206 results about "Micromachinings" patented technology

The invention belongs to the related technical field of lasers, and provides a high-power subnanosecond-nanosecond laser in order to solve the problems that the range adjustment and the application range of an existing laser are limited, and the structural stability needs to be improved. A modulation semiconductor seed source, an optical fiber pre-amplifier, a light beam isolation system, a high repetition frequency solid pre-amplifier, an acousto-optic modulator frequency reduction module and a multi-stage solid single-pass main amplifier are sequentially arranged along an optical path, continuous adjustable output of repetition frequency and pulse width is achieved, the adjustable range of the repetition frequency is 100 kHz to 1 MHz, the adjustable range of the pulse width is 100 ps to 10 ns, and the adjustable range of the pulse width is 100 ps to 10 ns. The laser power and the light beam quality are remarkably improved, and the method is suitable for the fields of high-precision micromachining, nonlinear optical research, medical cosmetology and the like.

The invention relates to the technical field of laser micromachining, in particular to a TGV drilling machining system and method based on a space-time modulation Bessel beam, an initial laser beam is output through a laser device, the initial laser beam is modulated into a dynamic pulse sequence through a pulse chirp regulation and control module, axial energy attenuation is compensated, a machining subsystem generates the Bessel beam, and the TGV drilling machining system and method based on the space-time modulation Bessel beam are obtained. The angle is finely adjusted in real time through piezoelectric driving, and a dynamic spatial light modulator loads an exponential decay type phase mask, so that light beam airspace shaping, non-diffraction light beam generation, pulse time sequence and phase parameter synchronous control and high-peak power pulse array are realized, and finally, integrated micro-perforation and channel modification of the glass substrate are realized; and the machining efficiency and precision are obviously improved.

The invention discloses a three-dimensional micro-nano multistage micro-channel structure and a preparation method thereof, and the channel structure comprises a substrate, a nano honeycomb layer located on the surface of the substrate, and a Tesla valve micro-channel and a micron fence member formed on the nano honeycomb layer. The micron fence piece is provided with a plurality of rib columns which are close to each other and are arranged along the side wall direction of the Tesla valve micro-channel; the high wicking capacity of the nano porous medium and the macroscopic fluid guiding capacity of the micron channels are organically combined, so that fluid can be rapidly transported in the multi-stage channels, the transporting capacity and the heat exchange efficiency of liquid are effectively improved, especially during boiling, the liquid supplementing rate and the steam discharging rate can reach dynamic balance, and the heat exchange efficiency of the liquid is improved. The friction loss of gas-liquid two-phase flow is reduced, and different thermal management requirements are met; in addition, according to the preparation method, nano-first and micro-second processing is adopted, high compatibility of the structure morphology and the material interface is achieved, good repeatability and process window are achieved, and the preparation method is suitable for large-area preparation and industrial production.

The invention relates to a Spin Exchange Relaxation-Free (SERF)-based magnetometer system (100) for detecting ultra- weak magnetic fields, particularly suited for bio¬ sensing applications such as MEG, MCG, and MRI. The system operates at room temperature and includes a VCSEL (101) emitting dual beams tuned to Rubidium-87 transitions, a microfabricated vapor cell (102) with LIAD-based heating (103), and an optical assembly (104) for polarization control. A detection unit (105) converts Faraday rotation into electrical signals, enhanced by lock-in amplification. Magnetic shielding (106), thermal management (107), and relaxation mitigation maintain SERF conditions. A calibration subsystem (109) and embedded machine learning module (110) optimize sensitivity in real time. The compact, cryogen-free architecture enables portable and wearable applications. The invention achieves femtotesla-level sensitivity while overcoming limitations of conventional SQUID-based systems, making it suitable for clinical and field deployments.

The embodiment of the invention discloses a cold cathode flat plate X-ray source capable of coding light emitting and a coding light emitting method, the ray source comprises a vacuum sealing cavity, a cathode assembly and an anode assembly, the cathode assembly and the anode assembly are arranged in the vacuum sealing cavity in a sealing manner, and the cathode assembly and the anode assembly are oppositely arranged at an interval; a vacuum working space for electron acceleration and X-ray generation is formed; the cathode assembly comprises a cathode substrate and a nano cold cathode electron source array arranged on the cathode substrate; the anode assembly comprises an anode substrate and a transmission anode target arranged on the anode substrate; wherein at least one of the nanometer cold cathode electron source array and the transmission anode target is in a coding state: when the nanometer cold cathode electron source array is in the coding state, the nanometer cold cathode electron source array comprises a micro-unit electron source array capable of independently addressing, and a preset coding pattern is formed; and when the transmission anode target is in a coding state, a metal coating with a preset coding pattern is formed on the surface of the anode substrate through a micromachining process so as to integrate a coding function.

The invention belongs to the field of semiconductor processes and devices, and particularly relates to a method for preventing photoresist denaturation in the process of etching graphene by oxygen plasma based on an isolating layer. The method comprises the following steps: transferring graphene to a substrate through a mechanical stripping and transferring technology; exposing the two ends of the graphene in the environment through photoetching, and evaporating Se serving as an isolating layer onto the developed graphene pattern; covering photoresist to protect Se from being influenced by subsequent etching, and performing photoetching to form a graphene channel; processing the graphene substrate covered by the photoresist by adopting oxygen plasma, and etching a graphene channel; and annealing to remove Se. The method is suitable for manufacturing semiconductor devices, and has wide application prospects in the fields of micromachining, patterning and functionalization treatment of graphene-based materials. The method can be used for preparation processes of graphene integrated circuits, graphene sensors, photoelectric devices and other microelectronic devices, and especially has a promotion effect on high-precision graphene processing.

Disclosed in the present invention is a method for forming a precise through-hole at high speed by using an infrared laser, wherein the method irradiates in turn single modulated Bessel beam onto a workpiece in a scanning fashion by means of a mirror structure with at least one driving unit coupled to form a laser scanning processing pattern that changes the characteristics of the workpiece by precisely micromachining the workpiece into various shapes or sizes at high speed, and then wet-etching the workpiece, such that the method not only enables laser-machining the workpiece at high speed by significantly reducing laser-machining time compared to conventional methods, but also improves productivity by reducing etching time.

The invention belongs to the technical field of photoetching micromachining, and relates to an overlay alignment method and device for a transparent bicrystal substrate sample covered by a film. According to the invention, transmission light is utilized to realize bimorph crystal boundary imaging in the bimorph substrate; a reflection imaging system of the photoetching machine with a microscope realizes photoetching layout imaging on the surface of the sample; by accurately adjusting the position of the focal plane, under the condition of transmission / reflection dual-mode cooperative imaging, the photoetching layout and the bicrystal boundary line are clearly visible, so that the accurate alignment of the photoetching layout and the bicrystal boundary line is realized. The method does not depend on alignment of overlay marks, the overlay process is simplified, and the overlay freedom degree is improved. According to the overlay alignment device disclosed by the invention, a transmission light source is transferred out of a photoetching system through the reflective prism, so that the problem that the light source is not uniform due to a narrow space between the overlay mask and the objective table is solved, the problems of a strong light source and heat dissipation of the strong light source are thoroughly solved, and the penetrating power of transmission light is greatly improved.

The invention relates to the technical field of semiconductor packaging, and discloses a packaging method and equipment for a strong exhaust chip, and the packaging method comprises the steps: carrying out the thin film deposition of the surface of a chip body, carrying out the micromachining of a porous ceramic substrate, forming an installation groove and an air flow channel, fixing a pretreatment body in the installation groove based on a preset adhesive, and carrying out the packaging of a strong exhaust chip. Carrying out lead bonding on the conductive layer and the conductive path, coating the electric connection assembly with multiple layers of preset polymers, carrying out enhanced filling on the pre-packaged assembly based on a preset filler, and carrying out surface smoothing treatment on the pre-packaged assembly after enhanced filling to obtain a strong exhaust chip; after the pretreatment body is fixed, the cofferdam structure is dispensed with the silicone-based adhesive and is dynamically cured, the cofferdam structure effectively prevents external pollutants from entering, and the conductivity of the electric connection assembly is optimized due to the combination of lead bonding and the silicone-based adhesive; and the stable working state of the chip in the high-efficiency heat dissipation and gas emission process is further ensured.

The invention discloses a polarization-adjustable antiferromagnetic terahertz source based on a MnPt heterojunction. The polarization-adjustable antiferromagnetic terahertz source comprises a MnPt antiferromagnetic thin film layer, a light metal layer and an anti-oxidation layer, according to the invention, the femtosecond laser is used for exciting the femtosecond laser to generate the terahertz wave, the polarization direction of the generated terahertz wave is changed along with the change of the polarization direction of the femtosecond laser, that is, the polarization direction of the laser is changed by 1 degree, the polarization direction of the terahertz is changed by 2 degrees, the change of the azimuth angle of a sample is not needed, and the width of the generated terahertz spectrum exceeds 5 THz. No extra heavy metal layer needs to be added, the size is miniature, and the thickness is smaller than 40 nm. By adjusting polarization and phase difference of femtosecond laser, adjustability of a linear polarization state, an elliptical polarization state or a circular polarization state can be achieved, the structure is simple, a needed light path is simple, assistance of an external magnetic field or current is not needed, micromachining is not needed, the ultra-high external magnetic field interference resistance is achieved, the cost is reduced, and the application range is wide. And integration of the terahertz source is also facilitated.

The invention relates to the technical field of semiconductor packaging and micromachining, in particular to a defect-free electroplating filling method and system for a high-aspect-ratio glass through hole. The method comprises the following steps: preparing an ultrathin and compact copper seed composite layer with strong binding force on the inner wall of a glass through hole by adopting an atomic layer deposition (ALD) technology; preparing an electroplating solution containing a specific additive system; and implementing a segmented pulse electroplating strategy, and realizing defect-free copper filling from the bottom to the top of the through hole by regulating and controlling the current density, the pulse width and the intermittent time in stages and combining a reverse pulse technology. The system integrates ALD deposition, pulse electroplating and an electroplating liquid circulation system, and high precision and high yield in the filling process are ensured. The method effectively solves the problems of insufficient seed layer coverage, limited mass transfer, cavity / suture defects and the like in the filling of the glass through hole with the high depth-diameter ratio (greater than or equal to 20: 1), and is suitable for advanced packaging and manufacturing of large-size glass substrates (such as 510mm * 515mm).

The present invention discloses a high-sensitivity and shock-resistant microhemispherical gyroscope electrode structure and manufacturing method. The electrode structure is divided into upper and lower layers. The lower layer is a planar electrode, and the upper layer is a special-shaped planar electrode fabricated by a process method, presenting an overall shape of a combination of a circular hole and a circular groove. Both the upper and lower layer electrodes are sensitive to the out-of-plane motion of the edge of the sensitive resonator housing. The method includes realizing the patterning of the electrode by means of coating and photolithography processes on a wafer to obtain the lower electrode; fixing the prepared resonator housing to the lower electrode through precision microassembly; manufacturing the shape of the upper electrode on the wafer by etching or microfabrication processes, and realizing the patterning of the corresponding area of the upper electrode through processes such as coating, spraying glue, and multiple photolithographies; and assembling and fixing the upper electrode to the lower electrode with the resonator housing fixed by using a jig. The electrode form in the present invention improves the sensitivity of the microhemispherical gyroscope, and at the same time can limit the motion of the resonator housing, thereby enhancing the environmental adaptability of the gyroscope.

The disclosure features a microfabricated implantable probe, the probe comprising (a) a semiconductor substrate microprobe body including a handling portion and an elongated shaft extending from the handling portion to a tip, the tip being configured for insertion into a target area of a subject mammal, (b) at least one pair of enzyme-functionalized sensing electrodes disposed on the shaft, (c) individually addressable conductive metallic leads extending for a specified distance from each sensing electrode to contact pads disposed on the handling portion, and (d) a polymeric separating layer configured to separate each sensing electrode in the pair of electrodes from the other sensing electrode. The disclosure also features methods of using the probe to detect neurochemicals.

The present application relates to an angle sensor, further comprising: at least one vibratory mass (8) which can be moved relative to the support (6); and at least one electrostatic adjustment transducer (Q +) configured to apply an adjustable electrostatic strength to the vibratory mass (8), the or each electrostatic adjustment transducer (Q +) comprising at least two rows of teeth (20A, 20B) forming a pair of combs. The angle sensor further comprises at least one intermediate structure (18) which is elongated in at least one direction of extension (26), said intermediate structure (18) protruding from the attachment edge (28, 30) of the vibrating mass (8) or the support (6) and supporting one of the rows of teeth.

The invention belongs to the technical field of acoustic lenses, and discloses a high-frequency vortex sound field lens which comprises a stainless steel sheet substrate, the center area of the substrate is a solid area, and a periodic spiral line hollow structure is formed on the periphery of the solid area through laser processing; the area where the spiral line hollow structure is located allows sound waves to pass without shielding, and the solid area blocks sound wave propagation. The ultra-short pulse laser micromachining technology is adopted, the spiral line hollowed-out structure with the screw pitch, the line width and the spiral angle strictly matched with the high-frequency sound wave wavelength can be accurately etched in the surface of the stainless steel sheet, the spiral phase gradient is accurately constructed through the acoustic impedance difference of hollowed-out area conduction-solid area blocking, and the spiral phase gradient is accurately measured. The problem of phase error amplification under high frequency is effectively suppressed, the orbital angular momentum transfer efficiency is improved to 90% or above, and stable generation of a high-frequency vortex sound field is successfully realized.

This application discloses a gas sensor and electronic device. The gas sensor includes a substrate, a micro-hot plate, and a microphone. At least one of the micro-hot plate and the microphone is disposed on the substrate. The micro-hot plate includes a heating element, and a thermoacoustic cavity is formed around the heating element. The microphone has a sensing cavity, with the sensing surface of the microphone facing the sensing cavity, and the sensing cavity communicating with the thermoacoustic cavity. The micro-hot plate also includes a first substrate and a heat insulation layer stacked together. The first substrate has a first through-hole, and the heating element is located within the heat insulation layer. Thus, the gas sensor of this embodiment, through the coordinated operation of the micro-hot plate and the microphone, can accurately detect the composition and concentration of gas using the thermoacoustic effect. Furthermore, it is fabricated using microfabrication technology, making it easy to integrate into various micro-devices and possessing broad application prospects.

The present invention discloses a fiber Bragg grating hydrogen sensor, which includes an optical fiber and a housing; a first fiber Bragg grating and a second fiber Bragg grating are connected in series on the optical fiber; the first fiber Bragg grating is close to the free end of the optical fiber and is used for temperature compensation; the surface of the fiber glass cladding of the second fiber Bragg grating has grooves; a hydrogen-sensitive material layer is arranged outside the fiber glass cladding of the second fiber Bragg grating; the optical fiber is encapsulated in the housing, so that the first fiber Bragg grating and the second fiber Bragg grating are in a natural relaxation state. The present invention uses femtosecond laser to perform microfabrication etching on the surface of the fiber Bragg grating, thereby breaking the stress accumulation between the glass cladding with an optically flat surface during operation and the hydrogen-sensitive material layer, improving the adhesion of the hydrogen-sensitive material layer, reducing the probability of fatigue delamination or rupture of the hydrogen-sensitive material thin film. At the same time, the hydrogen-sensitive material adheres to the inner side of the groove, and the optical fiber etched with the groove also becomes softer, enhancing the change in the grating wavelength caused by the expansion strain after hydrogen absorption, and significantly improving the sensitivity of the sensor.

The invention discloses a disc Mmyshev mode-locked laser, and belongs to the technical field of ultrafast laser. The disc Mmyshev mode-locked laser comprises a laser gain module, a first nonlinear medium, a second nonlinear medium, a first interference filter, a second interference filter, a dispersion compensation module, an output coupling mirror, a first concave reflecting mirror, a second concave reflecting mirror, a high reflecting mirror, a third concave reflecting mirror and a fourth concave reflecting mirror. According to the disc Mmyshev mode-locked laser, a Mmyshev filtering mechanism is introduced into the disc Mmyshev mode-locked laser, and mode-locked self-starting and ultra-short pulse output under the condition of high average power are achieved. The disc Mmyshev mode-locked laser does not need an SESAM or Kerr mode-locked medium, can obtain stable ultrashort pulses smaller than 100 femtoseconds, has high stability, self-starting, good beam quality and structural expandability, and is suitable for application fields such as precise micromachining and extreme ultraviolet lithography driving sources.

The application relates to the technical field of laser packages, in particular to an in-situ optical shaping VCSEL array integration method and an optical interconnection module, which comprises the following steps: S1, a quartz substrate is used, a femtosecond laser pulse is focused and scanned in the quartz substrate, and a three-dimensional profile of a micro hole is defined in advance; S2, a VCSEL chip is precisely placed into the micro hole in an array arrangement with the VCSEL chip facing upwards, and epoxy resin is cured by heating; S3, a metal layer is sputtered on the quartz substrate, and an electrical interconnection track is formed through photolithography; S4, a two-photon polymerization direct writing system is used to initiate two-photon polymerization of photoresist, solidification is realized, and the production of a polymer lens is completed. The application selects fused quartz glass as the only passive integrated substrate; the substrate has four characteristics of optical transparency, electrical insulation, thermal stability and three-dimensional micro machining at the same time, replaces the multilayer composite substrate in a traditional scheme at one time, and realizes the original integration design basis of an optical path, an electrical circuit and a thermal path.

The invention relates to a method for generating self-focusing by a Lorentz non-uniform correlation partially coherent pulse light source, which comprises the following steps of: firstly, by constructing a pulse light source with a Lorentz non-uniform time correlation structure, defining a time domain mutual coherence function of the pulse light source so as to represent pulse coherence characteristics; the mutual coherence function is based on the generalized Huygens-Fresnel principle, a mutual coherence function expression of the LNUC partially coherent pulse light source at the transmission distance z is deduced, and the coherence degree is in Lorentz distribution and has the non-uniform correlation characteristic. An average intensity expression is further obtained according to a mutual dry function expression, intensity distribution has a self-focusing phenomenon in evolution, and the characteristic has potential application value in the fields of pulse beam shaping and micromachining.

The embodiment of the application provides a kind of mixed inductive proximity sensor based on semiconductor process and its manufacturing method, mixed inductive proximity sensor includes: planar induction coil and electronic chip, planar induction coil is the copper coil structure formed on substrate by photoetching and plating process, planar induction coil is integrated with multiple concentric ring sub-coil, and multiple concentric ring sub-coil is used to measure the magnetic field gradient change caused by target object in section;Electronic chip is integrated with oscillator circuit, and oscillator circuit includes inductance branch with series positive and negative temperature coefficient resistance combination, capacitor branch with parallel adjustable resistance, and comparator unit with dynamic adjustment delay;The packaging structure of mixed inductive proximity sensor includes the substrate of electronic chip flip-chip interconnection through carrier plate, surface covers protective layer;The packaging pre-treatment of mixed inductive proximity sensor includes pad microprocessing, gas protection reflow soldering and composite glue buffer layer.

The invention discloses a construction method of a high-stability interdigital supercapacitor, and the method comprises the steps: firstly designing the interdigital supercapacitor, and obtaining an interdigital conductive substrate through micromachining; then synthesizing a conductive organic frame nano material with good conductivity, and combining with a conductive polymer PEDOT: PSS to construct a composite flexible nano frame composite layer; by optimizing modification conditions, the composite material is modified on an interdigital conductive substrate, and a novel interdigital supercapacitor is prepared. The result shows that the constructed interdigital supercapacitor still keeps high specific capacitance and high stability after tens of thousands of charging and discharging cycles under different current densities. Based on the high-stability interdigital supercapacitor, a platform for promoting the neural stem cells to differentiate into neurons based on in-situ electrical stimulation is subsequently established in the method: electrical stimulation is continuously and stably applied through the interdigital supercapacitor, so that the differentiation speed of the neural stem cells is remarkably increased; and an effective research tool is provided for research of a basic molecular mechanism of neurodegenerative diseases.

Capacitive Micromachined Ultrasonic Transducer (CMUT) device, manufacturing method, and system, and method of use. The CMUT has a substrate, a peripheral wall defining the boundary of the cavity, and a membrane joined to the peripheral wall. Projecting from the substrate is a post sealed by the peripheral wall. The post contacts but is not joined to the membrane, forming a cavity that resonates at a specific acoustic frequency. The CMUT is disposed within a patient's vascular system in a stent, catheter, or other small device. The CMUT responds to the acoustic frequency emitted from the device outside the body and thereby operates as a sensor for various characteristics of the environment surrounding the CMUT within the body.

The utility model discloses a sound temperature optimization structure for a magnetic axis keyboard, which comprises a mainboard PCBA, lamp holes, positioning holes and circular holes, the inner side of the mainboard PCBA is provided with the lamp holes at equal intervals, the inner side of the mainboard PCBA is provided with the positioning holes at equal intervals, the inner side of the mainboard PCBA is provided with the circular holes at equal intervals, the diameter of the circular holes is 0.2 mm-8. 5mm, and the error is + / -0.1 mm; the opening depth of the circular opening is 0.2 mm to 1.5 mm, and the error is + / -0.1 mm; the hole position of the circular hole is located between two positioning holes in the main board PCBA; the hole position of the circular hole is located on the front face of the main board PCBA, namely the face making contact with a magnetic shaft, and the bottom of the circular hole cannot be opened. According to the sound temperature optimization structure for the magnetic axis keyboard, under the condition that the structure, the installation mode and material selection of an existing magnetic axis keyboard are not changed, fine machining is conducted on the main board PCBA, and therefore sound production and temperature influence of the magnetic axis keyboard are improved under the condition that the precision of the magnetic axis keyboard is not affected.

The application relates to the field of micro-electro-mechanical systems, and specifically discloses a micro-cantilever beam deformation correction method and system for MEMS sensor output errors, which comprises the following steps: exciting a composite vibration mode of a micro-cantilever beam through a multi-mode active excitation signal, collecting a dynamic response signal and identifying a deformation state parameter by using a deep learning model, generating laser micro-processing parameters based on the identification result to perform selective material removal or annealing treatment, establishing a deformation trend prediction model to perform pre-compensation adjustment, and ensuring the correction effect through a closed-loop verification mechanism; the system comprises a multi-mode active excitation control module, a dynamic response collection and processing module, a deformation identification and state evaluation module, a laser micro-processing control module, a deformation trend prediction and pre-compensation module, a correction effect verification and iterative control module, and a system integration and data management module. The application solves the problem of sensor errors caused by physical deformation of a micro-cantilever beam, and significantly improves the precision and long-term stability of a MEMS sensor.

The present invention addresses the problem of providing a photosensitive resin composition which has high micromachining properties and can yield a cured product having a low dielectric loss tangent. The main purpose of the present invention is to obtain a photosensitive resin composition which contains a polyimide resin, a cationic polymerizable compound and a cationic polymerization initiator and which is characterized in that the polyimide resin has a structure represented by formula (1) as a tetracarboxylic acid residue in all or some tetracarboxylic acid residues. (X moieties are each independently a single bond or a divalent linking group (in which the total number of carbon atoms is 10 or fewer). Y is a phenylene group, a naphthylene group, a group represented by formula (2) or a group represented by formula (4). ＊ denotes a bond to an amide group or a carbonyl group in an imide ring) (In formula (2) and formula (4), R1 and R2 each independently denote a monovalent hydrocarbon group having 1-10 carbon atoms, in which some hydrogen atoms may be substituted by halogen atoms, Z denotes a single bond or a divalent organic group having 1-20 carbon atoms, p and q each independently denote an integer between 0 and 4, and s denotes an integer that is 0 or 1. ＊ denotes a bond to X.)

A design method of a Gibbs-Wulff optical vortex array mask plate, steps are as follows: obtaining an electric field expression of a Gibbs-Wulff optical vortex array, combining the amplitude, phase of the Gibbs-Wulff optical vortex array with a blazed grating, obtaining a complex transmittance function of the Gibbs-Wulff optical vortex array mask plate, and the mask plate described based on the complex transmittance function is the Gibbs-Wulff optical vortex array mask plate. The present application utilizes the principle of computer holography, and obtains the amplitude modulation phase mask plate of the Gibbs-Wulff optical vortex array through computer coding, so that the Gibbs-Wulff optical vortex array with controllable boundary and controllable structure and arrangement mode in the boundary can be generated. Thus, the present application has important application value in the fields of particle manipulation and optical micro-machining.

The power relay has an actuator comprising a micro-electromechanical system stator assembly and a plunger assembly that moves along a central longitudinal axis between a first position and a second position, the plunger assembly comprising a plunger including a pair of ferromagnetic plates between which a magnet is located, the first of the pair of ferromagnetic plates being located between a first ferromagnetic layer and a second ferromagnetic layer of the stator assembly, and the second of the pair of ferromagnetic plates being located between a second ferromagnetic layer and a third ferromagnetic layer of the stator assembly. The contacts formed by the ferromagnetic plates and ferromagnetic layers may include an array of micro-machined bends or stabilized liquid-solid electrical contacts.

The invention provides a high repetition frequency deep ultraviolet pulse laser and a design method thereof. The laser comprises an optical fiber seed source, a multi-stage solid amplifier, a second acousto-optic modulator, a first frequency doubling system, a pre-compensation system, a second frequency doubling system and an output stability adjusting system. The second frequency doubling system comprises a first BBO crystal and a second BBO crystal. The pre-compensation system comprises a spherical mirror group and a cylindrical mirror group which are arranged in front of the first BBO crystal and the second BBO crystal. And the output stability adjusting system is used for accurately controlling the temperature of the first frequency doubling system and the second frequency doubling system so as to maintain a phase matching condition. The obtained laser passes through a series of optical filters and light beam shaping devices, deep ultraviolet laser which is stable and good in monochromaticity is output, the device is suitable for the fields of precise photoetching, micromachining and scientific research, and efficient laser conversion efficiency and stable output performance are ensured.

Laboratory apparatus for Photolithography Based Micro Fabrication