The invention discloses a movable
mask device for preparing a layered
wrinkle structure, a deposition method and the obtained
wrinkle structure. The device comprises a
chassis, a substrate mounting module, a
mask movement
assembly, a replaceable
mask library and a control module. The mask motion
assembly is composed of a plurality of
linear motion driving modules and a plurality of rotary driving modules, and can realize programmable compound motion of the mask in translation and rotation directions; the mask
library is detachably installed in the mask frame, and spatial
selective control over the deposition area is achieved through adjustment and control over the motion trail and the
retention time. According to the method, by selecting different mask patterns and setting a mask movement track and deposition time,
metal is deposited on the surface of a flexible substrate to construct adjustable area thickness distribution; then, in the
liquid polymer curing or substrate cooling process, due to the spatial gradient of the rigid
layer thickness and the stress, non-uniform strain occurs on the interface, so that a layered
wrinkle microstructure with
directivity and hierarchy is spontaneously formed.