Piezoelectric emission capacitor sensing high-performance MUT unit and preparation method thereof

A technology of transmitting capacitance and high performance, applied in the field of ultrasonic transducers, can solve problems such as limiting the receiving sensitivity, and achieve the effect of improving the transmitting performance, improving the directivity of ultrasonic transmitting and ultrasonic output, and improving the sensitivity

Active Publication Date: 2019-12-03
XI AN JIAOTONG UNIV
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Problems solved by technology

However, the performance of piezoelectric materials used in conventiona

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  • Piezoelectric emission capacitor sensing high-performance MUT unit and preparation method thereof
  • Piezoelectric emission capacitor sensing high-performance MUT unit and preparation method thereof
  • Piezoelectric emission capacitor sensing high-performance MUT unit and preparation method thereof

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[0042] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0043] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and thus should not be construed as limiting the invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative import...

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PUM

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Abstract

The invention discloses a piezoelectric emission capacitor sensing high-performance MUT unit and a preparation method thereof. An ultrasonic transmitting working mode of the PMUT unit and an ultrasonic receiving working mode of the CMUT unit are combined with each other. The MUT unit is composed of a piezoelectric driving annular thin film and a circular capacitance sensing thin film stacked on the upper surface of the annular thin film. In the ultrasonic transmitting working mode, the annular thin film is driven based on the inverse piezoelectric effect, meanwhile, the circular thin film stacked on the annular thin film is driven to generate piston type vibration, and therefore the ultrasonic emission directivity and ultrasonic output are improved. In the ultrasonic receiving working mode, the annular thin film and the circular thin film are simultaneously subjected to an incident ultrasonic action to generate deflection. Due to the superposition of the deflection of the circular thinfilm and the annular thin film, the stroke variation between the capacitor upper polar plate and the capacitor lower polar plate is increased, so that the unit ultrasonic receiving sensitivity is improved; and meanwhile, the unit can work in a collapse mode by adopting lower bias voltage in an ultrasonic receiving mode, so that the ultrasonic receiving sensitivity of the unit is further improved.

Description

technical field [0001] The invention belongs to the technical field of ultrasonic transducers, and in particular relates to a high-performance MUT unit sensed by piezoelectric emission capacitance and a preparation method thereof. Background technique [0002] Micromachined Ultrasonic Transducer (MUT) based on MEMS technology has the characteristics of miniaturization, good impedance matching with fluid, batch preparation, easy two-dimensional array processing, and easy integration with ICs. Ultrasound imaging and therapy (Point of Care Diagnostics, POC), ultrasound biometric recognition, 3D ultrasound gesture recognition and non-contact control and other cutting-edge application fields have great application potential. Micro-ultrasonic transducers mainly include capacitive micromachined ultrasonic transducers (Capacitive Micromachined Ultrasonic Transducer, CMUT) and piezoelectric micromachined ultrasonic transducers (Piezoelectric Micromachined Ultrasonic Transducer, PMUT)...

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Application Information

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IPC IPC(8): B06B1/06G01H11/08
CPCB06B1/0662G01H11/08
Inventor 赵立波郭帅帅徐廷中李支康杨萍李杰赵一鹤刘子晨蒋庄德
Owner XI AN JIAOTONG UNIV
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