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Rear-mounted light splitting pupil laser confocal Brillouin-Raman spectroscopy testing method and device

A Raman spectroscopy and pupil splitting technology is applied in the field of post-pupil laser confocal Brillouin-Raman spectroscopy testing and devices, which can solve the problems of large limitations and low spatial resolution, and improve the spectral signal of the system. The effect of improving the signal-to-noise ratio, improving the lateral resolution of the system, and improving the spectral detection capability of the micro-area

Inactive Publication Date: 2019-01-11
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0012] The purpose of the present invention is to solve the problem that the existing technology is greatly limited by external factors and the spatial resolution is low, and propose a post-splitting pupil laser confocal Brillouin-Raman spectrum testing method and device

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  • Rear-mounted light splitting pupil laser confocal Brillouin-Raman spectroscopy testing method and device
  • Rear-mounted light splitting pupil laser confocal Brillouin-Raman spectroscopy testing method and device
  • Rear-mounted light splitting pupil laser confocal Brillouin-Raman spectroscopy testing method and device

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Embodiment

[0060] In this embodiment, the light source system 1 uses a 532nm continuous laser, the dichroic spectroscopic system 6 uses a NotchFilter, the Raman spectrum detection unit 11 uses a Raman spectrometer, and the Brillouin spectrum detection unit 17 uses a Brillouin spectrometer.

[0061] Such as Figure 11 As shown, the post-splitting pupil laser confocal Brillouin-Raman spectroscopy detection process is as follows:

[0062] Firstly, the laser light emitted from the light source system 1 composed of lasers is converged by the fifth converging mirror 27 and enters the third pinhole 28, and then collimated and expanded by the sixth converging mirror 29 to form a parallel excitation beam. After the excitation beam passes through the radial polarization conversion system 24, the dichroic prism 2 and the pupil filter 25, the measured objective lens 3 converges on the measured sample 4, and excites the Raman scattered light carrying the micro-area characteristic parameters of the me...

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Abstract

The invention relates to a rear-mounted light splitting pupil laser confocal Brillouin-Raman spectroscopy testing method and device and belongs to the technical field of microscopy spectroscopy imaging. A light splitting pupil laser confocal microscopy imaging system is established through utilization of abandoned Rayleigh scattering light in a confocal Raman spectroscopy detection system, and high spatial resolution detection of geometrical morphology of a sample is realized. Various basic properties of a tested sample are obtained through detection of abandoned Brillouin scattering light inthe confocal Raman spectroscopy detection system, and parameters such as elasticity and density of a material are measured. Spectroscopy information at a position of a focus of the sample is preciselyobtained through utilization of a focus position obtained by the light splitting pupil laser confocal microscopy imaging system, and further image-spectroscopy integrated light splitting pupil laserconfocal Brillouin-Raman spectroscopy high spatial resolution imaging and detection are realized. Through integration of a confocal Raman spectroscopy detection technology and a confocal Brillouin spectroscopy detection technology, morphology performance multiparameter comprehensive measurement of the sample is realized.

Description

technical field [0001] The invention relates to a post-splitting pupil laser confocal Brillouin-Raman spectrum testing method and device, which belongs to the field of microspectral imaging technology. The organic combination of deep-rooted spectroscopy detection technology involves a post-splitting pupil laser confocal Brillouin-Raman spectroscopy testing method and device of "map-spectrum integration". Spatial resolution detection, etc. Background technique [0002] Scattering occurs when photons interact with phonons in matter. Scattering in which the frequency does not change is called elastic scattering (Rayleigh scattering), and scattering in which frequency changes is called inelastic scattering (Raman scattering and Brillouin scattering). Scattering), where Raman scattering and Brillouin scattering are the results of the interaction of photons and optical phonons and the interaction of photons and acoustic phonons, respectively. [0003] In Rayleigh scattering, the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/47G01N21/65G01N21/01
Inventor 王允吴寒旭赵维谦邱丽荣
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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