Spectral pupil laser confocal Brillouin-Raman spectrum measuring method and device

Abstract

The invention relates to a spectral pupil laser confocal Brillouin-Raman spectrum measuring method and device and belongs to the technical field of microscopy spectral imaging. The device comprises a light source system for generating stimulating light beams, a measuring objective lens, a lighting pupil, a collecting pupil, a dichroic light splitting device, a spectroscope, an Raman spectrum detecting device, a Brillouin spectrum detecting device, a spectral pupil laser confocal detecting device, a three-dimensional scanning device, a displacement sensor and a data processing unit. The method and the device provided by the invention has the advantages that the abandoned rayleigh scattering light in confocal Raman spectrum detection is utilized to build a spectral pupil confocal microimaging system to realize the high-resolution imaging of the three-dimensional geometric position of a sample, the basic property and multiple cross effects of a substance are obtained by detecting the abandoned brillouin scattering light in confocal Raman spectrum detection and further the stress, elastic parameters and density of a material can be measured; the advantages of the confocal Raman spectrum detection technology and the confocal Brillouin spectrum detection technology are utilized to complement each other, and the comprehensive measurement and decoupling of multiple property parameters of the material are realized.

Description

technical field [0001] The invention belongs to the field of micro-spectral imaging technology, combines confocal microscopic technology and spectral detection technology, and relates to a method and device for measuring split-pupil laser confocal Brillouin-Raman spectroscopy, which can be used for micro-area multi-spectrum multi-spectrum measurement of samples. Comprehensive testing of performance parameters and high-resolution imaging. technical background [0002] When light passes through the medium, the medium particles are affected by the light wave, transition from one quantum state to another quantum state, and radiate scattered waves at the same time. Different energy level transitions produce Rayleigh scattering and anti-Stokes scattering respectively. According to the degree of change with the wavelength of the incident light, light scattering is divided into: Rayleigh scattering (Rayleigh), Raman scattering (Raman) and Brillouin scattering (Brillouin). [0003] ...

AI Technical Summary

Problems solved by technology

Because the confocal Raman spectrum signal is very weak, the detector needs to be integrated for a long time (often several hours) when performing spectral imaging. The drift of the optical system and the sample worktable often causes the sample to defocus, which in turn reduces the confocal Raman. Spatial resolution of spectral detection;

[0011] (2) The stray light of the sample is strong, which affects the signal-to-noise ratio of the Raman spectroscopy detection instrument

The existing confocal Raman spectroscopic detection instrument adopts the back reflection sample detection method and the incident excitation optical path and the scattered light detection optical path are completely in the same optical path, which is bound to have the problem of large stray light interference of the sample, which limits the existing Spectral detection capability of confocal microscopes for highly scattering samples;

[0012] (3) The ability to measure multiple performance parameters needs to be improved urgently

[0013] Usually the intensity of the Raman spectrum scattered by the sample is 10 times the intensity of the reflected Rayleigh beam. -3 ~10 -6 times, while the existing confocal Raman spectroscopy detection instruments all detect the weak Raman spectrum scattered by the sample and discard the Rayleigh beam and Brillouin beam which are stronger than the Raman scattered light

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