Surface wave plasma light source guided by quartz tube

A plasma and quartz tube technology, applied in the field of plasma, can solve the problems of complex structure of devices and equipment, high cost, low luminous efficiency, etc., and achieve the effects of high scientific significance and application value, compact structure and simple equipment

Inactive Publication Date: 2012-02-08
FUDAN UNIV
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Problems solved by technology

[0004] At present, the reason why plasma technology has not been widely promoted and applied in the lighting industry is mainly due to the influence of fac

Method used

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  • Surface wave plasma light source guided by quartz tube
  • Surface wave plasma light source guided by quartz tube

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Embodiment Construction

[0015] The illumination device for generating plasma by microwaves provided by the invention includes a microwave system and a light emitting system. The light emitting system is composed of quartz tube 6 , conductive transparent film 7 (or metal shielding net) and working gas 5 . The microwave system is composed of a miniature solid-state microwave generator 1, a rectangular waveguide 2 and a coupler 3.

[0016] In the present invention, the shape of the quartz tube 6 is cylindrical and made of quartz material. The quartz tube has two front and rear bottom surfaces, both of which are sealed and closed, and the front bottom surface is connected to the coupler 3 . The role of the quartz tube 6 is to provide a certain vacuum cavity to provide the necessary working environment for the surface wave to propagate on the inner wall of the quartz tube and the gas interface and generate plasma by discharge, while the outer surface of the quartz tube is wrapped with a layer of conductiv...

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Abstract

The invention belongs to the technical field of low-temperature plasmas, and in particular relates to a surface wave plasma light source based on guidance of a quartz tube. The quartz tube is utilized to guide microwaves, a surface wave principle is adopted to excite and ionize a working gas in the quartz tube to generate plasmas, and spectra radiated by the plasmas are used as a light source. The light source comprises a microwave system formed by a micro-solid microwave generator, a rectangular waveguide and a coupler, and a light-emitting system formed by the quartz tube, a conductive transparent film and the working gas. The light source has the advantages of simple equipment, compact structure, moderate cost and higher efficiency, and is applied to various purposes; and aiming at application requirements, different working gases can be selected to generate corresponding spectral radiance. The light source uses proper gas components only and can be used as a lighting source as well as realizes mercuration-free green lighting. Each part of the light source system can be modularized and replaced conveniently and has high stability.

Description

technical field [0001] The invention belongs to the technical field of low-temperature plasma, and in particular relates to an illuminating device for generating plasma by microwaves. Background technique [0002] A plasma is a collection of ions and electrons with an equal total number of positive and negative charges. When matter is ionized, free electrons, ions, and neutral particles will be formed. The sum of their charges is zero, which is another state of matter other than solid, liquid, and gas. Plasma can be divided into two types: high temperature and low temperature plasma. At present, low-temperature plasma is widely used in various production fields, such as: surface corrosion protection and other thin layer deposition, special ceramics (including superconducting materials), new chemical substances and materials manufacturing, polymer film preparation, hazardous waste Degradation, welding, magnetic recording materials and optical waveguide materials, preparatio...

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Application Information

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IPC IPC(8): H01J63/08
Inventor 吴忠航昌锡江何龙李泽斌梁荣庆
Owner FUDAN UNIV
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