37 results about "Micro fabrication" patented technology

The invention provides a monolithic integrated multifunctional composite sensor and a preparation method thereof, a single silicon wafer single-sided bulk silicon micro-manufacturing technology is adopted, a first microgroove of a gas flow sensing unit is pre-defined and covered, a pressure reference cavity and a pressure sensitive diaphragm are firstly formed, and then through protection of the first microgroove and a side wall, the gas flow sensing unit and the pressure reference cavity are combined. A monocrystalline silicon thermocouple arm and a heating resistor pattern are pre-defined, then a pressure sensing unit is protected through a heat insulation medium layer, then a heat insulation cavity and a temperature sensing unit are formed, and finally the gas flow sensing unit, the pressure sensing unit and the temperature sensing unit are integrated on the same single chip. The structure that the heat insulation cavity and the pressure reference cavity are located in the same monocrystalline silicon substrate is achieved. According to the method, the traditional double-sided processing technology is replaced, the problem that the small size of the traditional composite chip is difficult to realize is solved, the complex process caused by the traditional silicon-silicon or silicon-glass bonding structure is avoided, the process difficulty and cost are greatly reduced, the yield of the composite chip is improved, and the reliability of the sensor is improved.

A method of microfabrication is provided. A substrate having a working surface and having a backside surface opposite to the working surface is received. The substrate has an initial wafer bow resulting from one or more micro fabrication processing steps executed on the working surface of the substrate. The initial wafer bow of the substrate is measured and the initial wafer bow is used to generate an initial wafer bow value that identifies a degree of first order wafer bowing of the substrate. A correction film recipe based on the initial wafer bow value is identified. The correction film recipe specifies parameters of a correction film to be deposited on the backside surface of the substrate to change wafer bow of the substrate from the initial wafer bow to a modified wafer bow. The correction film on the backside surface of the substrate according to the correction film recipe is deposited. The correction film physically modifies internal stresses on the substrate and causes the substrate to have a modified bow with the predetermined wafer bow value.

Techniques are provided for calibrating thermal annealing processes (e.g., laser annealing) using microfabricated resistance temperature sensors. For example, a device comprises a substrate, and a resistance temperature sensor disposed on the substrate. The resistance temperature sensor comprises a stack of alternating metal layers of a first metal and a second metal, wherein the first metal and the second metal are different types of metals.

Aspects of the present disclosure provide a self-aligned microfabrication method, which can include providing a substrate having vertically arranged first and second channel structures, forming first and second sacrificial contacts to cover ends of the first and second channel structures, respectively, covering the first and second sacrificial contacts with a fill material, recessing the fill material such that the second sacrificial contact is at least partially uncovered while the first sacrificial contact remains covered, replacing the second sacrificial contact with a cover spacer, removing a remaining portion of the first fill material, uncovering the end of the first channel structure, forming a first source / drain (S / D) contact to cover the end of the first channel structure, covering the first S / D contact with a second fill material, uncovering the end of the second channel structure, and forming a second S / D contact at the end of the second channel structure.

The present disclosure relates to interventional devices such as catheters and guidewire devices having micro-fabricated features for providing flexibility while maintaining good torquability. An interventional device includes an elongated member having an arrangement of fenestrations which define a plurality of axially extending beams coupling a plurality of circumferentially extending rings. The fenestrations are arranged so that the resulting beams form a distributed, non-helical and non-linear pattern along the length of the elongated member. The pattern of fenestrations thereby minimizes or eliminates preferred bending axes.

Additive manufacturing using bonding of voxels and related systems, devices, and articles are generally described. Certain embodiments are related to additive manufacturing with microscale resolution using solid-state kinetic bonding of microparticles or microfabricated thin-film voxels.

The utility model discloses a kind of worm processing comprehensive machine tools, including bed, the upper surface both sides of bed are fixedly installed with two symmetrical distribution primary bearing seat, one number screw rod is rotatably connected between two primary bearing seats, the outer thread of one number screw rod is connected with horizontal slide, the output shaft of one number motor is fixedly connected to one end of one number screw rod, symmetrically distributed secondary bearing seat is fixedly installed in the front and back two ends of horizontal slide, two secondary bearing seats are rotatably connected with two number screw rod, two number screw rod and one number screw rod are perpendicularly arranged between each other, the outer thread of two number screw rod is connected with longitudinal slide, the output shaft of two number motor is fixedly connected to one end of two number screw rod, equipment seat is fixedly installed on the upper surface of longitudinal slide, the machine tool of the utility model whole structure is simple, floor area is small, manufacturing difficulty is low, effectively reduce the enterprise's early purchase and later use cost, with good use economy, suitable for small and micro manufacturing enterprises development use.

Laboratory apparatus for Photolithography Based Micro Fabrication

A microstructure that detects the acoustic velocity of a fluid by employing microfabricated thin sensing elements that are primarily driven by viscous forces due to the fluctuating motion of a fluid, such as air in a sound field. The microstructures can be fabricated in an array to create a diaphragmless microphone. The microstructure and its components can be fabricated on a single or multilayer substrate with the use of masks.

A method for microfabrication of a three-dimensional transistor stack with a gate-all-around field-effect transistor device. Channels are suspended between source and drain regions. Each channel is selectively deposited with a material layer designed to adjust the threshold voltage of the channel. These layers can be oxides, high-k materials, work function materials, and metallizations. The three-dimensional transistor stack forms an array of high-threshold-voltage devices and low-threshold-voltage devices in a single package.

A micro-fabricated device (100) for controlling trapped ions (180) includes a first substrate (120) having a main surface. A structured first metal layer (130) is disposed over the main surface of the first substrate, the structured first metal layer comprising a plurality of electrodes (130_1, 130_2) configured to trap an ion at a position space above the first substrate. The micro-fabricated device further includes a first optical layer disposed beneath or over the position, the first optical layer comprising a first laser light path (150) extending in a direction substantially parallel to the main surface of the first substrate. The first optical layer comprises one or more light processing elements (160) for manipulating laser light on the first laser light path.

Battery component structures and manufacturing methods for solid-state battery cells include a unitary Li ion conducting sulfide glass solid electrolyte structure that serves as the basic building block around which a solid-state battery cell can be fabricated. The unitary glass structure approach can leverage precision controlled high throughput processes from the semiconductor industry that have been inventively modified as disclosed herein for processing a sulfide glass solid electrolyte substrate into a unitary Li ion conducting glass structure, for example, by using etching and lithographic photoresist formulations and methods. The glass substrate may be precision engineered to effectuate a dense glass portion and a porous glass portion that can be characterized as sublayers having predetermined thicknesses. The porous glass sublayer includes a plurality of discrete substantially vertical closed-end holes or trenches that are precision engineered into one or both major substrate surfaces using microfabrication processes.

Disclosed herein is an implantable or wearable, flexible, miniaturized microimaging suited for localized brain fluorescent imaging. The microimaging device is implemented on a Parylene photonics platform, which is biocompatible and fabricated using scalable planar microfabrication techniques, enabling customizable design, size, and number of channels (pixels). Operating across the entire visible spectrum. The microimaging device functions effectively both for coherent and scattered light. The microimaging device can be implanted into the brain of freely moving animals, where one or more waveguides could be dedicated to light delivery and the rest of the waveguides for collecting and relaying the fluorescent image to image the tissue structure and function.

Information handling systems are transported to a selected of plural micro manufacturing centers for harvesting of component modules to reuse in remanufactured information handling systems through an automated process that uses a robotic arm to harvest the component modules and rebuild the information handling systems. Component module health lifecycle information is applied to select components for harvesting. Carbon footprint, energy consumption, costs, any manual labor involved and time criticality are factored to select a geographical location to harvest the component modules and to send the system to subsequent end user locations.

Techniques are provided for calibrating thermal annealing processes (e.g., laser annealing) using microfabricated resistance temperature sensors. For example, a device comprises a substrate, and a resistance temperature sensor disposed on the substrate. The resistance temperature sensor comprises a stack of alternating metal layers of a first metal and a second metal, wherein the first metal and the second metal are different types of metals.

The present application provides a method and system for automated inspection of a microfabricated feature on a substrate. The disclosure utilizes manipulating laser polarization in combination with the excitation and emission process, in inspection applications. The application specifically discloses selecting the polarization of the laser light by adjusting a polarization manipulator or a quarter-waveplate and / or a half waveplate between the laser source and the substrate to impart polarization to the laser light. The polarization impacts using a polarization selected to improve fluorescence emission of certain features on a substrate. The selection can be made prior to run time or dynamically during the inspection tool runtime. If the polarization is not specifically selected, then the microfabricated features may not emit much fluorescence.

A method of manufacturing superconductor structures includes depositing a release film on a substrate, forming a stack of films comprising an elastic material and a superconductor film, releasing a portion of the elastic material by selective removal of the release film so that portion lifts out of the substrate plane to form elastic springs. A method of manufacturing superconductor structures includes depositing a release film on a substrate, forming a stack of films comprising at least an elastic material, releasing a portion of the elastic material so that portion lifts out of a plane of the substrate to form elastic springs, and coating the elastic springs with a superconductor film.

The application provides a monolithic integrated multifunctional composite sensor and a preparation method thereof, and adopts single-silicon single-surface silicon microfabrication technology to predefine and cover a first micro groove of a gas flow sensing unit, to form a pressure reference cavity and a pressure sensitive diaphragm first, to predefine a single-crystal silicon thermocouple arm and a heating resistor pattern through the first micro groove and a side wall protection, to protect the pressure sensing unit through a heat insulation medium layer, to form a heat insulation cavity and a temperature sensing unit, to finally realize integration of the gas flow sensing unit, the pressure sensing unit and the temperature sensing unit on the same monolithic wafer, and to realize the structure of the heat insulation cavity and the pressure reference cavity in the same single-crystal silicon substrate. The method replaces traditional double-sided processing technology, solves the problem that a traditional composite chip is difficult to realize small size, avoids a complex process caused by a traditional silicon-silicon or silicon-glass bonding structure, greatly reduces process difficulty and cost, improves the yield of the composite chip, and improves the reliability of the sensor.

The present disclosure provides a metal microprobe array and an electroforming method thereof, and relates to the technical field of microfabrication, and comprises the following steps: constructing a photocured resin mask model with a microprobe cavity; preparing a photocured resin mask; placing the photocured resin mask into a dopamine mixed solution to form a self-assembled polydopamine molecular layer on the surface of the photocured resin mask, thereby obtaining a photocured resin mask with surface hydrophilicity; adhering the photocured resin mask with surface hydrophilicity to a metal substrate by mechanical bonding, and using the photocured resin mask as an assembled cathode for electrodeposition; immersing the assembled cathode into an electroforming solution as a cathode for vacuum boiling electrodeposition; when the microprobe array is filled with metal and fills the cavity of the photocured resin mask with surface hydrophilicity, removing the cathode to obtain a filled photocured resin mask; and performing high-temperature ashing treatment on the filled photocured resin mask, and then performing ultrasonic cleaning to obtain a metal microprobe array. The present disclosure can improve the preparation efficiency of the metal microprobe array.

The present application provides a method and system for automated inspection of a microfabricated feature on a substrate. The disclosure utilizes manipulating laser polarization in combination with the excitation and emission process, in inspection applications. The application specifically discloses selecting the polarization of the laser light by adjusting a polarization manipulator or a quarter- waveplate and / or a half waveplate between the laser source and the substrate to impart polarization to the laser light. The polarization impacts using a polarization selected to improve fluorescence emission of certain features on a substrate. The selection can be made prior to run time or dynamically during the inspection tool runtime. If the polarization is not specifically selected, then the microfabricated features may not emit much fluorescence.

The present disclosure relates to interventional devices such as catheters and guidewire devices having micro-fabricated features for providing flexibility while maintaining good torquability. An interventional device includes an elongated member having an arrangement of fenestrations which define a plurality of axially extending beams coupling a plurality of circumferentially extending rings. The fenestrations are arranged so that the resulting beams form a distributed, non-helical and non-linear pattern along the length of the elongated member. The pattern of fenestrations thereby minimizes or eliminates preferred bending axes.

A low-cost high-pressure cell to facilitate effective analysis of sample materials with high energy photon and electron beams. In one example, the cell includes a first micro-fabricated semiconductor substrate having a first membrane of a micro-fabricated material formed thereon and including a first membrane-covered region, and a second micro-fabricated semiconductor substrate having a second membrane of the micro-fabricated material formed thereon and including a second membrane-covered region, the first and second micro-fabricated semiconductor substrates being bonded together such that the first and second membrane-covered regions are at least partially aligned. The first and second membrane-covered regions may be separated by at least one spacer layer such that a cavity is formed between the membranes, the cavity being bounded on at least one side by one of membranes. Access to the cavity may be provided by micro-fabricated trenches cut into at least one of the first and second micro-fabricated semiconductor substrates.

The application discloses a quantum sensor chip packaging structure capable of realizing wafer-level planar co-packaging, which comprises a microfabricated atomic cell, a light source chip assembly and a light detection chip assembly, the microfabricated atomic cell is integrated with a reflecting element, the reflecting element is used for adjusting the optical path of the light beam entering the microfabricated atomic cell, the microfabricated atomic cell, the light source chip assembly and the light detection chip assembly are supported on a packaging substrate through a micro-bump assembly and are directly electrically interconnected with the packaging substrate through the micro-bump assembly, the micro-bump assembly comprises a plurality of micro-bumps, the distribution mode of the micro-bumps is for the purpose of realizing the supporting function and the electrical interconnection, the size of the micro-bump supporting the microfabricated atomic cell, the light source chip assembly and / or the light detection chip assembly is adjustable, the optical path of the microfabricated atomic cell is regulated by adopting the combination of micro-bumps with different sizes, and the planar co-packaging of the microfabricated atomic cell and other key quantum sensor components can be realized.

A micro-fabricated device for controlling trapped ions includes a first substrate having a main surface. A structured first metal layer is disposed over the main surface of the first substrate. The structured first metal layer includes electrodes configured to trap an ion at a position space above the first substrate. A first optical layer disposed beneath or over the position includes a first laser light path extending in a direction substantially parallel to the main surface of the first substrate. The first optical layer also includes one or more light processing elements configured to manipulate laser light on the first laser light path.

The present disclosure relates to implantable neuromodulation devices and methods of fabrication, and in particular to anatomically contoured spinal cord stimulation leads for high density neural interfaces and methods of microfabricating the stimulation leads. Particularly, aspects are directed to a thin film lead assembly that includes a cable having: a first supporting structure formed of dielectric material, a first set of conductive traces formed on the first supporting structure, a second supporting structure formed of dielectric material, and a second set of conductive traces formed on the second supporting structure. The thin film lead assembly also includes an electrode assembly having: a third supporting structure formed of dielectric material, a first set of electrodes in electrical connection with the first set of conductive traces, and a second set of electrodes in electrical connection with the second set of conductive traces.

A dispensing head device based on pneumatic-spiral needle core rotation coupling transportation belongs to the field of dispensing devices and comprises a power transmission module, a sealing regulation and control module and a fluid transportation module. The power transmission module adopts a high-speed motor to realize non-contact torque transmission through a magnetic coupling; the sealing regulation and control module ensures the airtight performance under the working condition of high back pressure through a cavity separation design and a movable sealing ring structure; the fluid conveying module is provided with an axial adjustable rotation adjusting mechanism, and accurate control over the position of the tail end of the needle core is achieved. Through effective coupling of pneumatic driving and spiral needle core rotation, the conveying efficiency and deposition precision of high-viscosity functional ceramic slurry are remarkably improved, and the problems that when high-viscosity slurry is treated through a traditional dispensing technology, fluid conveying is insufficient, the sealing performance is poor, and the adjusting precision is low are solved; the method can be widely applied to the high-precision micro-manufacturing fields of aerospace, electronic manufacturing, biomedical treatment and the like.

The invention provides a metal microprobe array and an electroforming method thereof, and relates to the technical field of micro-manufacturing forming, and the electroforming method comprises the following steps: constructing a light-cured resin mask model with a microprobe cavity, and preparing a light-cured resin mask; putting a light-cured resin mask into the dopamine mixed solution, and forming a self-assembled polydopamine molecular layer on the surface of the light-cured resin mask to prepare a light-cured resin mask with surface hydrophilicity; a light-cured resin mask with surface hydrophilicity is attached to a metal substrate in a mechanical combination mode to serve as an assembling cathode for electro-deposition; immersing the assembled cathode serving as a cathode into the electroforming solution for vacuum boiling electrodeposition, and removing the cathode to obtain a filled light-cured resin mask when a cavity of the light-cured resin mask with surface hydrophilicity is filled with microprobe array metal; and carrying out high-temperature ashing treatment on the filled light-cured resin mask, and carrying out ultrasonic cleaning to obtain the metal microprobe array. According to the invention, the preparation efficiency of the metal microprobe array can be improved.

The antibacterial nanostructured substrate comprises a substrate plate and a nanostructure composite. The nanostructure composite is formed on the first surface of the substrate plate and includes multiple first nanostructure bodies and multiple second nanostructure bodies that are adjacently arranged in intervals. The first nanostructure bodies and the second nanostructure bodies are periodically arranged, with the center position of each first nanostructure body defined as a first reference point and the center position of each second nanostructure body defined as a second reference point. The first nanostructure bodies are arranged corresponding to the center position of the second nanostructure bodies. The first reference point has a first displacement and a second displacement relative to the second reference point. A method of manufacturing the antibacterial nanostructured substrate is provided to form nanostructure composite on the substrate plate using a microfabrication process.