The invention discloses a method for preparing a
solid nanopore through automatic controllable breakdown, and relates to the technical field of
nanopore processing, and the method comprises the steps of S1, preprocessing and
chip assembly, S2, parameter initialization, S3, dynamic
voltage gradient control, S4, multi-parameter real-time monitoring, S5,
pore diameter prediction and feedback termination, and S6, post-
processing and
verification. A breakdown basis is established through surface functionalization
processing and intelligent parameter initialization, a dynamic
voltage gradient
algorithm is adopted to adaptively adjust the
electric field intensity according to the real-time current change rate, and
noise features are synchronously monitored to recognize the breakdown stage; the method comprises the following steps: dynamically predicting
pore diameter growth by combining a charge accumulation effect and a
thermodynamic model, accurately controlling
pore diameter formation through a multi-level termination condition, and finally verifying
nanopore parameters by utilizing electrical
property analysis and in-situ calibration, and the process is integrated with a dynamic
algorithm and a multi-
physics field feedback mechanism. And the aperture control precision and the process stability are improved while the
machining efficiency is guaranteed.