Patents
Literature
Patsnap Copilot is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Patsnap Copilot

36 results about "Diffraction model" patented technology

Method and Apparatus for Measuring a Structure on a Substrate, Computer Program Products for Implementing Such Methods and Apparatus

Diffraction models and scatterometry are used to reconstruct a model of a microscopic structure on a substrate. A plurality of candidate structures are defined, each represented by a plurality of parameters (p1, p2, etc.)). A plurality of model diffraction signals are calculated by simulating illumination of each of the candidate structures. The structure is reconstructed by fitting one or more of the model diffraction signals to a signal detected from the structure. In the generation of the candidate structures, a model recipe is used in which parameters are designated as either fixed or variable. Among the variable parameters, certain parameters are constrained to vary together in accordance with certain constraints, such as linear constraints. An optimized set of constraints, and therefore an optimized model recipe, is determined by reference to a user input designating one or more parameters of interest for a measurement, and by simulating the reconstruction process reconstruction. The optimized model recipe can be determined automatically by a parameter advisor process that simulates reconstruction of a set of reference structures, using a plurality of candidate model recipes. In the generation of the reference structures, restrictions can be applied to exclude unrealistic parameter combinations.
Owner:ASML NETHERLANDS BV

Multi-band fusion algorithm based on improved relaxation algorithm

The invention provides a multi-band fusion algorithm based on an improved relaxation algorithm. The algorithm comprises the steps of receiving a plurality of sub-band signals, selecting one sub-band signal from the plurality of sub-band signals as a reference signal, and compensating incoherent terms between the rest sub-band signals and the reference signal based on the improved relaxation algorithm, and estimating geometric diffraction model parameters of the large-bandwidth signal by using an improved relaxation algorithm on the basis of each sub-band signal subjected to incoherent term compensation, and substituting the geometric diffraction model parameters into a geometric diffraction model to reconstruct the large-bandwidth signal. According to the algorithm provided by the invention, in coherent processing, geometric diffraction model parameters of each sub-band are estimated based on an improved relaxation algorithm, and incoherent items are calculated and compensated by usingthe estimated parameters, so that the incoherent items can be accurately estimated under a strong clutter condition; because the algorithm can accurately estimate the frequency sampling point corresponding to the target position, the imaging resolution is high; a missing frequency band signal can be estimated so as to estimate a large-bandwidth radar signal, and the estimation precision is high.
Owner:AEROSPACE INFORMATION RES INST CAS

Method and apparatus for measuring a structure on a substrate, computer program products for implementing such methods and apparatus

Diffraction models and scatterometry are used to reconstruct a model of a microscopic structure on a substrate. A plurality of candidate structures are defined, each represented by a plurality of parameters (p1, p2, etc.)). A plurality of model diffraction signals are calculated by simulating illumination of each of the candidate structures. The structure is reconstructed by fitting one or more of the model diffraction signals to a signal detected from the structure. In the generation of the candidate structures, a model recipe is used in which parameters are designated as either fixed or variable. Among the variable parameters, certain parameters are constrained to vary together in accordance with certain constraints, such as linear constraints. An optimized set of constraints, and therefore an optimized model recipe, is determined by reference to a user input designating one or more parameters of interest for a measurement, and by simulating the reconstruction process reconstruction. The optimized model recipe can be determined automatically by a parameter advisor process that simulates reconstruction of a set of reference structures, using a plurality of candidate model recipes. In the generation of the reference structures, restrictions can be applied to exclude unrealistic parameter combinations.
Owner:ASML NETHERLANDS BV

Two-dimensional super-resolution radar imaging method based on fusion technology

The invention relates to a two-dimensional super-resolution radar imaging method based on a fusion technology. The two-dimensional super-resolution radar imaging method comprises the following steps of 1, receiving each sub-band radar signal in each sub-pulse time period; 2, carrying out motion compensation on the signal in each pulse time period; 3, representing the sub-band signals in the pulse time period by using a geometric diffraction model; 4, selecting the sub-band signal distributed in the lowest frequency band as a reference signal, and calculating and compensating the incoherent terms between other sub-band signals and the sub-band signal based on the improved root-MUSIC; 5, based on the improved root-MUSIC, estimating the geometric diffraction model parameters of the large-bandwidth signals from all the sub-band signals subjected to incoherent item compensation; 6, substituting the estimated large-bandwidth signal parameters into the geometric diffraction model to reconstruct a large-bandwidth signal; 7, carrying out distance dimension compression imaging on the estimated large-bandwidth signal; and 8, for a plurality of sub-pulse echo bands corresponding to each distance unit, obtaining a pulse echo signal of long pulse accumulation time, and performing azimuth compression to realize the azimuth super-resolution.
Owner:AEROSPACE INFORMATION RES INST CAS

Diffraction wave imaging method and device and electronic equipment

ActiveCN109490951AImprove accuracyImproving the imaging precision of diffracted wavesSeismic signal processingWave fieldDiffraction model
The invention provides a diffraction wave imaging method and device and electronic equipment, wherein the method comprises the following steps: acquiring seismic data and velocity data; carrying out simulation processing on a preset seismic model according to the speed data to obtain simulated seismic data, wherein the seismic model comprises a reflection model and a diffraction model; obtaining awave field residual error objective function and a wave field residual error value based on the seismic data and the simulated seismic data; performing migration processing on the wave field residualerror value to obtain a gradient of a wave field residual error objective function, wherein the gradient comprises a reflection gradient and a diffraction gradient; updating the reflection model andthe diffraction model respectively according to the reflection gradient and the diffraction gradient to obtain an updated reflection model and an updated diffraction model; performing iterative updating processing on the wave field residual error objective function according to the updated reflection model and the updated diffraction model to obtain a diffraction wave imaging result. According tothe diffraction wave imaging method, the migration method is utilized, and the least square idea is combined, thereby effectively improving the diffraction wave imaging precision, and improving the accuracy and the focusing performance of an imaging result.
Owner:CHINA UNIV OF MINING & TECH (BEIJING)

Multi-LED multiplexing 3D-FPM reconstruction algorithm based on multilayer diffraction model

A multi-LED multiplexing 3D-FPM reconstruction algorithm based on a multi-layer diffraction model relates to the technical field of computational imaging, solves the problem that the acquisition rate is too slow when a plurality of LEDs illuminate, and comprises the following steps: step 1, constructing a loss function between a low-resolution picture obtained by the multi-layer diffraction model and a low-resolution picture actually acquired by a camera; step 2, updating a sample refractive index function of the thin sample layer by adopting a gradient descent method by utilizing the newest loss function, the newest incident light complex amplitude of the thin sample layer and the newest sample refractive index function of the thin sample layer, and updating a phase part of a newest pupil function by utilizing the gradient descent method; and step 3, judging whether the number of times of completing the step 2 reaches a preset number, if so, outputting a sample refractive index function, and otherwise, performing the step 1 again according to an updated result. According to the method, the number of LR pictures needing to be collected is greatly reduced, meanwhile, the influence of system aberration on a reconstruction result is effectively reduced, and the reconstruction precision of an algorithm is improved.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI

Method and system for measuring plasma parameters of femtosecond laser induced gas ionization

The invention discloses a method and a system for measuring plasma parameters of femtosecond laser-induced gas ionization, picosecond laser is used as detection light to detect the dynamic evolution process of plasma obtained by femtosecond laser-induced gas ionization, and a diffraction model is established based on Fraunhofer diffraction and Fresnel diffraction theories; the detected diffraction spectrum is fit with a diffraction spectrum obtained based on a diffraction model to obtain detection light phase shift frequency domain evolution and further obtain time domain evolution of plasma parameters; according to the invention, the space-time evolution process of the plasma can be obtained in single shot measurement, and a delay line in the device does not need to be adjusted for repeated measurement in the measurement process, so that the operation process is greatly simplified, the measurement time is saved, the measurement error is reduced, and the detection accuracy is improved; and moreover, the time domain evolution of the plasma parameters can be calculated and obtained only by fitting the diffraction spectrum for one time, multiple times of extraction and fitting are not needed, and the parameter obtaining speed is improved to a great extent.
Owner:HUAZHONG UNIV OF SCI & TECH

Unified modeling method for power equipment assets

The invention relates to the technical field of power equipment assets, and discloses a power equipment asset unified modeling method, which comprises the following steps: acquiring three-dimensional model data of power equipment, and performing space division on a three-dimensional model of the power equipment; extracting model sub-bodies located in the plurality of sub-spaces, and extracting coordinate information of feature points of the model sub-bodies; coordinate information of feature points of the model daughter is extracted, and according to the position coordinate information of the feature points, a closed entity taking a surface formed by the feature points as an external boundary is constructed as a diffraction model daughter of the model daughter; and in the three-dimensional model of the original power equipment, replacing the model daughter with the diffraction model daughter corresponding to the model daughter so as to form the diffraction model of the power equipment. The original complex model data is replaced by the simple entity, so that the three-dimensional model data does not occupy too much computer memory during the matching design of the subsequent power equipment, and the probability of computer jamming or crash is reduced.
Owner:CHINA SOUTHERN POWER GRID DIGITAL GRID RES INST CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products