Ultra wide bandwidth transducer with dual electrode

An ultrasonic transducer and sensing electrode technology, applied in piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, instruments, etc., can solve problems such as limited bandwidth of pMUT arrays

Active Publication Date: 2015-01-07
FUJIFILM DIMATIX
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] One problem with conventional pMUT arrays is that the bandwidth as a function of damping implemented by the back layer can be limited

Method used

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  • Ultra wide bandwidth transducer with dual electrode
  • Ultra wide bandwidth transducer with dual electrode
  • Ultra wide bandwidth transducer with dual electrode

Examples

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Embodiment Construction

[0025] Several details are set forth in the description below. It will be apparent, however, to one skilled in the art that the present invention may be practiced without these specific details. In some instances, well-known methods and devices are shown in block diagram form rather than in detail in order to avoid obscuring the invention. Reference throughout this specification to "an embodiment" means that a particular feature, structure, function, or characteristic described in connection with the embodiment is included in at least one embodiment of the present invention. Thus, appearances of the phrase "in an embodiment" in various places in this specification are not necessarily referring to the same embodiment of the invention. Furthermore, the particular features, structures, functions or characteristics may be combined in any suitable manner in one or more embodiments. For example, the first embodiment and the second embodiment may be combined as long as they do not ...

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Abstract

Wide bandwidth piezoelectric micromachined ultrasonic transducers (pMUTs), pMUT arrays and systems having wide bandwidth pMUT arrays are described herein. For example, a piezoelectric micromachined ultrasonic transducer (pMUT) includes a piezoelectric membrane disposed on a substrate. A reference electrode is coupled to the membrane. First and second drive/sense electrodes are coupled to the membrane to drive or sense a first and second mode of vibration in the membrane.

Description

[0001] Cross References to Related Applications [0002] This application claims the benefit of U.S. Provisional Application No. 61 / 641,200, filed May 1, 2012, entitled "ULTRA WIDE BANDWIDTH TRANSDUCER WITH DUAL ELECTRODE," and Application No. 1, filed March 14, 2013. US Patent Application 13 / 830,288, entitled "ULTRA WIDE BANDWIDTH TRANSDUCER WITH DUAL ELECTRODE," which is hereby incorporated by reference in its entirety for all purposes. technical field [0003] Embodiments of the invention relate generally to piezoelectric transducers, and more particularly to ultra-wideband transducers with dual electrodes. Background technique [0004] Ultrasonic piezoelectric transducer devices typically include a piezoelectric film that is capable of vibrating in response to a time-varying drive voltage in a propagating medium (such as air, water, or generate high-frequency pressure waves in body tissue). This high frequency pressure wave can propagate into other media. The same pie...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B06B1/06H01L41/08
CPCH01L41/098H01L41/047B06B1/0622G10K11/343B06B1/0629B06B1/0696G01N29/2406H10N30/87H10N30/875H10N30/2048B06B1/06H10N30/00B06B1/0603
Inventor A·哈贾蒂
Owner FUJIFILM DIMATIX
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