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Flexible micro piezoelectric ultrasonic transducer, array and formation methods of flexible micro piezoelectric ultrasonic transducer and flexible micro piezoelectric ultrasonic transducer array

A transducer array, piezoelectric ultrasonic technology, applied in the directions of piezoelectric device/electrostrictive device, piezoelectric/electrostrictive/magnetostrictive device, piezoelectric/electrostrictive device manufacturing/assembly, etc. It can solve the problems of limiting the potential application of PMUT devices and the difficulty of PMUT bending, and achieve the effect of good flexibility, wide application range and mature technology.

Inactive Publication Date: 2019-02-01
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the rigid silicon substrate can well protect the device from environmental damage, PMUTs based on rigid substrates are generally not easy to bend, and cannot easily meet the needs of applications such as curved skin imaging, which limits the application of PMUT devices to implantable, wearable, Potential applications in non-invasive and other directions

Method used

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  • Flexible micro piezoelectric ultrasonic transducer, array and formation methods of flexible micro piezoelectric ultrasonic transducer and flexible micro piezoelectric ultrasonic transducer array
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  • Flexible micro piezoelectric ultrasonic transducer, array and formation methods of flexible micro piezoelectric ultrasonic transducer and flexible micro piezoelectric ultrasonic transducer array

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Embodiment Construction

[0046] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

[0047]In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation or position indicated by "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. The relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the descript...

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PUM

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Abstract

The invention provides a flexible micro piezoelectric ultrasonic transducer, a flexible micro piezoelectric ultrasonic transducer array and formation methods of the flexible micro piezoelectric ultrasonic transducer and the flexible micro piezoelectric ultrasonic transducer array. The flexible micro piezoelectric ultrasonic transducer is provided with a flexible substrate and has high flexibility.The flexible micro piezoelectric ultrasonic transducer of the invention includes a flexible substrate and PMUT structures; a first cavity is defined in the top of the flexible substrate; the depth ofthe first cavity is less than or equal to the thickness of the flexible substrate; the PMUT structures are located on the flexible substrate; and the PMUT structure comprises at least a lower electrode, a piezoelectric layer, and an upper electrode.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a flexible miniature piezoelectric ultrasonic transducer, an array and a forming method thereof. Background technique [0002] Most of the current micro piezoelectric ultrasonic transducers (Piezoelectric Micromachined Ultrasound Transducer, PMUT for short) are based on silicon substrates. Although the rigid silicon substrate can well protect the device from environmental damage, PMUTs based on rigid substrates are generally not easy to bend, and cannot easily meet the needs of applications such as curved skin imaging, which limits the application of PMUT devices to implantable, wearable, Potential applications in non-invasive and other directions. Contents of the invention [0003] In view of this, the present invention provides a flexible miniature piezoelectric ultrasonic transducer, an array and a forming method thereof. The device or array has a flexible substrate,...

Claims

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Application Information

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IPC IPC(8): H01L41/08H01L41/113H01L41/29B06B1/06
CPCB06B1/06H10N30/00H10N30/30H10N30/06H10N30/101
Inventor 庞慰孙圣张孟伦高传海
Owner TIANJIN UNIV
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