Mutual shielding type electric field sensor based on torsional vibration

Abstract

The invention discloses a mutual shielding type electric field sensor based on torsional vibration. The mutual shielding type electric field sensor comprises a substrate, an electric field sensing structure, torsional elastic beams connected with movable torsional electrodes and a driving structure, wherein the electric field sensing structure comprises at least one group of fixed electrodes and movable torsional electrodes, the fixed electrodes and the movable torsional electrodes are sensing electrodes and are mutual shielding electrodes, namely the fixed electrodes and the movable torsionalelectrodes produce relative movements and are mutually shielded when the movable torsional electrodes perform torsional vibration, and meanwhile the fixed electrodes and the movable torsional electrodes produce sensing charge change. The driving structure drives the movable torsional electrodes to perform torsional vibration around the torsional elastic beams, so that relative position change isproduced between the fixed electrodes and the movable torsional electrodes. The electric field sensor is simple in structure, small in size, high in sensing efficiency, wide in use range, suitable forcommon machining and micromachining technology preparation, easy to assemble and integrate and suitable for batched-type and large-scale production.

Description

technical field [0001] The disclosure belongs to the field of sensors, and relates to a mutual shielding electric field sensor based on torsional vibration. Background technique [0002] As a device for measuring electric field strength, electric field sensor plays a very important role in many fields such as national defense, aerospace, weather detection, power system, earthquake prediction, scientific research and industrial production. [0003] According to different working principles, electric field sensors can be roughly divided into two types: charge-inductive and optical. Early electric field sensors that applied the principle of charge induction include rotary vane, rocket, and double ball, which have the advantages of mature processing technology, wide measurement range, and high precision, but have disadvantages such as large volume, complex structure, and high cost. At present, the demand for miniaturization and miniaturization of the device structure is becomin...

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Problems solved by technology

The early electric field sensors that applied the principle of charge induction include rotary vane, rocket, double ball, etc., which have the advantages of mature processing technology, wide measurement range, and high precision, but have the disadvantages of large volume, complex structure, and high cost.

At present, the demand for miniaturization and miniaturization of the device structure is becoming more and more extensive, and the volume of the electric field sensor needs to be reduced accordingly. However, as the volume of the electric field sensor continues to decrease, the corresponding area of ​​its sensitive structure also decreases. Correspondingly, the output signal of the electric field sensor is getting weaker and weaker.

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