Differential confocal Raman spectra test method
A spectral testing and differential confocal technology, applied in the field of high spatial resolution spectral testing and imaging, can solve the problem of limiting the micro-region spectral detection capability of confocal Raman spectroscopy instruments, the inability to guarantee the excitation spot position of the confocal Raman spectroscopy system, Confocal Raman spectroscopy testing technology cannot be used for micro-area spectral characteristics testing and analysis occasions, etc., to achieve the effect of improving micro-area spectral detection capabilities, improving micro-area spectral detection capabilities, and micro-area geometric scale detection capabilities.
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[0036] The present invention will be further described below in conjunction with drawings and embodiments.
[0037] Such as image 3 As shown, the beam expanded by the beam expander 20 emitted by the laser 1 passes through the pupil filter 18 (amplitude pupil filter) and passes through the polarization beam splitter 2, and then becomes p light whose polarization direction is parallel to the paper. , the p light is focused on the sample 7 by the objective lens 4 after passing through the 1 / 4 wave plate 3, and excites the Raman scattered light of the sample. Part of the laser beam passes back through the 1 / 4 wave plate 3 and turns into s-light whose polarization direction is perpendicular to the paper surface. The polarization beam splitter 2 reflects the s-light to the beam splitter 5. The Raman scattered light is also transmitted by the polarization beam splitter together with the laser beam. 2 reflection reaches the beam splitter 5.
[0038] The beam splitter 5 first divides...
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