Surface wave plasma light source guided by quartz tube

Abstract

The invention belongs to the technical field of low-temperature plasmas, and in particular relates to a surface wave plasma light source based on guidance of a quartz tube. The quartz tube is utilized to guide microwaves, a surface wave principle is adopted to excite and ionize a working gas in the quartz tube to generate plasmas, and spectra radiated by the plasmas are used as a light source. The light source comprises a microwave system formed by a micro-solid microwave generator, a rectangular waveguide and a coupler, and a light-emitting system formed by the quartz tube, a conductive transparent film and the working gas. The light source has the advantages of simple equipment, compact structure, moderate cost and higher efficiency, and is applied to various purposes; and aiming at application requirements, different working gases can be selected to generate corresponding spectral radiance. The light source uses proper gas components only and can be used as a lighting source as well as realizes mercuration-free green lighting. Each part of the light source system can be modularized and replaced conveniently and has high stability.

Description

technical field [0001] The invention belongs to the technical field of low-temperature plasma, and in particular relates to an illuminating device for generating plasma by microwaves. Background technique [0002] A plasma is a collection of ions and electrons with an equal total number of positive and negative charges. When matter is ionized, free electrons, ions, and neutral particles will be formed. The sum of their charges is zero, which is another state of matter other than solid, liquid, and gas. Plasma can be divided into two types: high temperature and low temperature plasma. At present, low-temperature plasma is widely used in various production fields, such as: surface corrosion protection and other thin layer deposition, special ceramics (including superconducting materials), new chemical substances and materials manufacturing, polymer film preparation, hazardous waste Degradation, welding, magnetic recording materials and optical waveguide materials, preparatio...

AI Technical Summary

Problems solved by technology

[0004] At present, the reason why plasma technology has not been widely promoted and applied in the lighting industry is mainly due to the influence of factors such as complex structures, high prices, high costs, and low luminous efficiency of the devices and equipment for manufacturing and generating plasma.

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