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Ultrahigh vacuum sample storage and transfer platform

A sample storage and ultra-high vacuum technology, applied in the direction of analytical materials, instruments, etc., can solve problems such as complex operation and sample contamination, and achieve the effects of improving growth efficiency, preventing pollution, and reducing pollution

Inactive Publication Date: 2016-09-28
NANJING UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, most of the operations are complicated, and each method must open the cavity to sample, so that the sample is exposed to a non-vacuum environment, causing a certain degree of pollution to the sample
[0005] At present, there is no equipment that can realize the transfer function of samples in different ultra-high vacuum systems while completing the preparation and storage of a group (8) of samples without destroying the ultra-high vacuum environment

Method used

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  • Ultrahigh vacuum sample storage and transfer platform
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  • Ultrahigh vacuum sample storage and transfer platform

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Embodiment Construction

[0030] As shown in the figure, the present invention provides a connection platform for transferring and storing samples between different ultra-high vacuum systems, and the labels of the first to ninth flanges are 1, 2, 3, 4, 5, 6, 7, 8, 9; the platform connects two sets of systems at the same time through the gate valve and the second gate valve connected to the fourth flange 4 and the sixth flange 6. At the same time, the storage and transfer of samples between the two systems is realized through the magnetically driven transmission rod and the sample storage platform connected to flange 2 (the second flange, and so on) and flange 8 .

[0031] figure 1 A top view of an overall structure according to an embodiment of the invention is shown. In this embodiment, a group of (8) samples are loaded into the ultra-high vacuum sample storage and transfer platform through the quick opening device, and then the ultra-high vacuum sample storage and transfer platform is maintained at ...

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Abstract

The invention discloses an ultrahigh vacuum sample storage and transfer platform which comprises a sample storage and transfer cavity and a sample storage table. The sample storage and transfer cavity is formed by connecting nine vacuum pipelines with ends connected in parallel. The outer sides of the nine vacuum pipelines are provided with vacuum flanges capable of being in vacuum connection with other devices. An observation window is arranged to be in sealed connection with the first flange. A magnetic driving transmission rod is arranged to be in sealed connection with the second flange. A gate plate valve is arranged to be in sealed connection with the fourth flange. A molecular pump is arranged to be in sealed connection with the fifth flange. A two-dimensional adjusting mechanism is arranged to be in sealed connection with the ninth flange. The sample storage table is connected with the two-dimensional adjusting mechanism. The sample storage and shift cavity keeps an ultrahigh vacuum environment through an ultrahigh vacuum keeping device; the gate plate valve is connected with a cavity of an ultrahigh vacuum system through the corresponding flange, and connection or disconnection of the cavity of the ultrahigh vacuum system and the sample storage and transfer platform are achieved through on-off of the gate plate valve.

Description

technical field [0001] The invention relates to an ultra-high vacuum instrument, in particular to an ultra-high vacuum sample storage and transfer platform. technical background [0002] Generally speaking, the ultra-high vacuum equipment system is composed of vacuum pumps, vacuum gauges, vacuum chambers and other components with the help of vacuum pipelines, combined according to certain requirements. Through these to obtain and maintain a specific vacuum environment within a certain period of time (the vacuum degree of the ultra-high vacuum environment is better than 1×10 -9 mbar), to ensure that a certain process or physical process is implemented in a specific vacuum system. Ultra-high vacuum systems are widely used in various fields such as semiconductors, machining, physics, chemistry, materials and biological sciences. [0003] After the sample preparation is completed in the ultra-high vacuum system, in order to ensure that the sample is not polluted by the externa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N35/00G01N35/10
CPCG01N35/00G01N35/10
Inventor 何亮王克杰徐高翔徐永兵
Owner NANJING UNIV
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