Scattering-low dosage-rotary energetic ion irradiation device
An ion irradiation, low-dose technology, applied in the field of irradiation test of large batches of small samples, to achieve the effect of improving efficiency and large application value
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Embodiment 1
[0020] Embodiment 1: A scattering-low-dose-rotating energy-carrying ion irradiation device, including a stepping motor bracket 6 fixedly connected to a vacuum flange 9, the stepping motor bracket 6 is fixedly connected to a stepping motor 5, and the stepping motor bracket 6 is fixedly connected to a stepping motor 5. The motor 5 drives the rotating target disk 4, and a fan-shaped baffle 3 is arranged in front of the rotating target disk 4, and the fan-shaped baffle 3 is connected on the stepping motor bracket 6; the beam detection device bracket 1 is located in front of the fan-shaped baffle 3, and A beam detection device 2 is provided.
[0021] A beam spot fluorescent target detection device 8 is arranged in front of the rotating target disk 4 , and is connected with a fluorescent target telescopic device 10 through a vacuum flange 9 and a vacuum bellows 7 .
[0022] The beam detection device 11 is a gold-silicon surface barrier detector or a silicon multi-strip detector.
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experiment example
[0027] Experimental example: a scattering-low dose-rotating energy-carrying ion irradiation device, including a scattering target film (), a rotating target disk, a stepping motor, a fan-shaped baffle, a beam detection device located in front of the fan-shaped baffle, and a target chamber Internal lighting power supply, beam detection device located behind the rotating target disk, lifting beam spot detection device, vacuum chamber, observation window, connection of wiring devices outside the vacuum chamber and the sample stage inside the vacuum chamber, located outside the vacuum chamber stepper motor control device. The rotation of the rotating target disk located inside the vacuum chamber is realized through the stepper motor control device located outside the vacuum chamber, so that the fast heavy ions irradiate samples in at least seven sectors. The scattering target film can spread the beam to a disc with a radius of about 7cm (see figure 2 ), using the gradient distri...
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