6 results about "Pupil function" patented technology

This invention discloses a lithography simulation method and system based on circular sampling function decomposition and superimposed pupil shift matrix. The method includes: sampling the shape function and pupil function of the extended light source to obtain the corresponding superimposed pupil shift matrix; processing the superimposed pupil shift matrix, the frequency domain circular sampling function matrix of the extended light source and the pupil plane to obtain the frequency domain cross-transmission coefficient matrix and the projection matrix; performing singular value decomposition on the projection matrix to obtain the singular value decomposition result; processing the spatial domain circular sampling function matrix based on the singular vectors to obtain the convolution kernel matrix; constructing a spatial domain image simulation model based on the singular value decomposition result, the convolution kernel matrix and the initial Hopkins model; and obtaining the spatial domain image simulation result based on the spatial domain image simulation model. This invention utilizes the superimposed pupil shift matrix method and analytical circular sampling function decomposition, which can reduce the direct calculation and storage of the TCC matrix and significantly reduce the computational cost required to obtain the kernel.

The invention discloses an optical system wave aberration acquisition method based on a generalized pupil function, and belongs to the technical field of imaging quality detection of optical systems. The problems that in the prior art, due to the fact that exit pupil deformation adaptability is insufficient, off-axis view field wave aberration calculation deviation is large, and it is difficult to be suitable for on-axis and off-axis view field wave aberration calculation at the same time are solved. The method comprises the following steps: acquiring an incident wavelength and a field angle of a to-be-detected optical system; obtaining entrance pupil and exit pupil parameters, and determining an entrance pupil position, an entrance pupil diameter and a corresponding exit pupil position by using a paraxial ray tracing algorithm; determining the working F number TFNO in the meridian direction and the F number SFNO in the sagittal direction under the wavelength and the field angle; obtaining a normalized pupil plane according to the TFNO and the SFNO; further generating an incident light array; tracing the incident ray array to an image surface according to an actual ray tracing algorithm; determining a virtual reference spherical surface parameter; and optical system wave aberration is obtained. The method can be applied to the technical field of optical system design.

The invention discloses a hole wall measuring device and method based on variable aperture spectral imaging, and belongs to the technical field of precision optical measurement, the device comprises a light source, a light beam collimating lens, a beam splitter prism, a pupil filter, a dispersion objective lens, a small hole, a light beam focusing lens and a camera, the beam focus lens is used for receiving the scattered beams and transmitting the beams to the camera. The axial dispersion spectrum confocal principle is adopted, the axial position is directly calculated by analyzing the characteristic wavelength of scattered light, mechanical z-axis scanning is not needed, micron-level precision measurement is achieved, the device integrates a replaceable pupil modulation mask, pupil function space distribution is optimized according to different working conditions, stray light is selectively restrained, and the measurement accuracy is improved. Therefore, the measurement stability of the low-scattering area can be improved. The device is divided into a coarse adjustment stage and a fine adjustment stage in the adjustment process, the coarse adjustment position precision is + / -0.5 mm, the fine adjustment position precision is + / -50-70 microns, and high-precision alignment and measurement reliability of the system are ensured.

The application discloses a non-iterative design method of a non-uniform continuous distribution composite pupil function, solves the problem that the design method of an existing pupil function is relatively complex, including expansion of the pupil function, matrix calculation and a calculation process of solving a high-resolution gain expression, the non-uniform continuous distribution composite pupil function is composed of a Sonine polynomial, a Zernike polynomial and a Fourier-Bessel series, numerical mapping relationships between the Sonine polynomial, the Zernike polynomial, the Fourier-Bessel series and an imaging complex amplitude distribution at a radial focal plane are respectively constructed, coefficients of the Sonine polynomial, the Zernike polynomial and the Fourier-Bessel series are solved, a function formula of the composite pupil function is finally determined, and the mapping relationship is relatively simple and operable.

This application provides a polarization-based three-dimensional imaging method, apparatus, electronic device, and storage medium, applied in the field of optical imaging. The method includes optical imaging of a target object based on a metasurface. The optical imaging result includes spatial distribution features pre-encoded by the metasurface and depth features modulated by a single-helix point spread function. Based on the spatial distribution features and depth features, the method reconstructs the three-dimensional topography of the target object with an average absolute depth. The metasurface pre-design process includes: determining the initial single-helix phase and the initial diffraction grating phase in the Jones pupil function; optimizing the phase distribution of the initial diffraction grating phase to obtain a target diffraction grating phase that meets the requirements of full Stokes polarization separation; and optimizing the phase distribution of the initial single-helix phase to obtain a target single-helix phase. Finally, the method constructs a metasurface based on the target diffraction grating phase and the target single-helix phase. This method can improve the accuracy of polarization-based three-dimensional imaging.

This invention discloses a non-iterative design method for composite pupil functions based on Zernike radial polynomials. It solves the problems of existing composite pupil function design methods having complex calculation processes and relying too heavily on model assumptions, which only consider a finite number of terms in the Zernike radial polynomial expansion. Starting from the imaging complex amplitude distribution at the radial focal plane, this invention establishes a numerical mapping relationship between the composite pupil function and the radial complex amplitude distribution at the imaging plane, and constructs a system of multivariate linear equations related to the coefficients of the composite pupil function, providing a new approach to pupil function design.