Sheet-shaped stacked structure getter pump

Abstract

The invention discloses a sheet-shaped stacked structure getter pump, and belongs to the technical field of vacuum. The getter pump comprises a getter element, ceramic heating sheets, a central supporting rod, a heat shielding structure and a base, wherein the getter element comprises getter sheets and a central step gasket; the getter element and the ceramic heating sheets are alternately stackedon the central supporting rod through circular holes, and the gap between the getter element and the ceramic heating sheets is adjusted through the thickness of the central step gasket; the heat shielding structure comprises heat shielding layers and hollow thin housings which are arranged on the top, the bottom and the outer layer of a stacked body; and the base is a high-vacuum CF flange, and electrodes are welded through kovar alloy. An integrated structure that the getter sheets and the central step gasket are matched is adopted on the getter element, so that the problem of powder fallingcaused by friction of all parts of the getter element is effectively avoided. The face-to-face heat radiation of the ceramic heating sheets is adopted to heat and activate the getter, so that the getter pump has the characteristics of being high in heating efficiency and uniform in activation. The sheet-shaped stacked structure getter pump is reasonable in structural design, convenient to install, safe to use and suitable for vacuum obtaining and passive maintenance of various vacuum systems.

Description

technical field [0001] The invention belongs to the field of vacuum technology, in particular to a getter pump with sheet-like stacking structure. Background technique [0002] The getter pump is a high-vacuum adsorption pump. By heating and activating the active alloy materials that make up the getter material, it can effectively absorb the active gas in the vacuum system, thereby obtaining and maintaining the high-vacuum environment of the system. Different from traditional vacuum pumps, it has many advantages such as passive operation after activation, low energy consumption, and anti-vibration. [0003] The getter pumps in the prior art mostly use a central heating rod or external baking to heat and activate the getter material. However, the structure of the externally baked getter pump has problems such as high energy consumption, low heating efficiency, and the inability of the getter pump body to be embedded in the vacuum system, resulting in a decrease in the effect...

AI Technical Summary

Problems solved by technology

However, the structure of the externally baked getter pump has problems such as high energy consumption, low heating efficiency, and the inability of the getter pump body to be embedded in the vacuum system, resulting in a decrease in the effective pumping speed; and the form of the central heating rod is easy to cause the getter sheet The core temperature is much higher than the edge getter material, which has the problem of uneven heating

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