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49results about "Gas plasma lamps" patented technology

Vacuum ultraviolet light source device through coaxial gas discharge

ActiveCN106941073AOvercome the shortcomings of low utilization rate and low output optical powerIncrease profitGas plasma lampsLamp detailsUltra-high vacuumRadio frequency
The invention adopts a radio frequency gas discharge manner to excite the inert gas plasmas and provides a device for generating a vacuum ultraviolet light source. The device comprises four parts: a central cylindrical shaped interaction cavity, a coaxial circular power charge light source cavity, a radio frequency spiral resonance excitation cavity and an ultrahigh vacuum flange connection component. The device uses a circular tube made of magnesium fluoride crystal materials as its optical window; the vacuum ultraviolet light is generated in the coaxial circular power charge light source cavity on the outer wall of magnesium fluoride circular tube, then penetrates and is radiated into the central cylindrical shaped interaction cavity so that the light could act on a target material directly. In this manner, the travel distance of the light rays is shortened; the effective size of the light source is increased; the beam-divergence angle is reduced; and the utilization efficiency of the light source is increased. According to the invention, the device adopts an electrodeless radio frequency charge manner to excite the gas plasmas, and produces vacuum ultraviolent photons with specific wavelengths by filling different inert gases. Through the adjustment of the parameters of the gases like gas pressure, radio frequency and power, it is possible to adjust the output power of the vacuum ultraviolet light so as to meet the requirements of various applications on the light source.
Owner:PLA PEOPLES LIBERATION ARMY OF CHINA STRATEGIC SUPPORT FORCE AEROSPACE ENG UNIV

High-flux plane light source device

The invention provides a device for generating a high-flux plane light source. The device mainly comprises a tubular arc chamber, n rod-like cathodes, a tabular anode in the middle of which a round hole is formed and a quartz transmitting window, wherein one end of the arc chamber is provided with the tabular anode, and the other end of the arc chamber is provided with the quartz transmitting window; emission ends of the n cathodes are respectively located at all vertexes of an N-polygon in the arc chamber; the N-polygon, the arc chamber and the round hole of the anode are coaxial; gas injection apertures are distributed around each cathode on the wall of the arc chamber; electric arcs starting from the emission ends of the n cathodes are gathered to the round hole of the anode, and therefore roughly uniform disk-shaped plasmas are formed; generated high-strength emitted light is directly reflected by the wall of the arc chamber, and thus, the high-flux plane light source which is comparatively uniform is formed on the outer part of the transmitting window; the flow of gas is forced to stabilize the electric arcs so as to protect the transmitting window and the wall of the arc chamber from electrode ablated vapor pollution. The device provided by the invention has the advantages that the power of the electric arcs is improved, the luminous efficacy is enhanced, and by a gas flow design, the transmitting window and the wall of the arc chamber are protected from the metallic vapor pollution.
Owner:合肥碳艺科技有限公司

A coaxial gas discharge vacuum ultraviolet light source device

The invention adopts a radio frequency gas discharge manner to excite the inert gas plasmas and provides a device for generating a vacuum ultraviolet light source. The device comprises four parts: a central cylindrical shaped interaction cavity, a coaxial circular power charge light source cavity, a radio frequency spiral resonance excitation cavity and an ultrahigh vacuum flange connection component. The device uses a circular tube made of magnesium fluoride crystal materials as its optical window; the vacuum ultraviolet light is generated in the coaxial circular power charge light source cavity on the outer wall of magnesium fluoride circular tube, then penetrates and is radiated into the central cylindrical shaped interaction cavity so that the light could act on a target material directly. In this manner, the travel distance of the light rays is shortened; the effective size of the light source is increased; the beam-divergence angle is reduced; and the utilization efficiency of the light source is increased. According to the invention, the device adopts an electrodeless radio frequency charge manner to excite the gas plasmas, and produces vacuum ultraviolent photons with specific wavelengths by filling different inert gases. Through the adjustment of the parameters of the gases like gas pressure, radio frequency and power, it is possible to adjust the output power of the vacuum ultraviolet light so as to meet the requirements of various applications on the light source.
Owner:PLA PEOPLES LIBERATION ARMY OF CHINA STRATEGIC SUPPORT FORCE AEROSPACE ENG UNIV
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