589 results about "Self assemble" patented technology

A method for selective deposition of self-assembled monolayers to the surface of a substrate for use as a diffusion barrier layer in interconnect structures is provided comprising the steps of depositing a first self-assembled monolayer to said surface, depositing a second self-assembled monolayer to the non-covered parts of said surface and subsequently heating said substrate to remove the first self-assembled monolayer. The method of selective deposition of self-assembled monolayers is applied for the use as diffusion barrier layers in a (dual) damascene structure for integrated circuits.

A method and apparatus for assembling microstructures onto a substrate through fluid transport. The microstructures being shaped blocks self-align into recessed regions located on a substrate such that the microstructure becomes integral with the substrate. The improved method includes a step of transferring the shaped blocks into a fluid to create a slurry. Such slurry is then dispensed evenly or circulated over the top surface of a substrate having recessed regions thereon. The microstructure via the shape and fluid tumbles onto the surface of the substrate, self-aligns, and engages into a recessed region.

Methods for fabricating sublithographic, nanoscale microstructures in one-dimensional arrays utilizing self-assembling block copolymers, and films and devices formed from these methods are provided.

Self-organized, or self-assembled, nanowires of a first composition may be used as an etching mask for fabrication of nanowires of a second composition. The method for forming such nanowires comprises: (a) providing an etchable layer of the second composition and having a buried insulating layer beneath a major surface thereof; (b) growing self-assembled nanowires on the surface of the etchable layer; and (c) etching the etchable layer anisotropically down to the insulating layer, using the self-assembled nanowires as a mask. The self-assembled nanowires may be removed or left. In either event, nanowires of the second composition are formed. The method enables the formation of one-dimensional crystalline nanowires with widths and heights at the nanometer scale, and lengths at the micrometer scale, which are aligned along certain crystallographic directions with high crystal quality. Further, the method of the present invention avoids traditional lithography methods, minimizes environmental toxic chemicals usage, simplifies the manufacturing processes, and allows the formation of high-quality one-dimensional nanowires over large areas.

Vapor deposition processes are provided in which a material is selectively deposited on a first surface of a substrate relative to a second organic surface. In some embodiments a substrate comprising a first surface, such as a metal, semi-metal or oxidized metal or semi-metal is contacted with a first vapor phase hydrophobic reactant and a second vapor phase reactant such that the material is deposited selectively on the first surface relative to the second organic surface. The second organic surface may comprise, for example, a self-assembled monolayer, a directed self-assembled layer, or a polymer, such as a polyimide, polyamide, polyuria or polystyrene. The material that is deposited may be, for example, a metal or metallic material. In some embodiments the material is a metal oxide, such as ZrO₂ or HfO₂. In some embodiments the vapor deposition process is a cyclic chemical vapor deposition (CVD) process or an atomic layer deposition (ALD) process. In some embodiments the material is deposited on the first surface relative to the second surface with a selectivity of greater than about 50%, greater than about 60%, greater than about 70%, greater than about 80%, greater than about 90% or greater than about 95%.

Methods and a structure. A first film of a first block copolymer is formed inside a trough integrally disposed on an energetically neutral surface layer of a substrate. Line-forming microdomains are assembled of the first block copolymer, and form first self-assembled structures within the first film normal to the sidewalls and parallel to the surface layer. At least one microdomain is removed from the first film such that oriented structures remain in the trough oriented normal to the sidewalls and parallel to the surface layer. A second film of a second block copolymer is formed inside the trough. Line-forming microdomains are assembled of the second block copolymer, and form second self-assembled structures within the second film oriented normal to the oriented structures and parallel to the sidewalls. A second method and a structure are also provided.

A method of controlling both alignment and registration (lateral position) of lamellae formed from self-assembly of block copolymers, the method comprising the steps of obtaining a substrate having an energetically neutral surface layer comprising a first topographic “phase pinning” pattern and a second topographic “guiding” pattern; obtaining a self-assembling di-block copolymer; coating the self-assembling di-block copolymer on the energetically neutral surface to obtain a coated substrate; and annealing the coated substrate to obtain micro-domains of the di-block copolymer.

The invention relates to a molecular imprinting photonic crystal for detecting glucose, which belongs to the technical field of applied chemistry and clinical analysis test. A method comprises the following steps: firstly, inserting a substrate subjected to hydrophilic treatment into PMMA colloidal pellet solution, and self-assembling pellets on the substrate to obtain a three-dimensional photonic crystal template; secondly, dripping molecular imprinting pre-polymerization solution on the edge of the three-dimensional photonic crystal template, and thermally polymerizing the template; and finally, cleaning the glucose imprinting template to obtain a glucose molecular imprinting photonic crystal template. The molecular imprinting photonic crystal has specific glucose adsorption performance, enables direct observation of the change, and fulfills the aim of real-time, quick and convenient detection.

A hybrid structure or device is provided wherein carried on a single substrate is at least one micro-spring interconnect having an elastic material that is initially fixed to a surface of the substrate, an anchor portion which is fixed to the substrate surface and a free portion. The spring contact is self-assembling in that as the free portion is released it moves out of the plane of the substrate. Also integrated on the substrate is a sensor having an active layer and contacts. The substrate and sensor may be formed of materials which are somewhat partially transparent to light at certain infrared wavelengths. The integrated sensor/spring contact configuration may be used in an imaging system to sense output from a light source which is used for image formation. The light source may be a laser array, LED array or other appropriate light source. The sensor is appropriately sized to sense all or some part of light from the light source. The sensor may also be sufficiently transparent so that light is not blocked from its emission path, with a contrast ratio such that it only absorbs a small fraction of light passing therethrough. An additional characteristic is that the manufacturing process is compatible with the manufacturing process for the micro-spring interconnects. Data from the sensor is used as light source correction information. This information is provided to a calibration configuration which allows for calibration of high-speed systems.

A hard mask is formed on an interconnect structure comprising a low-k material layer and a metal feature embedded therein. A block polymer is applied to the hard mask layer, self-assembled, and patterned to form a polymeric matrix of a polymeric block component and containing cylindrical holes. The hard mask and the low-k material layer therebelow are etched to form cavities. A conductive material is plated on exposed metallic surfaces including portions of top surfaces of the metal feature to form metal pads. Metal silicide pads are formed by exposure of the metal pads to a silicon containing gas. An etch is performed to enlarge and merge the cavities in the low-k material layer. The metal feature is protected from the etch by the metal silicide pads. An interconnect structure having an air gap and free of defects to surfaces of the metal feature is formed.

This invention provides a method for reducing tip-to-tip spacing between lines using a combination of photolithographic and copolymer self-assembling lithographic techniques. A mask layer is first formed over a substrate with a line structure. A trench opening of a width d is created in the mask layer. A layer of a self-assembling block copolymer is then applied over the mask layer. The block copolymer layer is annealed to form a single unit polymer block of a width or a diameter w which is smaller than d inside the trench opening. The single unit polymer block is selectively removed to form a single opening of a width or a diameter w inside the trench opening. An etch transfer process is performed using the single opening as a mask to form an opening in the line structure in the substrate.

The invention provides a method for preparing an electrostatically self-assembled drug carried layer. The method includes (1) performing surface modification pretreatment on a medical apparatus; (2) performing charge load surface pretreatment on the medical apparatus to form charge, which is the same to the charge carried by a first weak polyelectrolyte, on the surface of the medical apparatus; (3) preparing solution of a second weak polyelectrolyte and solution of a third weak polyelectrolyte, dissolving a drug in the second weak polyelectrolyte solution or the third weak polyelectrolyte solution; (4) soaking the medical apparatus with charge carried surface in the second weak polyelectrolyte solution, taking out, washing; (5) soaking the medical apparatus in the third weak polyelectrolyte solution, taking out, washing; and (6) repeating the step (4) and the step (5) alternately to form alternate electrostatically self-assembled drug carried layer with a desired drug density on the surface of the medical apparatus. The drug is included in the weak polyelectrolyte molecule layer.

The present invention is directed to the creation of macroscopic materials and objects comprising aligned nanotube segments. The invention entails aligning single-wall carbon nanotube (SWNT) segments that are suspended in a fluid medium and then removing the aligned segments from suspension in a way that macroscopic, ordered assemblies of SWNT are formed. The invention is further directed to controlling the natural proclivity or nanotube segments to self assemble into or ordered structures by modifying the environment of the nanotubes and the history of that environment prior to and during the process. The materials and objects are “macroscopic” in that they are large enough to be seen without the aid of a microscope or of the dimensions of such objects. These macroscopic ordered SWNT materials and objects have the remarkable physical, electrical, and chemical properties that SWNT exhibit on the microscopic scale because they are comprised of nanotubes, each of which is aligned in the same direction and in contact with its nearest neighbors. An ordered assembly of closest SWNT also serves as a template for growth of more and larger ordered assemblies. An ordered assembly further serves as a foundation for post processing treatments that modify the assembly internally to specifically enhance selected material properties such as shear strength, tensile strength, compressive strength, toughness, electrical conductivity, and thermal conductivity.

The invention relates to the technical field of battery materials, in particular to a coupled carbon nano tube-graphene composite three-dimensional network structure-coated ternary material and a preparation method thereof. According to the coupled carbon nano tube-graphene composite three-dimensional network structure-coated ternary material, a nickel-cobalt-manganese ternary material, carbon nano tubes and graphene are taken as raw materials; and the ternary material is characterized by being prepared by the following steps: with polyvinyl pyrrolidone as a dispersing agent, through a liquid-phase self-assembling method, simultaneously connecting the graphene and the carbon nano tubes with a silane coupling agent to form a three-dimensional network structure; and evenly dispersing the coupled carbon nano tube-graphene composite material and the nickel-cobalt-manganese ternary material through a physical method, coating the surface of the nickel-cobalt-manganese ternary material, and sintering the nickel-cobalt-manganese ternary material in an inert atmosphere, so as to obtain the evenly coated product. The product provided by the invention has the advantages of high specific discharge capacity, long cycle life and simplicity in preparation process; and large-scale production is easy to realize.

A self-assembled nanobump array structure including a semi-absorbing outer layer provided on at least one nanobump-forming substrate layer, the semi-absorbing outer layer configured to ablate slowly to allow an applied laser energy to be transmitted to the at least one nanobump-forming substrate layer, in which the self-assembled nanobump array structure is formed by an energy and a pressure buildup occurring in the at least one nanobump-forming substrate layer.

Disclosed are a nano patterning method for fabricating a surface plasmon color filter having a transmissive pattern which selectively transmits light of specific wavelengths, and methods for fabricating a surface plasmon color filter and a liquid crystal display (LCD) device using the same. Used are a stamp which provides a partial electrification region, and a template, thiol-terminated nanospheres which can be self-assembled, thereby fabricating nano holes having a two-dimensional period and arranged in a hexagonal lattice. This may be applied onto a large area of a substrate, and may implement simplified processes and reduced fabrication costs.

The present invention provides a diffusion barrier in an integrated circuit. The diffusion barrier comprises a self-assembled monolayer. The diffusion barrier is preferably less than 5 nm thick; more preferably it is less than 2 nm thick. The self-assembled monolayer typically contains an aromatic group at its terminus.

A protruding structure having a linear edge is formed on a substrate. The protruding structure may be a gate line of a field effect transistor. A stress-generating liner is deposited on the substrate. A non-photosensitive self-assembling block copolymer layer containing at least two immiscible polymeric block components is deposited on the stress-generating liner, and is annealed to allow phase separation of immiscible components. The polymeric resist is developed to remove at least one of the at least two polymeric block components, which formed a pattern of nested lines due to the linear edge of the protruding structure. Linear nanoscale stripes are formed in the polymeric resist which is self-aligning and self-assembled. The stress-generating layer is patterned into linear stress-generating stripes having a sublithographic width. The linear stress-generating stripes provide a predominantly uniaxial stress along their lengthwise direction, providing an anisotropic stress to an underlying semiconductor device.

The invention discloses a preparation method of a two-dimensional inorganic layered compound/graphene composite material. The preparation method of the composite material comprises the following steps: preparing layered compound dispersion liquid with positive charges on the surface and oxidized graphene dispersion liquid with negative charges; mixing the two kinds of solution to perform self-assembling under an electrostatic interaction to obtain the ordered two-dimensional inorganic layered compound/graphene composite material assembled alternatively layer by layer; and carrying out reduction reaction on the composite material under certain conditions to obtain the two-dimensional inorganic layered compound/graphene composite material. According to the two-dimensional inorganic layered compound/graphene composite material, the two-dimensional inorganic layered compound and the graphene are assembled alternatively layer by layer under the electrostatic interaction; the required equipment has low requirement and is easy to operate; the graphene can provide a good electronic transmission channel for the inorganic layered material, so as to enhance the electrical conductivity of the inorganic layered material, prevent agglomeration, and achieve an important effect on the material structure stability. The two-dimensional inorganic layered compound/graphene composite material can be widely applied to the fields of catalytic and electrochemical energy storage fields.