22 results about "Micromachinings" patented technology

This application discloses a gas sensor and electronic device. The gas sensor includes a substrate, a micro-hot plate, and a microphone. At least one of the micro-hot plate and the microphone is disposed on the substrate. The micro-hot plate includes a heating element, and a thermoacoustic cavity is formed around the heating element. The microphone has a sensing cavity, with the sensing surface of the microphone facing the sensing cavity, and the sensing cavity communicating with the thermoacoustic cavity. The micro-hot plate also includes a first substrate and a heat insulation layer stacked together. The first substrate has a first through-hole, and the heating element is located within the heat insulation layer. Thus, the gas sensor of this embodiment, through the coordinated operation of the micro-hot plate and the microphone, can accurately detect the composition and concentration of gas using the thermoacoustic effect. Furthermore, it is fabricated using microfabrication technology, making it easy to integrate into various micro-devices and possessing broad application prospects.

The application relates to the technical field of laser packages, in particular to an in-situ optical shaping VCSEL array integration method and an optical interconnection module, which comprises the following steps: S1, a quartz substrate is used, a femtosecond laser pulse is focused and scanned in the quartz substrate, and a three-dimensional profile of a micro hole is defined in advance; S2, a VCSEL chip is precisely placed into the micro hole in an array arrangement with the VCSEL chip facing upwards, and epoxy resin is cured by heating; S3, a metal layer is sputtered on the quartz substrate, and an electrical interconnection track is formed through photolithography; S4, a two-photon polymerization direct writing system is used to initiate two-photon polymerization of photoresist, solidification is realized, and the production of a polymer lens is completed. The application selects fused quartz glass as the only passive integrated substrate; the substrate has four characteristics of optical transparency, electrical insulation, thermal stability and three-dimensional micro machining at the same time, replaces the multilayer composite substrate in a traditional scheme at one time, and realizes the original integration design basis of an optical path, an electrical circuit and a thermal path.

The application relates to the field of micro-electro-mechanical systems, and specifically discloses a micro-cantilever beam deformation correction method and system for MEMS sensor output errors, which comprises the following steps: exciting a composite vibration mode of a micro-cantilever beam through a multi-mode active excitation signal, collecting a dynamic response signal and identifying a deformation state parameter by using a deep learning model, generating laser micro-processing parameters based on the identification result to perform selective material removal or annealing treatment, establishing a deformation trend prediction model to perform pre-compensation adjustment, and ensuring the correction effect through a closed-loop verification mechanism; the system comprises a multi-mode active excitation control module, a dynamic response collection and processing module, a deformation identification and state evaluation module, a laser micro-processing control module, a deformation trend prediction and pre-compensation module, a correction effect verification and iterative control module, and a system integration and data management module. The application solves the problem of sensor errors caused by physical deformation of a micro-cantilever beam, and significantly improves the precision and long-term stability of a MEMS sensor.

The power relay has an actuator comprising a micro-electromechanical system stator assembly and a plunger assembly that moves along a central longitudinal axis between a first position and a second position, the plunger assembly comprising a plunger including a pair of ferromagnetic plates between which a magnet is located, the first of the pair of ferromagnetic plates being located between a first ferromagnetic layer and a second ferromagnetic layer of the stator assembly, and the second of the pair of ferromagnetic plates being located between a second ferromagnetic layer and a third ferromagnetic layer of the stator assembly. The contacts formed by the ferromagnetic plates and ferromagnetic layers may include an array of micro-machined bends or stabilized liquid-solid electrical contacts.

This invention discloses a pneumatic micro-transport device, including an air compressor connected to a pneumatic solenoid valve via an air pump pipe. The pneumatic solenoid valve is connected to a microcontroller via a relay, and the microcontroller is connected to a LabVIEW host computer via a USB interface. The pneumatic solenoid valve is also connected to a micro-transport array via the air pump pipe, and a transport plate is placed above the micro-transport array. This device is designed based on pneumatic principles. Compared to traditional contact-type transport devices, its transport method avoids failures caused by friction-induced wear. Furthermore, thanks to its non-contact transport characteristics, its application range is further expanded. It employs deep silicon etching micromachining technology, with the silicon plate structure serving as the air chamber channel and nozzle of the micro-transport device, significantly reducing the structural size of the micro-transport device, improving space utilization, and solving problems such as low integration in traditional micro-transport devices.

The application provides a multi-component quantum dot heterostructure and a preparation method and application thereof. The preparation method comprises the following steps: dispersing at least two components of colloidal quantum dots in an alkane solvent to obtain a precursor solution; placing the precursor solution on the surface of a silicon-based micro-column template, then covering a base on the top of the silicon-based micro-column template, applying pressure, so that the precursor solution forms a capillary liquid bridge between the top of the silicon-based micro-column template and the base; and performing one-way evaporation treatment on the capillary liquid bridge structure to form a multi-component quantum dot heterostructure with size-oriented phase separation; the particle size of colloidal quantum dots of any component is different from the particle size of colloidal quantum dots of other components. The application provides a one-step method for preparing a multi-component quantum dot heterostructure, realizes the size-oriented phase separation and ordered assembly of the multi-component quantum dots, and has the advantages of simple process, large-scale microprocessing, good photoelectric performance and integration, and good application prospect in optoelectronic devices.

A tunable optical filter with a top-hat pass band shape. The proposed tunable optical filter is adapted to be installed over a top surface of a sensor, and comprises a set of at least three stacked dielectric mirrors parallelly adjacent to the plane of installation of the sensor, the at least three stacked dielectric mirrors comprise an upper mirror, an intermediate mirror and a lower mirror, wherein the set of at least three stacked mirrors is spaced within a variable distance to create at least two independent and adjacently equal volumetry cavities between the upper mirror and the intermediate mirror and between the intermediate mirror and the lower mirror.

This invention discloses a thin film with a multi-level microstructure surface, its preparation method, and its applications, belonging to the field of thin film microstructure construction technology. This invention is the first to apply the dynamic behavior of fluids during stretching motion to the construction of multi-level microstructures on a thin film surface. Compared to traditional microfabrication techniques, the stretch flow curing method's most significant advantage lies in its extremely simplified process flow and high flexibility. The entire preparation process includes only two key stages—stretch flow molding and curing—significantly reducing equipment complexity and operational difficulty. The stretch flow curing method not only provides a novel, efficient, and low-cost solution for surface microstructure fabrication but also demonstrates broad application potential in functional thin films, flexible electronics, optical coatings, biointerfaces, and microfluidic devices.

This invention discloses a method and apparatus for generating 266nm laser. The method includes the following steps: S1, shaping an incident 532nm laser into an elliptical spot; S2, incidenting the elliptical spot onto a BBO crystal under controlled temperature, generating 266nm ultraviolet laser through fourth harmonic generation; wherein the major and minor axes of the elliptical spot are aligned with the ordinary and extraordinary beam directions of the BBO crystal, respectively, and the dimensions of the major and minor axes of the elliptical spot are adapted to the lateral dimensions of the BBO crystal in the corresponding directions. The apparatus includes a laser source, a spot shaping module, a temperature control module, a BBO crystal module, and a detection module. This invention effectively solves the problem of beam quality degradation and conversion efficiency reduction caused by the thermal effect of the BBO crystal during high-power fourth harmonic generation, meeting the urgent need for high-power and high-stability 266nm lasers in fields such as semiconductor wafer micromachining, biomedical imaging, and environmental monitoring.

This invention provides a stress isolation structure for MEMS inertial devices, relating to the technical field of inertial sensor microfabrication technology. The structure includes: a fixed frame; a folded beam, one end of which is fixedly connected to the fixed frame, and the other end of which is fixedly connected to the inertial device; and metal traces located within the folded beam and electrically connected to a target chip through through-holes. This invention solves the problem of low accuracy in inertial devices, thereby improving the accuracy of the inertial devices.

A microfluidic detection test paper chip, comprising a substrate, a microfluidic channel, and a dot array arranged reagent block, the microfluidic channel and the dot array arranged reagent block are arranged on the substrate, and are used for detecting enzymes, chemicals, proteins, polypeptides, amino acids, nucleic acids, and exosome components in a liquid sample; a syringe is used to inject a sample or a reagent into the microfluidic channel and infiltrate the reagent block; a color reaction is completed in the reagent block; color reaction data of the dot array arranged reagent block is scanned by an optical sensor to obtain a detection result, wherein the microfluidic channel and the reagent block are manufactured by using a microfabrication process, the reagent block is printed into a dot array arranged groove formed by the substrate and the microfluidic channel, and thus a micro-specimen multi-index analysis and detection effect is achieved.

This invention discloses a fully electrostatically focused planar integrable microstrip slow-wave traveling wave tube. This invention uses an electric field generated by electrodes produced by microfabrication technology to replace the magnetic focusing commonly used in vacuum devices. Under the action of the electrodes, the electron beam is subjected to attraction or repulsion forces from electrodes of different polarities. Due to the periodic changes in electrode potential, the particles alternately focus and defocus in the x and y directions, but the fluctuations in the z-direction of propagation remain within a certain range. By matching the electrode period with the period of the microstrip slow-wave structure, a periodic electrostatic potential well is formed in the longitudinal direction, thereby achieving stable constraint and dynamic control of the electron beam, completing the fully electrostatic focusing of the electron beam in the traveling wave tube.

This invention discloses a six-port equal-power-dividing coupling network based on a DGS rectangular microcoaxial cable, comprising a microcoaxial outer conductor, a defective ground coupling line, an inner conductor transmission line, output ports, a serpentine inner conductor coupling line, and a defective ground crossover. This invention achieves four-port output with equal output amplitudes based on a traditional branch-line directional coupler. When the two input ports are excited separately, the four output ports have phase differences of +90° and -90° respectively, realizing left-hand and right-hand circular polarization of a four-element antenna array. By integrating defective ground technology on the microcoaxial outer conductor, the coupling degrees of freedom of the microcoaxial inner conductor are increased, improving the coupling strength of adjacent inner conductors at specific locations while meeting the requirements of microcoaxial microfabrication technology. This six-port feeding network exhibits low insertion loss and stable amplitude and phase characteristics over a wide bandwidth, making it particularly suitable for broadband circularly polarized wireless terminals with switchable high-frequency polarization in microwave and millimeter-wave applications.

Provided are: a micro-implement manufacturing method which is capable of forming microneedles accurately from maltose in a desired shape and freely in a desired arrangement on a substrate, and is also highly productive; and a micro-implement. This method includes a microneedle formation step in which a material to which maltose is adherable is used as a substrate (1) and a micro-processing head (120) capable of forming microneedles from pure maltose or a maltose composite material with freedom of arrangement is used to form a plurality of microneedles individually and sequentially. In the microneedle formation step, the temperature of the micro-processing head (120) is varied so as to increase and decrease on the basis of temperature profile control expressed by the following formula: {F (Ln, Tn, tn) = Σn (Ln, Tn, tn)}, while pure maltose or a maltose composite material is supplied sequentially from the micro-processing head (120) toward the surface (1a) side of the substrate (1), thereby forming microneedles so as to grow sequentially from the base end.

This invention belongs to the field of laser micromachining and relates to a coaxial monitoring system for ultrafast laser micromachining. The system includes an ultrafast laser, a beam-splitting plate, a laser focusing lens, an intermediate lens group, a filter, a fixed-magnification telecentric lens, and a high dynamic range camera. The ultrafast laser emits ultrafast laser light. The beam-splitting plate and the laser focusing lens are arranged sequentially from front to back along the optical path of the ultrafast laser. The laser focusing lens focuses the ultrafast laser light onto the workpiece, generating visible monitoring light on the workpiece. The visible monitoring light passes through the laser focusing lens and is reflected by the beam-splitting plate to form reflected visible monitoring light. The intermediate lens group, filter, fixed-magnification telecentric lens, and high dynamic range camera are arranged sequentially from front to back along the optical path of the reflected visible monitoring light. This invention provides a coaxial monitoring system for ultrafast laser micromachining that improves imaging clarity and resolution.

A micromachining processing agent that contains hydrogen fluoride, ammonium fluoride. water and a compound represented by the chemical formula (1) below:Rf representing perfluoroalkyl group having 1 to 4 carbon atoms, and M+ representing a hydrogen ion or an ammonium ion, the content of the compound being 0.001 mass % or more and 0.5 mass % or less with respect to a total mass of the micromachining processing agent, the content of the hydrogen fluoride being 0.05 mass % or more and 25 mass % or less with respect to a total mass of the micromachining processing agent, the content of the ammonium fluoride being 0.5 mass % or more and 40 mass % or less with respect to a total mass of the micromachining processing agent, and the content of the hydrogen fluoride and the content of the ammonium fluoride satisfying the relational expression (1) below:Y≦-0.8⁢X+4⁢0(1)X representing a concentration (mass %) of hydrogen fluoride and Y representing a concentration (mass %) of ammonium fluoride.

A method for manufacturing a multifunctional electromagnetic waveguide from a tapered optical fiber is provided. The method involves mounting the optical fiber on a roto-translational handling apparatus, forming a first mask on a tapered section of the optical fiber to define a shape of an optical window, forming a first metal layer around the tapered section leaving a lateral edge of the first mask uncovered, removing the first mask by chemical etching to uncover the optical window, depositing a first transparent layer around the tapered section, depositing a second metal layer around the first transparent layer, forming a second mask that defines a shape of a conductive track, removing the second metal layer by chemical etching, and removing the second mask by chemical etching to uncover the conductive track.

This invention provides an all-solid-state battery cell and its fabrication method, relating to the technical field of solid-state batteries. The cell includes a positive electrode, a negative electrode, and a solid electrolyte layer. The surface of the negative electrode in contact with the solid electrolyte layer has a first fusion interface structure, and the surface of the positive electrode in contact with the solid electrolyte layer has a second fusion interface structure. The first fusion interface structure is a mixed layer formed by the surface material of the negative electrode and the surface material of the solid electrolyte layer within the contact area. The second fusion interface structure is a mixed layer formed by the surface material of the positive electrode and the surface material of the solid electrolyte layer within the contact area. This invention micro-processes the electrode surface to loosen the surface particles and uses isostatic pressing to densify them, breaking down the solid-solid interfaces between different contact layers in the solid-state battery, thus fusing the various electrode layers together and reducing interfacial impedance.

This invention provides a laser micromachining system and method. The laser micromachining system includes a laser, a beam expander, a half-wave plate, a one-dimensional aperture stop (AOD), a slit stop, a Dowell prism, a 4f imaging system, and a focusing lens for processing. The laser emits a laser beam; the beam expander expands and collimates the laser beam output from the laser; the half-wave plate adjusts the polarization direction of the incident light; the one-dimensional AOD diffracts the incident laser; the slit stop filters out unwanted diffracted light; the Dowell prism controls the rotation of the outgoing light; the 4f imaging system images the light field distribution from the exit surface of the Dowell prism onto the entrance pupil of the focusing lens; and the focusing lens focuses the laser beam into a focal spot that acts on the processing surface of the sample. This laser micromachining system and method solves the problems of complex structure, difficult control, and low diffraction efficiency in two-dimensional AOD systems, achieving high-speed, high-precision, and adjustable aperture processing of micro-holes.

The present application relates to a kind of focal length dynamic regulation and control device and regulation and control method based on heat drive and pressure control, mainly solve the technical problems such as the existing single drive mode being difficult to consider wide range and high stability for electrowetting drive.This application adopts the technical scheme: the focal length dynamic regulation and control device, it includes microlens array, heat drive module, pressure control module and collaborative control unit;The microlens array is to set several microlens units on transparent substrate, the microlens unit is filled with optical liquid;The heat drive module is a thin film heater array formed by several thin film heaters, the thin film heater is integrated below the microlens array by microfabrication technology, each thin film heater is connected with external drive circuit by independent lead, realizes independent addressing control;The pressure control module includes micro pressure pump, sealed cavity, fluid pipeline, thermal expansion compensation cavity and micro fluid control valve array.

This invention relates to a method for optimizing ultrafast laser micromachining parameters based on causal enhancement modeling, comprising the following steps: S1, constructing a multi-dimensional dataset for ultrafast laser micromachining and performing hierarchical filtering; S2, mining the dynamic causal relationship between processing parameters and quality indicators and quantifying the causal effect; S3, constructing a dynamic causal enhancement-based micromachining quality prediction surrogate model; S4, establishing a multi-objective particle swarm optimization algorithm with quality priority to optimize processing parameters; S5, experimental verification and iterative parameter optimization. The method provided by this invention achieves intelligent, efficient, and precise optimization of laser processing parameters by constructing a surrogate model with dynamic causal feature fusion and combining it with a multi-objective particle swarm optimization algorithm with quality priority, thereby improving the consistency and stability of micro-hole processing quality.