ELECTRODE ARRANGEMENT FOR A pMUT and pMUT TRANSDUCER ARRAY

A transducer and electrode technology, applied in the field of piezoelectric micromechanical ultrasonic transducers, can solve the problem of reducing the number of transducer connections

Active Publication Date: 2017-11-24
VANGUARD INT SEMICON SINGAPORE PTE LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Rearranging the electrode configuration of pMUT transducers that can be used in this array may result in fewer transducer connections

Method used

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  • ELECTRODE ARRANGEMENT FOR A pMUT and pMUT TRANSDUCER ARRAY
  • ELECTRODE ARRANGEMENT FOR A pMUT and pMUT TRANSDUCER ARRAY
  • ELECTRODE ARRANGEMENT FOR A pMUT and pMUT TRANSDUCER ARRAY

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Embodiment Construction

[0023] The following detailed description is merely exemplary in nature and is not intended to limit the specific embodiments or applications and uses thereof. Furthermore, there is no intention to be bound by any theory presented in the preceding background or the following detailed description. Embodiments described in this disclosure are generally directed to piezo-induced micromachined ultrasonic transducers (pMUTs), and methods of assembly and operation thereof. The various structures, elements, acts and steps described herein may be incorporated into a comprehensive structure, procedure or process having additional elements, steps or functions not specifically described herein. In particular, many of the structures, designs, and methods for producing pMUTs, pMUT arrays, and circuits and sensors with pMUTs are well known, so that, for brevity, many existing aspects of such devices and assemblies will be referred to only Well known details are either briefly described her...

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PUM

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Abstract

Provided in accordance with the herein described exemplary embodiments are piezo micro-machined ultrasonic transducers (pMUTs) each having a first electrode that includes a first electrode portion and a second electrode portion. The second electrode portion is separately operable from the first electrode portion. A second electrode is spaced apart from the first electrode and defines a space between the first electrode and the second electrode. A piezoelectric material is disposed in the space. Also provided are arrays of pMUTs wherein individual pMUTs have first electrode portions operably associated with array rows and second electrode portions operably associated with array columns.

Description

[0001] Related Application Cross Reference [0002] This patent claims priority to U.S. Provisional Patent Application No. 62 / 330,881, filed on May 3, 2016, entitled "Method and System for Denser Ultrasonic Transducer Arrays using Limited Set of Electrical Contacts". technical field [0003] This patent relates to piezoelectric micromachined ultrasonic transducers (pMUTs), and in particular, to electrode arrangements for pMUTs and transducer arrays comprising pMUTs. Background technique [0004] Micromachined ultrasonic transducers (MUTs) continue to develop as technical components in human-machine interface and healthcare applications. Microfabrication techniques and techniques have recently advanced to the point where pMUTs can be applied in broader and innovative fields, as constraints such as critical dimensions have been resolved to a measurable level. Unlike capacitive micromachined ultrasonic transducers (cMUTs), pMUTs do not require high DC polarization voltages and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/047H01L27/20B06B1/06G01H11/08
CPCB06B1/06G01H11/08H10N39/00H10N30/871B06B1/0622H10N30/87H10N30/1051H10N30/2047H10N30/872B06B1/0238B06B1/0629B06B2201/55G10K11/345
Inventor 亚维克·纳斯·查特基拉盖·库马杰米·夫卡司马特斯·汤马士·马拉克
Owner VANGUARD INT SEMICON SINGAPORE PTE LTD
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