Method and device for testing rear spectroscopic pupil laser confocal Raman spectrum
A spectral measurement and Raman spectroscopy technology, applied in the field of microscopic spectral imaging, can solve the problems affecting the spatial resolution of confocal Raman spectroscopy systems, difficulty in installation and adjustment, etc. force, the effect of simplifying the structure of the optical path
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[0056] In this embodiment, the light source system 1 uses a 532nm continuous laser, the dichroic spectroscopic system 6 uses a NotchFilter, and the spectral detection unit 11 uses a Raman spectrometer.
[0057] Such as Figure 11 As shown, the split-pupil laser confocal Raman spectroscopy detection process is as follows:
[0058] First, the laser light emitted from the light source system 1 composed of lasers is converged by the third converging lens 21 into the second pinhole 22, and then collimated and expanded by the fourth converging lens 23 to form a parallel excitation beam. After the excitation beam passes through the radial polarization conversion system 18, the dichroic prism 2 and the pupil filter 19, the measured objective lens 3 converges on the measured sample 4, and excites the Raman scattered light carrying the micro-area characteristic parameters of the measured sample 4 .
[0059] Then the three-dimensional scanning system 5 is controlled by the computer 29 ...
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