76 results about "PMUT" patented technology

A method of operating a PMUT electro-acoustical transducer, the method comprising: applying over an excitation interval to the transducer an excitation signal which is configured to emit corresponding ultrasound pulses towards a surrounding space, acquiring at a receiver reflected ultrasound pulses as reflected in said surrounding space, generating a reference echo signal, performing a cross-correlation of said acquired received ultrasound pulses with said reference echo signal, performing a measurement based on the cross-correlation results, in particular a measurement of the time of flight of the ultrasound pulses, wherein said reference echo is obtained by finding an oscillation frequency of the transmitter on the basis of a transmitter ringdown signal, finding an oscillation frequency of the receiver on the basis of a receiver ringdown signal, performing a frequency tuning respectively on the transmitter and the receiver on the basis of said respective oscillation frequencies, then sweeping an input frequency of the transmitter to find a frequency of the maximum displacement in the ringdown signal, performing a frequency tuning of the receiver at said frequency of the maximum displacement in the ringdown signal of the transmitter.

The invention discloses a flexible wearable ultrasonic patch based on a PMUT chip. The flexible wearable ultrasonic patch sequentially comprises a flexible substrate, a snakelike negative electrode, a matching layer, a PMUT array, a snakelike positive electrode, a backing layer and a flexible packaging layer from bottom to top in the thickness direction. The snakelike negative electrode is arranged on the flexible substrate and is electrically connected with a negative electrode pin of the PMUT array through a through hole penetrating through the matching layer; the snakelike positive electrode is arranged on the PMUT array and is electrically connected with a positive electrode pin of the PMUT array; the backing layer is arranged on the snake-shaped positive electrode and used for absorbing sound, and the flexible packaging layer wraps the backing layer and the peripheral side of the patch to achieve overall protection. The device has the advantages of being low in working voltage, high in skin fitting performance and high in long-time wearing stability, can be used for achieving blood vessel imaging and continuous blood pressure monitoring, and does not need a liquid coupling agent.

The invention discloses a multifunctional neural electrode for intracranial pressure detection and closed-loop nerve regulation, the multifunctional electrode sequentially comprises a PMUT electrode for intracranial pressure detection and nerve regulation and a macro-micro electrode for electroencephalogram signal detection from top to bottom, and the PMUT electrode is bonded on the macro-micro electrode. The PMUT electrode is bonded to the macro-micro electrode to serve as a multifunctional electrode, the PMUT electrode can serve as a pressure sensor and can also serve as an ultrasonic transducer, the dual functions of intracranial pressure detection and fixed-point ultrasonic nerve stimulation are achieved, the macro-micro electrode can achieve detection of local field potential and peak potential, and the ultrasonic nerve stimulation function is achieved. Therefore, a detection-feedback-regulation closed-loop system is realized.

Disclosed herein is an array of ultrasound devices. Each ultrasound device includes a first piezoelectric stack carried by a membrane and forming, together with the membrane, a first piezoelectric micromachined ultrasonic transducer (PMUT), and a plurality of second piezoelectric stacks carried by the membrane and positioned about a periphery thereof, each second piezoelectric stack forming, together with the membrane, a second PMUT. During operation, the first piezoelectric stack is configured to vibrate the membrane in response to application of an alternating voltage to the first piezoelectric stack to thereby generate at least one outgoing ultrasonic pulse toward a target, and during operation, the plurality of second piezoelectric stacks are configured to generate sense voltages in response to bending thereof induced by vibration of the membrane by incoming ultrasonic reflections off the target.

The invention discloses a PMUT array ultrasonic transceiver circuit system, and relates to the technical field of electronic circuits and systems, and the system comprises a GPU processing module, an FPGA main control module and an ultrasonic analog circuit. The GPU processing module generates an optimal array element gating matrix by using an array element gating matrix generation model; the FPGA main control module drives the ultrasonic analog circuit to perform time-sharing gating on the transmitting array element and the receiving array element according to the optimal array element gating matrix; performing phase control excitation on the transmitting array element when the transmitting array element is gated; performing beam forming on the processed ultrasonic echo signal when the receiving array element is gated; the ultrasonic analog circuit performs time-sharing gating on the transmitting array element and the receiving array element, and generates a high-voltage pulse when the transmitting array element is gated; ultrasonic echo signals are collected and processed when the receiving array elements are gated; and the GPU processing module performs three-dimensional image reconstruction according to the synthesized ultrasonic echo signal to obtain a three-dimensional ultrasonic image. According to the invention, the imaging speed and resolution are improved.

The invention relates to the technical field of micro electro mechanical system devices, in particular to a SON and silicon epitaxy process-based PMUT preparation method and a PMUT, and the method comprises the following steps: S1, forming a cavity on a silicon substrate by using an SON process; s2, annealing treatment is carried out, and the roughness of the silicon surface above the cavity is optimized; s3, forming a monocrystalline silicon epitaxial layer above the cavity by using a silicon epitaxial process; s4, carrying out planarization processing by using CMP, and optimizing the surface roughness of the monocrystalline silicon epitaxial layer; and S5, preparing the PMUT above the monocrystalline silicon epitaxial layer. According to the invention, the consistency and stability of device performance are improved; the process route is relatively simplified, the process steps and equipment investment are reduced, the production cost is reduced, and large-scale industrial production is facilitated; the monocrystalline silicon epitaxial layer has good crystal quality and mechanical property, and the influence of structural defects on the performance of the device is reduced; proper materials can be selected for the piezoelectric layer according to different application requirements, and the sensitivity and reliability of the PMUT are further improved.

This invention provides a method for fabricating a PMUT device containing a bipolar piezoelectric structure, comprising: 1) providing a first substrate and forming a bottom electrode layer on the substrate surface; 2) forming a piezoelectric layer, including a first polar piezoelectric layer and a second polar piezoelectric layer formed sequentially; 3) sequentially depositing a first passivation layer and a top electrode layer, and patterning the top electrode layer; 4) forming a first via and depositing a support layer; 5) etching the support layer to form a first opening and a second opening; 6) providing a second substrate and flipping the structure so that the second substrate is bonded to the support layer, the first opening forms a cavity, and the first substrate is removed. The fabrication method of this invention employs two electrical connection methods. In the fabricated PMUT device, the piezoelectric layer is a single-layer bipolar film with no transition region, which maximizes the effective working area. Furthermore, this fabrication process is simple, has a small number of openings, a small wiring area, and significantly increases the array density of the PMUT.

Disclosed herein are ultrasonic transducer systems comprising: an ultrasonic imager comprising a plurality of pMUT transducer elements; and one or more circuitries connected electronically to the plurality of transducer element, the one or more circuitries configured to enable: pulse transmission and reception of reflected signal for the ultrasonic transducer; and control of the ultrasonic transducer, the control of the ultrasonic transducer comprising focusing ultrasonic beam in an elevation direction.

The invention particularly relates to an internal arteriovenous fistula power loss early warning system based on fusion of miniature ultrasound and biological impedance, and relates to the technical field of medical instruments. A data processing module; and an intelligent early warning module. According to the invention, through the integrated design of the miniature ultrasonic probe module and the biological impedance electrode module, the synchronous measurement of the blood flow velocity and the blood vessel volume change is realized; wherein the PMUT array is combined with a three-axis accelerometer to correct the angle of a probe in real time, angle errors caused by operation are avoided, meanwhile, the biological impedance electrode measures the blood vessel volume through alternating current, an impedance diameter model is dynamically updated through AI, the cross sectional area of the blood vessel is calculated, and traditional static calibration is replaced; the problem of insufficient precision of a single mode is solved, more reliable hemodynamic data is provided for clinic, and the abnormal state of the blood vessel is recognized in an early stage.

The application discloses an ultrasonic indoor three-dimensional positioning system and method. The ultrasonic indoor three-dimensional positioning system comprises a central control module, a transmitting module and a receiving module. The central control module comprises a central control unit, a sound velocity correction module and a wireless communication module. The transmitting module comprises a transmitting control unit, an ultrasonic transmitting module and a wireless communication module. The receiving module comprises a receiving processing unit, a wireless communication module and an ultrasonic receiving module. The ultrasonic transmitting module adopts a PMUT with a directivity of 180 DEG, comprises area positioning ultrasonic transducers composed of one or more low-frequency ultrasonic transducers with different frequencies, and position positioning ultrasonic transducers composed of more than three high-frequency ultrasonic transducers with different frequencies. The ultrasonic receiving module adopts a wideband microphone. The ultrasonic indoor three-dimensional positioning system can realize accurate three-dimensional positioning in a large range, and the positioning precision reaches millimeter level.

The present application discloses a PMUT array-based control method and related device, relating to the field of biosensor technology. The method comprises: an excitation device sends an imaging excitation signal to a PMUT array chip at the imaging moment of a control cycle. The PMUT array chip responds to the imaging excitation signal and emits an incident sound wave. After receiving the reflected sound wave, the excitation device returns an imaging reception signal. The excitation device performs ultrasonic imaging based on the imaging reception signal. When the target driving moment of the control cycle is reached, a driving excitation signal for the target driving moment is sent to the PMUT array chip. The PMUT array chip responds to the driving excitation signal for the target driving moment and emits a target ultrasound wave to drive the micro-nano robot to move. The control cycle includes an imaging moment and at least one driving moment arranged in chronological order. The method implements self-sensing control of the micro-nano robot by alternating imaging and driving at different frequencies within the control cycle.

An ultrasound catheter is disclosed. An ultrasound catheter includes a body having a longitudinal axis and a distal end. An array of piezoelectric micromachined ultrasound transducers (pMUTs) is disposed within the distal end of the body. Further, the pMUT array includes a plurality of pMUT array elements arranged on the substrate. Further, an insulating material is disposed at the distal end above the imaging window to provide electrical isolation and transmission of the ultrasound signals. The insulating material corresponds to a polyether block amide (PEBA) or Pebax, or a thermoplastic elastomer (TPE).

This invention discloses a GaN PMUT device with a low-stress structure featuring isolation trenches and its fabrication method. At the device level, the invention utilizes high-purity GaN single crystals as the piezoelectric layer to achieve higher ultrasonic transduction efficiency. By severing the continuity of the film in the planar direction through isolation trenches penetrating multiple composite films and part of the substrate, a channel and space for releasing accumulated residual stress are provided, effectively reducing the concentration of local residual stress and overcoming array crosstalk problems. At the fabrication method level, this invention determines the design parameters of the GaN PMUT device through finite element simulation. Electrochemical wet etching reduces damage to the epitaxial structure during the stripping process, improving the surface smoothness and uniformity of the device after stripping. Simultaneously, the isolation trenches effectively reduce crosstalk between PMUT units, decrease film stress, and significantly increase the piezoelectric driving bending moment within the film, thereby improving ultrasonic transmission and reception performance.

Embodiments of the present application disclose an ultrasonic transducing assembly and an ultrasonic transducing array, which can improve the working bandwidth of the ultrasonic transducing assembly. The ultrasonic transducing assembly comprises a substrate, at least one first PMUT unit and at least one second PMUT unit, and the first PMUT unit and the second PMUT unit are located on the substrate. The cross-sectional shape of the first PMUT unit has a long axis and a short axis, and the cross-sectional shape of the second PMUT unit has a long axis and a short axis, and the cross sections are parallel to the substrate. The size of the first PMUT unit is different from the size of the second PMUT unit. The difference between the frequency corresponding to the wave peak position on the sensitivity curve of the first PMUT unit and the frequency corresponding to the wave trough position on the sensitivity curve of the second PMUT unit is less than a preset value, and / or the difference between the frequency corresponding to the wave trough position on the sensitivity curve of the first PMUT unit and the frequency corresponding to the wave peak position on the sensitivity curve of the second PMUT unit is less than a preset value.

An ultrasound imaging and backscatter system includes an ICE ultrasound catheter having an ultrasound pMUT transducer array disposed within a distal end of the ultrasound catheter and including a plurality of transducer array elements disposed on a substrate. One end of the catheter shaft is connected to the handle assembly and the other end is connected to the ultrasonic transducer array. The catheter shaft accommodates an electronic flexible cable in communication with the signal trace and directs each of the plurality of transducer array elements to transmit and receive an ultrasound beam, receives at least one signal from the plurality of transducer array elements, and constructs at least one image characterizing one or more tissue components of the scanned object. An ultrasound imaging system is used to measure tissue thickness, tissue scar, and lesion assessment for left atrium, right atrium, left ventricle, and right ventricle tissue wall characteristics and other intracardiac tissue anomalies.

The invention discloses a high-temperature-resistant piezoelectric micro-electro-mechanical transducer, which comprises a shell made of silicon carbide ceramic; the PMUT area array is positioned in the shell; the support is made of an aluminum oxide ceramic material and is arranged between the shell and the PMUT area array; the sound matching layer is coated on the PMUT area array and is made of an aluminum oxide-PDMS (Polydimethylsiloxane) composite material; and the NBPSC fireproof coating layer is coated on the sound matching layer. The transducer can resist high temperature of 1500 DEG C or above, and the problem that the performance of an existing PMUT is limited in a high-temperature environment is solved.

The invention provides an ultrasonic sensing array, a manufacturing method of the ultrasonic sensing array, a flexible imaging patch and a manufacturing method of the flexible imaging patch. The ultrasonic sensing array comprises a plurality of PMUTs and a plurality of driving chips which are in one-to-one correspondence. And the PMUT is bonded with the driving chip. The PMUT comprises a plane vibration part and a curved surface vibration part, in the horizontal direction, the plane vibration part is of an annular structure, in the vertical direction, the curved surface vibration part protrudes in the direction away from the detection direction, the protrusions form a curved surface, in other words, the detection part of the PMUT forms an annular-curved surface structure, and the PMUT of the annular-curved surface structure can be driven through low driving voltage. According to the ultrasonic sensing array, the PMUT of the annular-curved surface structure and the driving chip are bonded, the distance between the adjacent PMUTs can be shortened, high emission efficiency and bandwidth can be achieved, each PMUT can be driven through small driving voltage, high resolution is achieved, and the imaging precision is finally improved.

The invention discloses a lead-free piezoelectric micromechanical ultrasonic transducer array and electronic equipment, and relates to the technical field of micro electro mechanical systems, the lead-free piezoelectric micromechanical ultrasonic transducer array comprises a plurality of super pixels, and each super pixel is composed of a plurality of piezoelectric micromechanical ultrasonic transducer PMUT units; the PMUT unit comprises a bottom electrode, a lead-free piezoelectric layer and a top electrode which are stacked in sequence; wherein the array layout of the super pixels and the structural parameters of the PMUT units are collaboratively optimized, so that the transducer array has the characteristics of high emission pressure and wide bandwidth when working in a target medium through the acoustic coupling effect between the units. By arranging the lead-free piezoelectric layer and combining with collaborative optimization of super pixel layout and PMUT unit structure parameters, the emission performance and the bandwidth of the lead-free material-based transducer are improved. Through collaborative optimization of the array layout of the super pixels and the structural parameters of the PMUT units, the array is finally enabled to have the characteristics of high emission pressure and wide bandwidth in a target medium by using the acoustic coupling effect between the units.

To achieve low power consumption and a high dynamic range in TGC.SOLUTION: The transceiver includes a plurality of PMUT cells 31 to 33 provided on CMOS circuit 50, and CMOS circuit 50. The CMOS circuit 50 includes transmission pulsers 611 to 616641 and to 646, series connection switches 621 to 626, and GND switches 631 to 633. Transmission pulsers 611 to 616641 and to 646 switch and apply a high voltage and a low voltage to both sides of the upper electrode and the lower electrode of PMUT cells 31 to 33 at the time of transmission of an ultrasound wave. During reception of ultrasound, series connection switch 621 to GND switch 633 connect an arbitrary number of PMUT cells 31 to 33 in series between wave reception section 70 and a GND potential. Wave reception section 70 processes a reception signal of the connected PMUT cell.SELECTED DRAWING: Figure 3

The application provides a super multi-channel PMUT array element two-dimensional arrangement structure and a transducer. The super multi-channel PMUT array element two-dimensional arrangement structure comprises PMUT array elements, integrated amplifiers, a PCB board, a flexible flat cable, a flat cable plug, a backing and a shell. The shell has a bottom plate. The PMUT array elements are uniformly arranged on the PCB board. The PMUT array elements have output wires, and the output wires are connected with electrodes of the PCB board. The back of the PCB board is provided with integrated amplifiers. Each PMUT array element corresponds to an integrated amplifier. The output signals of the integrated amplifiers are connected to the flexible flat cable. The end of the flexible flat cable is connected to the flat cable plug. The flat cable plug passes through the bottom plate and extends to the outside of the bottom plate. The application designs the flexible flat cable and the flat cable plug. Since the signals of multiple array elements are concentrated in the two-dimensional arrangement structure, the connection points of the two-dimensional arrangement structure and external back-end circuits are greatly reduced, the docking difficulty is greatly reduced, and the signal lead-out line problem of multi-channel receiving array elements is solved.

The present application relates to the technical field of semiconductor process, and especially relates to a piezoelectric ultrasonic transducer and a preparation method thereof, which comprises a substrate, a piezoelectric layer formed on the front surface of the substrate, a back cavity formed by penetrating the substrate, a structure layer formed on the surface of the piezoelectric layer, the thickness of the structure layer being greater than the thickness of the piezoelectric film in the piezoelectric layer, and an anti-leakage sound layer arranged on the surface of the structure layer; a through groove is formed along the edge of the diaphragm, so that the diaphragm forms an external structure outside the diaphragm area and an internal structure in the diaphragm area, and the external structure and the internal structure are connected through a cantilever beam formed in the through groove. The preparation method comprises the following steps: preparing the substrate; growing the piezoelectric layer; etching the piezoelectric layer; growing the structure layer; etching the structure layer; and etching the substrate to form the back cavity. The present application uses silicon oxide as the structure layer, which can effectively reduce the resonant frequency; the cantilever beam can convert the PMUT from the Gaussian mode to the piston-like mode to improve the sensitivity, and can also provide good support.

This application discloses a radio frequency piezoelectric micromechanical ultrasonic transducer and its fabrication method. In the above method, high-resistivity silicon is used to replace the original SOI substrate as the substrate of the radio frequency piezoelectric micromechanical ultrasonic transducer, which can greatly simplify the manufacturing process of the radio frequency piezoelectric micromechanical ultrasonic transducer and reduce the manufacturing cost. Furthermore, the piezoelectric material wafer formed by epitaxy on the silicon substrate is transferred to the high-resistivity silicon substrate with a defect-rich oxide layer through metal-to-metal direct wafer bonding. Both the defect-rich oxide layer and the defect-rich layer play the role of capturing free parasitic charges in the entire device, improving the resistivity of the entire radio frequency MDOL substrate structure, and enabling the radio frequency piezoelectric micromechanical ultrasonic transducer to have excellent radio frequency performance. This solves the problems of low signal linearity, high insertion loss, poor signal integrity, and high signal distortion in PMUT.

The invention relates to the technical field of health care, in particular to a pressure injury monitoring method, device and system based on multiple sensors. The system comprises an intelligent mattress and an upper computer server, the intelligent mattress comprises a sensing layer, and the sensing layer comprises a multimode sensor array, a microprocessor unit, a data bus and a wireless transmission module; the multimode sensor array is composed of a plurality of sensor units; the sensor unit is integrated with a plurality of sensors and piezoelectric micromechanical ultrasonic transducer array elements; the sensing layer further comprises a flexible wire and a lock catch. According to the intelligent mattress, monitoring-physical therapy integration based on the PMUT array is achieved, the problems that an existing intelligent mattress is subjected to monitoring surface layer, physical therapy is not targeted, body type adaptability is poor, function expansion is limited and the like are solved, precise health monitoring and targeted physical therapy of people with different body types are achieved, and an innovative and efficient integrated solution is provided for the field of health care and healthy home furnishing.

The invention discloses a multi-finger gesture recognition method and system based on frequency modulation continuous waves and an ultrasonic transducer, and belongs to the technical field of man-machine interaction. According to the method, gesture reflection echo signals are collected through a pMUT array, and a dual-channel time-distance Doppler sequence feature map and a time-dual-channel phase difference sequence feature map are obtained through processing such as noise suppression, feature extraction and feature enhancement; and inputting the fused three-channel feature map sequence into a double-flow collaborative attention mechanism-three-dimensional convolutional neural network-long and short-term memory network neural network model to realize multi-finger micro-gesture classification and recognition, and realizing full-process automation based on threshold triggering. On the basis, the invention further provides a pMUT multi-finger micro gesture recognition system. The method has the advantages of being low in operation power consumption, high in environment adaptability, high in resolution precision and the like, and is suitable for the fields of virtual reality, vehicle-mounted control, mechanical arm control and the like.

The invention relates to an annular groove type piezoelectric micromechanical ultrasonic transducer and a preparation method thereof, the annular groove type piezoelectric micromechanical ultrasonic transducer comprises a cavity SOI substrate, the cavity SOI substrate comprises bottom layer silicon, a silicon dioxide insulating layer and top layer silicon, the silicon dioxide insulating layer and the top layer silicon are sequentially formed on the bottom layer silicon, and a cavity is formed in the middle of the bottom layer silicon; a bottom electrode, a piezoelectric layer and a top electrode are sequentially formed on the top layer silicon; the ultrasonic transducer further comprises a plurality of annular grooves arranged at intervals, the annular grooves penetrate through the silicon dioxide insulating layer from the piezoelectric layer, and an annular structure concentric with the center of the top electrode is defined by the heads and the tails of the annular grooves. The effective quality and rigidity of the diaphragm are changed by introducing the annular groove, and the residual stress of the diaphragm in the preparation process is released at the same time, so that the vibration mode of the diaphragm is improved, the effective vibration area and vibration displacement of the diaphragm are improved, and a PMUT device has higher sensitivity and emission sound pressure.

A microneedle device (100) having one or more microneedles (106) extending from a substrate (104), and for insertion into a target body. The microneedle device includes one or more piezoelectric micromachined ultrasound transducer (102), PMUT, elements formed on the substrate. Each of the one or more PMUT elements includes a moveable piezoelectric diaphragm. Control circuitry (110) is integrally formed with the substrate and electrically coupled to the one or more PMUT elements.

An ultrasound imaging system is disclosed. An ultrasound imaging system includes an intracardiac echocardiography (ICE) catheter and a transducer ring. The steerable sheath is integrated with a built-in forward looking transducer and a transducer ring located at a distal end of the steerable sheath. The transducer ring includes an array of MEMS-based pMUTs disposed over a substrate. A catheter shaft accommodates a lumen to allow passage of a puncture needle and an electronic flexible cable in communication with the at least one signal trace configured to: direct the MEMS-based pMUT array to transmit and receive an ultrasound beam via the at least one signal trace; receiving at least one signal from the MEMS-based pMUT array based on transmitting and receiving the at least one ultrasound beam; and construct at least one image of at least a portion of the heart based on the at least one signal.

The disclosure relates to an apparatus for sensing properties of biological tissue, the apparatus comprising a probe, in particular a handheld probe, the probe comprising: a plurality of laser radiation emitting elements configured to emit pulses of laser radiation, the laser radiation having a predefined wavelength and the pulses of laser radiation having a predefined pulse width and predefined pulse repetition rate, an exit section, in particular an opening or window, through which the emitted pulses of laser radiation can exit the probe and impinge on the biological tissue, and at least one detector, in particular including piezo, CMUT or PMUT elements with or without preamplifier, configured to detect signals emanating from the bio-logical tissue in response to the impinging pulses of laser radiation and to convert the detected signals into detector signals from which one or more properties of the biological tissue are derivable, and is characterized in that the laser radiation emitting elements are distributed over a two-dimensional surface, whereby for the predefined wavelength, pulse width and pulse repetition rate a radiation energy of the emitted pulses of laser radiation at or close to the exit section of between 1 μJ / mm2 and 50 μJ / mm2, in particular over an area of 1 to 200 mm2 and / or at an emission angle of 15° to 40°, in particular 15° to 35°, is obtained.

The application provides a photoacoustic imaging system, which is composed of a light source, a micro-ring resonator detector array and a signal processing unit, wherein the micro-ring resonator detector array comprises at least two detector arrays, and each detector array comprises at least two micro-ring resonator cavities. In the imaging process, the light source emits a laser signal, each micro-ring resonator cavity generates a corresponding resonance signal according to the laser signal, and the signal processing unit outputs an image signal according to each resonance signal. The micro-ring resonator detector array has small size, high on-chip integration, high sensitivity, large bandwidth and large receiving angle (about 75°), which cannot be compared with traditional detectors PZT, PMUTs and CMUTs, and can realize miniaturization of the imaging system. Meanwhile, the photoacoustic detector array based on the micro-ring resonator can realize high-resolution fast imaging, accurate positioning of the sound source and deep large-view-field imaging, and can further approach clinical application.

The present application relates to a kind of PMUT single channel structure, ultrasonic sensing channel unit, flexible modular ultrasonic sensor array, photoacoustic imaging system and sensor, belong to photoacoustic imaging and ultrasonic sensor field, at least one of the problems such as the volume of existing photoacoustic imaging ultrasonic sensor is large, frequency response consistency is poor, bandwidth is limited and flexibility is poor is solved.A kind of PMUT single channel structure, comprising: multiple column PMUT unit groups, each column PMUT unit group contains at least two PMUT units arranged along column direction;In the multiple column PMUT unit groups, at least two column PMUT unit groups contained PMUT unit has different cavity size.The present application realizes the efficient reception of wide spectrum photoacoustic signal, improves the imaging axial resolution, so as to obtain the reconstruction effect of higher resolution and more abundant imaging information.