Atom generator capable of improving atomic beam density

Abstract

The invention discloses an atom generator capable of improving the atomic beam flow density. The atom generator comprises a vacuum flange, an air circuit component, a heating device and a thermal insulation cooling device, wherein the air circuit component comprises an air supply source, a vacuum micrometering valve, a gas introducing flange, an air supply pipe, a ceramic sleeve and a tungsten capillary tube; the heating device comprises a direct current stabilized power supply, an electricity introducing flange and a tungsten heater element; the thermal insulation cooling device comprises a cooling water introducing flange, a copper sleeve, a molybdenum thermal insulation layer and a cooling block; a cooling water channel is formed in the copper sleeve; a first round hole as an atomic beam outlet is formed in the lower end of the molybdenum thermal insulation layer; a second round hole as an atomic beam outlet is formed in the copper sleeve; and the axes of the tungsten capillary tube, the first round hole and the second round hole overlap with one another. In atomic angular distribution at the outlet, the atomic flow density within a small polar angle range is increased; the work efficiency of the atom generator is improved; meanwhile, the atomic flow density with a large polar angle is inhibited; and the influence on surrounding components is reduced.

Description

technical field [0001] The present invention belongs to the field of atomic generators. Background technique [0002] Atomic generators are mainly used in the fields of surface science and thin film technology, and can be used for thin film preparation, material surface cleaning, surface nitriding and oxidation, and atomic and molecular physics research. [0003] Chinese Patent Publication No. CN104202902A discloses a hydrogen atom generating device based on inductive radiation heating polytungsten capillary, which is used to split hydrogen gas into hydrogen atoms. The device includes a plurality of adjacent metal tungsten capillary tubes, a metal heating coil is wound outside the metal tungsten capillary tubes, and the external high-frequency alternating current is connected to generate a high-speed changing alternating magnetic field, so that the metal tungsten capillary tubes located in the magnetic field are under the action of electromagnetic induction. Numerous eddy c...

AI Technical Summary

Problems solved by technology

Its outlet does not increase the corresponding structure to improve the angle distribution, so that the angle distribution of hydrogen atoms at the outlet is still in the majority in the direction of the large polar angle (the polar angle is the angle between the direction of atomic motion and the centerline of the capillary), making it difficult to use atomic beams Centralized processing of workpieces

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