Differential confocal Raman spectra test method
A spectrum test and differential confocal technology, which is applied in the field of high spatial resolution spectrum test imaging, can solve the problem that the excitation spot position of the confocal Raman spectroscopy system cannot be guaranteed, and the confocal Raman spectroscopy test technology cannot use the micro-region spectral characteristics. Test and analysis occasions, limit the micro-area spectral detection ability of confocal Raman spectroscopy instruments, etc., to achieve the effect of improving the micro-area spectral detection ability, improving the micro-area spectral detection ability, and improving the geometric scale detection ability of the micro-area
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[0036] The present invention will be further described below in conjunction with drawings and embodiments.
[0037] As shown in Figure 3, the beam expanded by the beam expander 20 emitted by the laser 1 passes through the pupil filter 18 (amplitude pupil filter) and passes through the polarizing beam splitter 2, and then becomes the polarization direction parallel to the paper surface p-light, the p-light is focused on the measured sample 7 by the objective lens 4 after passing through the 1 / 4 wave plate 3, and excites the Raman scattered light of the sample. Part of the laser beam passes back through the 1 / 4 wave plate 3 and turns into s-light whose polarization direction is perpendicular to the paper surface. The polarization beam splitter 2 reflects the s-light to the beam splitter 5. The Raman scattered light is also transmitted by the polarization beam splitter together with the laser beam. 2 reflection reaches the beam splitter 5.
[0038] The beam splitter 5 first divi...
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