the impedance matching network.

The invention discloses a withstand voltage test method and device for transformer production and a medium, and belongs to the technical field of transformer tests.The method specifically comprises the steps that firstly, a frequency conversion test power source is connected to the input end of a to-be-tested transformer and connected with a high-precision non-inductive shunt in series, and an environment monitoring unit is started to lock temperature and humidity in real time; the control power supply outputs a standard sine test voltage with a preset frequency; then, a high-frequency broadband acquisition card is used for synchronously obtaining instantaneous waveform data of voltage and total leakage current of the transformer, and analog signals are converted into discrete digital signals; performing second-order difference on the total leakage current signal to position a high-frequency abrupt change point, and reconstructing a smooth waveform through Lagrange interpolation; a current phase difference is calculated by taking a voltage zero crossing point as a phase reference, a complex plane coordinate system is constructed, and resistive and capacitive current components are calculated through waveform amplitude projection; and finally, according to the temperature and the humidity, a correction coefficient is called to normalize the resistive current, and a quality inspection result is output by comparing an insulation safety threshold.

The invention provides an AI-driven multi-wireless-signal candid photographing detection device which comprises a mounting shell, a hardware acquisition layer, an edge computing layer, a cloud federation layer and a man-machine interaction layer, and all the layers achieve signal interaction through PCIe4.0 and SPI hardware interface communication protocols. The broadband patch antenna, the ceramic antenna and the helical antenna are adopted to cover a full target frequency band, the millimeter wave radar chip is matched, the 16 * 16 metamaterial RIS panel is additionally configured, and the weak signal receiving power is improved by synchronously controlling a reflection phase focusing signal, so that the problem of missing detection is solved; the multi-signal tensor decomposition unit and the CNN-LSTM signal classification unit construct frequency, intensity, time and phase four-order tensors, and overlapped signals are separated through Khatri-Rao space-time coding; a three-layer CNN and a two-layer LSTM are combined, precise classification of candid photographing signals is realized, the misjudgment rate is reduced, millimeter wave assisted precise distance measurement is combined with millimeter wave flight time data and an RSSI attenuation model, a distance measurement error is controlled through a dynamic weighting algorithm, and the problem of positioning misalignment is solved.

The invention provides a broadband noise adaptive active noise reduction control method, which belongs to the technical field of noise reduction control, and comprises the following steps of: 1, acquiring and enhancing an original reference signal for target broadband noise; step 2, multi-channel coherence calibration is carried out based on the enhanced reference signal; step 3, generating a control signal based on the calibrated reference signal; 4, collecting an error signal based on an error microphone arranged in a vehicle compartment; and step 5, performing adaptive parameter updating based on the calibrated reference signal and error signal. The problems of slow algorithm convergence and poor noise reduction performance caused by inaccurate reference signal spectrum capture, easy pollution and poor multi-channel coherence in the existing method are solved, and efficient and stable control of broadband noise is realized.

The invention discloses a Terahertz broadband high-gain Vivaldi antenna based on a CPW (Coherent Plane Waveguide) rotary slot line structure, and belongs to the field of Terahertz communication. The antenna adopts an integrated single-layer metal structure on the top layer of a dielectric substrate, and is divided into a radiation arm and a CPW rotating slot line balun along the axial direction. The inner side edge of the radiation arm is a smooth exponential change curve, and the middle exponential gradual change groove forms a broadband traveling wave radiation channel. Periodic grid choke grooves are loaded on the outer side edge so as to suppress edge surface waves and improve a directional diagram. The feed part adopts a CPW to slot line balun structure to realize conversion from an unbalanced mode to a balanced mode, and a fan-shaped radial branch knot is utilized to form a broadband virtual short circuit boundary at a feed point to ensure unidirectional efficient transmission of energy. In addition, a group of string-shaped director patches are arranged in the opening area of the exponential gradual change groove along the central axis, and the wave beam is guided through phase correction. The terahertz planar antenna effectively solves the problems of limited bandwidth and insufficient gain of the terahertz planar antenna, and has the characteristics of compact structure, easiness in integration, excellent radiation performance and the like.

The invention discloses a low-orbit broadband satellite terminal switching method for an electric power emergency network, which belongs to the technical field of electric power, and comprises the following steps: setting a multi-stage switching trigger mechanism including normal switching trigger and abnormal switching trigger; aiming at a normal switching scene, selecting a target satellite by adopting a multi-attribute decision satellite switching strategy based on a directed graph, and aiming at an abnormal switching or new call access scene, selecting the target satellite by adopting the multi-attribute decision satellite switching strategy based on a combined weight; and when channel resources are in shortage, a priority queuing access mechanism is executed. The method effectively solves the problems of frequent satellite switching, easy link interruption, intense resource competition and the like in an electric power emergency scene, and remarkably improves the communication continuity and service quality of the low-orbit broadband satellite terminal in a complex emergency environment.

A broadcast service network (separate from a cellular network) includes broadcast service signal (BSS) nodes that broadcast signals to receivers of user equipment (UE). The BSS may provide broadcast service information to user equipment, such as the emergency notifications, even when the user equipment is out of range of the cellular network. Further, the broadcast service signals may provide information that improves the user equipment's search and access time for connecting to the cellular network (e.g., a cellular service station) and / or that assists the user equipment in locating a nearby region of cellular network coverage. In addition, the BSS may be wake-up signals configured to activate the receiver when the receiver is in a sleep or inactive mode. In some embodiments, the BSS may be pointer signals configured to direct the user equipment to a broadcast service channel to receive the broadcast service information.

The invention discloses a MoTe2 / Bi < 0.5 > Sb < 1.5 > Te3 heterojunction thin film and application thereof in broadband near-infrared photoelectric detection. The heterojunction thin film is formed by stacking a MoTe2 thin film prepared by magnetron sputtering and a Bi < 0.5 > Sb < 1.5 > Te3 thin film prepared by magnetron sputtering, and the MoTe2 thin film and the Bi < 0.5 > Sb < 1.5 > Te3 thin film are in direct contact to form a heterojunction interface; the preparation method comprises the following steps: putting a cleaned n-Si substrate into a magnetron sputtering instrument, sputtering a MoTe2 film in an inert atmosphere, and carrying out annealing treatment to obtain n-Si / MoTe2; and continuously putting the n-Si / MoTe2 into the magnetron sputtering instrument, sputtering a Bi0. 5Sb1. 5Te3 film on the surface of the MoTe2 film in an inert atmosphere, and carrying out annealing treatment. According to the invention, a self-powered practical device with high responsivity, high specific detection rate, fast response speed and high stability can be obtained.

The invention provides a broadband absorption and transmission integrated frequency selective surface with a high selection characteristic, which comprises a first loss layer, a second loss layer and a frequency selection layer, and is characterized in that the first loss layer and the second loss layer realize a transmission band with the high selection characteristic and the broadband characteristic at the same time by using dual-order resonance; the second loss layer and the frequency selection layer are cascaded to realize the absorption and transmission integrated characteristic, and the first loss layer is used for improving the low-frequency and high-frequency wave absorption characteristics and expanding the wave absorption bandwidth. Under the combined action of the first loss layer, the second loss layer and the frequency selection layer, wave transmission within the frequency band of 7.72-11.89 GHz and wave absorption within the frequency band of 1.96-7.12 GHz and the frequency band of 12.95-17.33 GHz are achieved. The antenna has high selection characteristics and broadband characteristics, can effectively suppress interference of external electromagnetic waves of other frequency bands or electromagnetic waves of a frequency band close to a communication frequency band on communication, can reduce the radar cross section of a target, and facilitates target stealth.

A broadband Doherty power amplifier is provided, which includes a power divider, a carrier power amplifier circuit, a peak power amplifier circuit, and a load modulation network. The carrier power amplifier circuit includes a carrier input matching circuit, a carrier power amplifier, and a carrier output matching circuit. The peak power amplifier circuit includes a peak input matching circuit, a peak power amplifier and a peak output matching circuit. A resistance value of a system load is ZL. An output impedance of the carrier output matching circuit is Zm and meets Zm=ZL(n+1). An output impedance of the peak output matching circuit is Zp and meets Zp=ZL(n+1) / n. The load modulation network is configured to set an impedance of a combination point to be ZQ, whose resistance value is ZL. A method of implementing a broadband Doherty power amplifier is further provided.

The invention relates to a broadband bending-resistant multimode optical fiber and a preparation method thereof, the refractive index profile of a core layer is in a gradually-changed parabola shape, the distribution index alpha is 1.95-2.65, the radius R1 of the core layer is 12-35 microns, the delta 1max is 0.9%-1.4%, the relative refractive index difference delta 1min at the R1 position of the edge of the core layer is-0.16%--0.06%, cladding layers comprise an inner cladding layer, a first sunken cladding layer, a second sunken cladding layer and an outer cladding layer from inside to outside in sequence, the inner cladding layer is sequentially provided with a first inner cladding layer and a second inner cladding layer from inside to outside, the single-side width (R4-R3) of the first sunken cladding layer is 1.5-9.0 [mu] m, delta 4 is-1.1%--0.60%, the single-side width (R5-R4) of the second sunken cladding layer is 1.0-3.0 [mu] m, delta 5 is-1.0%--0.55%, the radius R6 of the outer cladding layer is 60-65 [mu] m, and delta 6 is-0.12-0.12%. The core cladding is reasonable in structural design, has the excellent characteristics of high bandwidth, strong bending resistance and low attenuation, and is high in transmission efficiency and excellent in long-term stability and reliability.

The invention provides a broadband linear frequency modulation microwave source based on ultra-short external cavity modulation light feedback, and relates to the field of microwave photonics. Continuous light generated by the main semiconductor laser is injected into the slave laser after being adjusted, so that the slave laser works in a periodic oscillation state; the slave laser, the electro-absorption modulator and the reflector are integrated to form an ultra-short outer cavity, and the intensity of feedback light is regulated and controlled by an external signal source so as to realize linear scanning of cavity mode frequency. After beam splitting of light output from the laser, one path forms a long external cavity feedback stable signal through the adjustable optical fiber delay line, and the other path outputs a target signal after beat frequency of the photoelectric detector and filtering of the band-pass filter. A high-speed modulator and a high-frequency microwave source are not needed, the broadband advantage of a photonics scheme is reserved, the frequency sweeping bandwidth is further improved to 60 GHz or above, the center frequency and the frequency sweeping range are independently adjustable, the structure is simple, cost is low, integration is easy, and the device is suitable for scenes such as photoelectric radars.

The invention discloses a multi-area real-time end point detection system and method for cleaning a semiconductor chamber, and relates to the field of semiconductor gas detection, a gas path unit is provided with a main gas inlet, a first branch, a second branch and a valve module used for connecting or disconnecting the first branch or the second branch; a first broadband light source and a first multi-channel photoelectric detector are oppositely arranged on the two sides of the first cavity, and optical filters with different central wavelengths are arranged in multiple channels of the first multi-channel photoelectric detector respectively; a plurality of second photoelectric detectors, a plurality of target light sources and a displacement platform are oppositely arranged on the two sides of the second cavity, and the target light sources are installed on the displacement platform and can move relative to the second photoelectric detectors; and the control module is in signal connection with the valve module, the first multi-channel photoelectric detector, the displacement platform and each target light source. By adopting the scheme, the detection efficiency is considered while the detection precision is ensured, and more reliable real-time end point judgment can be realized in a complex gas flow field environment.

The invention discloses a temperature and hydrogen concentration dual-parameter synchronous detection system and method, and the system comprises an ASE broadband light source, the output of the ASE broadband light source is divided into two paths through a coupler, one path enters a first circulator, the other path enters a second circulator, the output of the first circulator enters a first FBG sensor, the output of the second circulator enters a second FBG sensor, and the output of the first FBG sensor enters a second FBG sensor. The two FBG sensors are arranged in the gas chamber, the first FBG sensor and the second FBG sensor are provided with FBG topological optical fiber structures with different working wavelengths and have temperature sensitivity and gas selective response, and reflected signals of the two FBG sensors are coupled to one path through the dual-channel wavelength division multiplexer and are sent to the spectrum analyzer for wavelength demodulation. The temperature sensitivity and the gas selective response are integrated in the same sensing unit by utilizing the wavelength coding characteristic of the fiber bragg grating, so that precise decoupling and real-time output of double parameters are realized, and the detection efficiency and the data consistency are improved.