Mutual shielding type electric field sensor based on torsional vibration

An electric field sensor and torsional vibration technology, applied in the field of sensors, can solve the problems of weak output signal of the electric field sensor, reduced sensitive structure area, complex structure, etc., to achieve the effect of widening the scope of use, easy assembly, and increasing the sensing area

Inactive Publication Date: 2018-09-07
INST OF ELECTRONICS CHINESE ACAD OF SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The early electric field sensors that applied the principle of charge induction include rotary vane, rocket, double ball, etc., which have the advantages of mature processing technology, wide measurement range, and high precision, but have the disadvantages of large volume, complex structure, and high cost.
At present, the demand for miniaturization and miniaturization of the device structure is becoming more and more extensive, and the volume of the electric field sensor needs to be reduced accordingly. However, as the volume of the electric field sensor continues to decrease, the corresponding area of ​​its sensitive structure also decreases. Correspondingly, the output signal of the electric field sensor is getting weaker and weaker.

Method used

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  • Mutual shielding type electric field sensor based on torsional vibration
  • Mutual shielding type electric field sensor based on torsional vibration
  • Mutual shielding type electric field sensor based on torsional vibration

Examples

Experimental program
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Embodiment 1

[0050] Embodiment 1 introduces an example of the structure of a mutual-shielding electric field sensor that uses electrostatic driving to drive movable torsion electrodes to perform out-of-plane torsional vibration.

[0051] figure 1 It is a schematic structural diagram of a mutual-shielding electric field sensor based on torsional vibration according to Embodiment 1 of the present disclosure. refer to figure 1 As shown, in this embodiment, the mutual shielding electric field sensor based on torsional vibration includes: a fixed electrode 1 , a movable torsion electrode 2 , a driving structure 3 , a fixed anchor point 4 , a torsion elastic beam 5 , and a base 6 .

[0052] In this embodiment, the movable torsion electrodes 2 are divided into two groups, which are distributed symmetrically with respect to the axis of symmetry, forming a differential induction structure; the fixed electrodes 1 are divided into two groups, which are distributed symmetrically with respect to the a...

Embodiment 2

[0057] Embodiment 2 introduces an example of the structure of a mutual-shielding electric field sensor that uses electrostatic driving to drive movable torsion electrodes to perform in-plane torsional vibration.

[0058] figure 2 It is a schematic structural diagram of a mutual-shielding electric field sensor based on torsional vibration according to Embodiment 2 of the present disclosure. refer to figure 2 As shown, in this embodiment, the mutual-shielding electric field sensor based on torsional vibration includes: two sets of fixed electrodes 1, two sets of movable torsion electrodes 2, multiple sets of driving structures 3, and fixed anchor points 4; wherein, the fixed electrodes 1. The movable torsion electrode 2 is a strip structure; the torsion elastic beam 5 is a folded beam; the drive electrode corresponding to the drive structure 3 is a comb structure, and the electrostatic driving force is improved through multiple sets of comb teeth; all drive structures are loc...

Embodiment 3

[0061] Embodiment 3 introduces a structural example of a mutually shielded electric field sensor that uses a thermoelectric drive to drive a movable torsion electrode to perform out-of-plane torsional vibration.

[0062] image 3 It is a schematic structural diagram of a mutual-shielding electric field sensor based on torsional vibration according to Embodiment 3 of the present disclosure. refer to image 3 As shown, the working principle of this embodiment 3 is consistent with that of embodiment 1. The mutual shielding electric field sensor based on torsional vibration includes two sets of fixed electrodes 1 and two sets of movable torsion electrodes 2; but the difference lies in: this implementation In the example, the lower substrate corresponding to the electric field induction structure is a hollow structure; the driving structure is set in two groups, and the driving form is thermoelectric driving. By applying different voltages to the driving electrodes on both sides o...

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Abstract

The invention discloses a mutual shielding type electric field sensor based on torsional vibration. The mutual shielding type electric field sensor comprises a substrate, an electric field sensing structure, torsional elastic beams connected with movable torsional electrodes and a driving structure, wherein the electric field sensing structure comprises at least one group of fixed electrodes and movable torsional electrodes, the fixed electrodes and the movable torsional electrodes are sensing electrodes and are mutual shielding electrodes, namely the fixed electrodes and the movable torsionalelectrodes produce relative movements and are mutually shielded when the movable torsional electrodes perform torsional vibration, and meanwhile the fixed electrodes and the movable torsional electrodes produce sensing charge change. The driving structure drives the movable torsional electrodes to perform torsional vibration around the torsional elastic beams, so that relative position change isproduced between the fixed electrodes and the movable torsional electrodes. The electric field sensor is simple in structure, small in size, high in sensing efficiency, wide in use range, suitable forcommon machining and micromachining technology preparation, easy to assemble and integrate and suitable for batched-type and large-scale production.

Description

technical field [0001] The disclosure belongs to the field of sensors, and relates to a mutual shielding electric field sensor based on torsional vibration. Background technique [0002] As a device for measuring electric field strength, electric field sensor plays a very important role in many fields such as national defense, aerospace, weather detection, power system, earthquake prediction, scientific research and industrial production. [0003] According to different working principles, electric field sensors can be roughly divided into two types: charge-inductive and optical. Early electric field sensors that applied the principle of charge induction include rotary vane, rocket, and double ball, which have the advantages of mature processing technology, wide measurement range, and high precision, but have disadvantages such as large volume, complex structure, and high cost. At present, the demand for miniaturization and miniaturization of the device structure is becomin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R29/14
Inventor 夏善红储昭志雷虎成彭春荣凌必赟张洲威
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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