29 results about "Plasma lamp" patented technology

The LSP broadband light source may include a pump source configured to generate a pump beam and one or more collimating optical elements configured to collimate the pump beam into a collimated pump beam. The light source may include one or more focusing optical elements and a beamsplitter located at a conjugate plane between the one or more collimating optical elements and the one or more focusing optical elements. The light source may include a gas containment structure. The beamsplitter may be configured to split the collimated pump beam into a set of pump beamlets, wherein the one or more focusing optical elements are configured to focus the set of pump beamlets to a set of focus positions within the gas to generate multiple plasma regions at the different focus positions.

A multi-mirror laser sustained plasma broadband light source is disclosed.SOLUTION: The light source may include a gas containment structure for containing a gas. The light source includes a pump source 202 configured to generate pump illumination 204 and a first reflector element 206 configured to direct a portion of the pump illumination 204 into a gas to sustain a plasma. The first reflector is configured to collect a portion of the broadband light emitted from the plasma. The light source also includes one or more additional reflector elements 214 disposed opposite the first reflector. The one or more additional reflector elements 214 are configured to reflect unabsorbed pump illumination 204 and broadband light not collected by the first reflector element 206 back to the plasma.SELECTED DRAWING: Figure 2A

The invention provides a power adjusting method and device for a laser light source and a laser maintenance plasma LSP light source, and the method comprises the steps: obtaining a first power signal of the LSP light source, the first power signal being used for representing the change of the output power of the LSP light source along with the time; processing the first power signal to obtain a first jitter signal, the first jitter signal representing a periodic fluctuation characteristic of the first power signal; based on the first jitter signal, a first calibration signal is determined, and the first calibration signal and the first jitter signal are the same in amplitude and frequency and opposite in phase; and adjusting the output power of the laser light source based on the first calibration signal. The first jitter signal in the first power signal is separated to determine the first calibration signal, and the output power of the laser light source is adjusted by using the first calibration signal, so that jitter of the LSP output power caused by periodic oscillation of a flow field can be suppressed, and the stability of the output power of the LSP light source is improved.

A refillable plasma lamp assembly for laser-sustained plasma light sources is disclosed. The lamp assembly includes a transparent lamp body defining a sealed internal volume, a glass-to-metal fitting with a metal flange, and a glass-to-metal seal hermetically coupling the lamp body and fitting. The lamp flange is configured to connect to an external gas fitting for supplying and removing working gas to and from the sealed internal volume during plasma operation. The lamp body may be connected to a glass portion of the glass-to-metal fitting via a glass-to-glass connection. The lamp assembly may include a fill port for gas exchange between the lamp flange and the external gas fitting. This construction enables dynamic control of gas composition and pressure in semiconductor metrology and inspection applications. The refillable design improves safety by permitting unpressurized shipping and resists deterioration from reactive gases.

A light-emitting plasma lamp bulb for solar ultraviolet simulation includes a bulb cover having a spherical shape or a rod shape through which ultraviolet rays are transmittable, discharge gas contained in the bulb cover, and a first light-emitting material and a second light-emitting material, wherein the first light-emitting material includes at least one of mercury (Hg) and mercury iodide (HgI2), and the second light-emitting material includes sulfur (S8), wherein light emitted from the bulb has a maximum optical power intensity in a range of 395 to 455 nm which is an ultraviolet-visible boundary region, wherein, when compared using a same ultraviolet dose in an ultraviolet region of 290 to 400 nm, an integrated intensity of a visible and infrared region of 400 to 850 nm is equal to or less than ⅕ of an integrated intensity of a visible and infrared region of a standard solar spectrum (ASTM G173, AM 1.5G).

This invention relates to a high-frequency plasma light source (1), wherein, in the operating state, a quasi-capacitively coupled plasma is formed by at least two plasma anchors (6, 7), thus the plasma region with the highest energy density is spatially decoupled from the plasma anchors (6, 7). The high-frequency plasma light source (1) includes: - a pressure chamber (5) containing a gaseous medium, in the operating state, a luminescent plasma is formed within the pressure chamber; - an impedance converter (4) assembly connected to the pressure chamber (5) and including a coupling pin (8) for coupling electromagnetic waves into the high-frequency plasma light source (1) and having an internal guide... The inner conductor (9) and the outer conductor (9b) are coaxial conductors (9a) and (9b), wherein a dielectric pressure seal (13) and at least one conductive or dielectric connector (10, 12) are provided between the inner conductor (9a) and the outer conductor (9b), an inner conductor plasma anchor (6) extending into the pressure chamber (5) and electrically and mechanically connected to the inner conductor (9a) of the coaxial conductor (9), and an outer conductor plasma anchor (7) having a first end (7a) located in the pressure chamber (5) and a second end (7b) mechanically connected to the inner surface of the pressure chamber (5).

The invention provides a honeycomb rectification structure and device, a plasma light source and semiconductor equipment, the honeycomb rectification structure is applied to a laser-maintained plasma light source, the honeycomb rectification structure comprises a plurality of honeycomb units which are adjacently arranged, the honeycomb units form a channel structure used for allowing airflow to pass through, and the channel structure is used for allowing the airflow to pass through. The axial extension directions of the plurality of honeycomb units are parallel; and the heat exchange runners are arranged between the adjacent honeycomb units, allow heat exchange media to flow through and are used for absorbing heat of the honeycomb units. The honeycomb rectifying device comprises the honeycomb rectifying structure. And the heat exchange circulation system is connected with the heat exchange flow channel of the honeycomb rectification structure and used for driving the heat exchange medium to circularly pass through the heat exchange flow channel and discharging heat of the heat exchange medium.

This application relates to the field of semiconductor technology, and in particular to a laser-suppressed plasma source and its adjustment and control method and semiconductor device. The laser-suppressed plasma source includes a controller and a laser generator, a beam shaping unit, a discharge lamp chamber, a beam collecting unit and a detection unit arranged sequentially along the optical path. The controller is connected to the detection unit. The beam shaping unit includes an adjustment mechanism and an optical mechanism. The adjustment mechanism is connected to the controller. The optical mechanism includes at least one optical module. The adjustment mechanism is drivenly connected to at least one optical module. Since the detection unit can acquire the coupling power of the illumination beam in real time and feed the coupling power back to the controller, the controller dynamically generates control commands based on the coupling power and controls the adjustment mechanism to precisely adjust the position of the optical module. This allows the coupling power to be maintained near its maximum value, significantly improving the coupling power.

The utility model discloses a plasma light source radiator, which relates to the technical field of plasma light sources, and adopts the specific scheme that a flow guide channel penetrates through the inside of a light source body, a high-heat-conduction radiating shell is sleeved outside the light source body, dense radiating fins are integrally formed on the surface of the shell, and a fan and a temperature sensor are arranged at the top of the shell. The flow guide channel is additionally arranged in the light source and matched with the driving fan to forcibly flow airflow, so that the airflow accurately penetrates through a core heating area, and heat is rapidly taken away; meanwhile, the temperature sensor is in linkage with the fan to start and stop, pure fin heat dissipation is automatically switched to when the load is low, the energy-saving requirement is met, the use requirement of an existing high-power plasma light source can be met, and the service life is prolonged.

A high-power vacuum ultraviolet laser-sustained broadband plasma light source is disclosed. The light source includes a laser pump source to sustain a plasma within a gas chamber assembly. The gas chamber assembly includes a gas chamber and a laser input for directing a laser pump beam into a plasma region and a laser output for transmitting unabsorbed laser pump light outside the chamber. The gas chamber assembly includes one or more broadband output windows. The gas chamber assembly includes one or more transparent nozzles configured to direct gas flow into the plasma region and transmit the one or more laser pump beams to the plasma region. The gas chamber assembly includes one or more transparent cones configured to shield one or more optical collection paths from gas flow. The gas chamber assembly includes gas inlets and outlets for maintaining gas flow through the plasma region.

A method of forming a high pressure plasma lamp includes providing a lamp bulb. The lamp bulb includes an upper channel and a lower channel. The method includes inserting an upper electrode element into the upper channel of the lamp bulb. The method includes providing a glass tubular structure attached to a lower electrode element. The method includes filling the lamp bulb with a liquefied gas via the lower channel of the lamp bulb. The method includes inserting the lower electrode element and the glass tubular structure into the lower channel.

A laser-sustained broadband light source is disclosed. The light source may include a gas containment structure containing a mixture 103 of a first noble gas and a second noble gas. The light source may include a laser pump source 106 for generating an optical pump 108 to sustain a plasma 112 within the gas containment structure. The first noble gas absorbs broadband light 113a within a first wavelength band and a second wavelength band. The light source may include a filter 104 located within the gas containment structure and configured to absorb broadband light 113b emitted by the plasma having wavelengths below a selected wavelength threshold. Absorption of the broadband light 113b by the first noble gas and the filter 104 provides long-pass filtering of the broadband light below the selected wavelength to protect one or more downstream optical elements from damage.

The invention provides a generation method and device of a laser-maintained plasma light source and semiconductor equipment, and the generation method comprises the following steps: injecting a first gas into a discharge chamber irradiated by laser to generate plasma; after it is determined that the plasma is ignited and enters the maintaining stage, second gas is injected into the discharge cavity to generate laser maintaining plasma meeting preset conditions; the ionization energy of the first gas is smaller than that of the second gas. By adopting the generation method of the laser maintenance plasma light source provided by the invention, the success rate that the second gas with high ionization energy is excited and ignited is improved, meanwhile, the starting voltage and the maintenance power of the generation device are reduced, the service lives of a bulb, an electrode and other elements in the discharge chamber are prolonged, and the circuit safety is improved; and instability, arc discharge or plasma shrinkage caused by electric field concentration are avoided, so that the laser maintains the stability and uniformity of a plasma generation process.

The application provides a high-voltage ignition long-life wide-spectrum plasma lamp, relates to the field of radio frequency microwave plasma light source, wherein an external high-voltage module is used to output a high-voltage pulse signal, the high-voltage pulse signal is input to two ends of the top of a lamp bulb, the high-voltage module generates a high-voltage ignition signal through discharge, gas in the lamp bulb is broken down to generate initial plasma, a microcontroller controls a radio frequency microwave power signal source to output radio frequency microwave energy, a high-intensity electric field is generated through a resonant cavity to maintain plasma discharge, and the microcontroller maintains the discharge by means of the radio frequency microwave energy after the high-voltage ignition signal is removed; the signal of the radio frequency microwave power signal source is adjusted to control the plasma arc distribution through the electric field, so that the arc center gradually moves from between the electrodes to the end of the resonant cavity and away from the electrodes. The application uses the radio frequency microwave mode to excite discharge, improves the system light emitting efficiency and output light power of the wide-spectrum light source, avoids the contact between the lamp bulb electrode and the plasma, reduces light attenuation, and prolongs the service life.

This invention discloses a high color rendering index (Ra) and long lifespan magnetic ring-coupled plasma light source and its preparation method. The light source is an electrodeless source, comprising a bulb shell, an inorganic ceramic protective layer, a luminescent filler encapsulated inside the bulb shell, a mixed buffer gas, and a magnetic ring coupler fitted outside the bulb shell. The luminescent filler contains sulfur (S), selenium (Se), rare earth triiodine compounds, alkali metal bromine compounds, and alkali metal iodine compounds. The mixed buffer gas is a mixture of argon (Ar) and krypton (Kr) or argon (Ar) and xenon (Xe). The preparation method includes five steps: bulb shell pretreatment, inorganic ceramic protective layer preparation, luminescent filler filling, vacuuming and gas filling, and fusion sealing. This invention achieves ultra-high color rendering indexes (Ra>95, R9>90) by optimizing the luminescent formula and structural design. It contains no toxic substances and meets environmental standards, solving the technical pain points of poor color rendering, short lifespan, and insufficient environmental friendliness of traditional plasma light sources.

The invention discloses a separated collecting mirror for a plasma light source system and a manufacturing method thereof, and belongs to the technical field of plasma light sources, the separated collecting mirror comprises a plurality of fan-shaped plane mirror units and a circular plane mirror, the circular plane mirror is arranged at the central position, and the plurality of fan-shaped plane mirror units are arranged around the circular plane mirror; the fan-shaped angles of the fan-shaped plane mirror units are designed in a matched mode according to the light-emitting taper angle of the plasma light source, and the spliced separated collecting mirror keeps the consistent reflection light collecting effect within the whole clear aperture range. The manufacturing method comprises the steps of wedge angle processing of the fan-shaped plane mirror units, outer arc processing, inner arc transition processing, preparation of the central circular plane mirror, fine polishing processing of the lens, a reflecting surface coating process, lens assembling arrangement and clamping fixation. According to the invention, the plurality of fan-shaped plane mirrors form an integral reflecting surface, so that the processing difficulty of a single lens unit can be reduced, and the uniformity of a film layer can be improved through sub-unit film coating.

The invention relates to the field of semiconductors, in particular to a plasma light source and semiconductor equipment. The plasma light source comprises a laser module used for emitting one or more laser beams; the optical shaping module is used for shaping the one or more laser beams, so that the laser beams form a plurality of laser spots in the plasma container, and each laser spot is used for forming and maintaining a plasma core; the light source collection module is used for acquiring and outputting radiation light emitted by the plurality of plasma cores; the control module is used for acquiring an oscillation signal of a plasma flow field in the plasma container and adjusting the laser module and / or the optical shaping module when the oscillation signal reflects that the plasma flow field is not in a steady state so as to adjust the distance between the at least two plasma cores and / or the size of at least one plasma core; therefore, the plasma flow field is in a steady state. The stability of the output power of the plasma light source can be improved.

The invention discloses a plasma light source system and method for laser and electric field coupling energy injection, and relates to the technical field of plasma light sources. Wherein the laser system generates laser and focuses the laser to the plasma light source, and energy is injected into the plasma light source through the laser; voltage is applied to the plasma light source generator, the plasma light source is lightened, and energy is injected into the plasma light source through an electric field. Through laser and electric field coupling energy injection, the energy injection efficiency of the plasma light source is improved, energy waste is reduced, and the service life of the plasma light source is remarkably prolonged.

The invention provides a laser-driven plasma light source device and a control method thereof, and relates to the technical field of plasma light sources, the laser-driven plasma light source device comprises a laser module, a dichroic mirror, an adaptive mirror and a xenon lamp module; the laser module is used for emitting near-infrared laser; the dichroic mirror is positioned on an emission light path of the laser module and is used for transmitting the near-infrared laser to the adaptive mirror; the self-adaptive mirror is located on a transmission light path of the dichroic mirror, the self-adaptive mirror comprises a reflector array, the angle and the direction of each reflector are adjustable, and the self-adaptive mirror is used for receiving the laser transmitted by the dichroic mirror and reflecting and converging the laser to the centers of the positive electrode and the negative electrode of the xenon lamp module so as to excite the plasma; and the collimator is also used for collimating the light beam excited by the xenon lamp module and reflecting the light beam to the dichroic mirror, and the light beam is reflected to the light outlet through the dichroic mirror. The laser focusing position can be changed by adjusting the angle and the direction of each reflecting mirror, the laser excitation efficiency is improved, and finally the light emitting performance of the wide-spectrum light source is improved.

A laser generated plasma (LPP) light source includes a rotating target assembly (2) that supplies a target (3) together with a focused beam of high repetition frequency pulsed laser light into an interaction zone (4). The light source is efficiently cooled by thermal radiation of the peripheral portion of the rotating target assembly and by blowing gas through a serpentine gap (16) between the rotating target assembly (2) and the stationary heat exchanger (17). This achieves high brightness and high output power of the LPP light source.

A high-power vacuum ultraviolet laser-sustained broadband plasma light source is disclosed. The light source includes a laser pump source to sustain a plasma within a gas chamber assembly. The gas chamber assembly includes a gas chamber and a laser input for directing a laser pump beam into a plasma region and a laser output for transmitting unabsorbed laser pump light outside the chamber. The gas chamber assembly includes one or more broadband output windows. The gas chamber assembly includes one or more transparent nozzles configured to direct gas flow into the plasma region and transmit the one or more laser pump beams to the plasma region. The gas chamber assembly includes one or more transparent cones configured to shield one or more optical collection paths from gas flow. The gas chamber assembly includes gas inlets and outlets for maintaining gas flow through the plasma region.

The invention provides a laser maintenance plasma light source and a spectrum regulation and control method thereof, which can be applied to the technical field of optical detection. The light source comprises a laser, a discharge chamber, a gas control system, a vacuum control system and a spectrum regulation and control system, the laser is used for emitting laser beams; gas is introduced into the discharge chamber, and the gas maintains a plasma form under the action of the laser beam so as to generate radiation light; the gas control system is used for introducing gas into the discharge chamber; the vacuum control system is used for vacuumizing the discharge chamber; and the spectrum regulation and control system is used for controlling the laser power output by the laser, controlling the component and the air pressure of the gas introduced into the discharge chamber by the gas control system, and controlling the gas pumping speed of the discharge chamber by the vacuum control system. According to the application, the active regulation and control and optimization of the light source spectrum are realized by jointly regulating the components and the gas pressure of the gas in the discharge cavity and the laser power of the laser.

This invention discloses a plasma light source device, relating to the field of optical equipment technology. The light-emitting center of the plasma generator is located within a non-focal tolerance region, which surrounds a first focal point. An ellipsoidal receiver is configured to reflect laser light towards the plasma generator and to reflect the plasma beam to form a reflected beam converging towards a second focal point. A first shaping component is located downstream of the second focal point and configured to shape the reflected beam. Thus, by placing the light-emitting center of the plasma generator within a non-focal tolerance region surrounding the first focal point and placing the first shaping component downstream of the second focal point, the second focal point can be prevented from being the final light-emitting end. Furthermore, the first shaping component can redistribute energy and perform numerical aperture shaping on the reflected beam, thereby reducing the impact of plasma position drift on the output light and improving the stability of the plasma light source device's output.

A refillable plasma lamp assembly for laser-sustained plasma light sources is disclosed. The lamp assembly includes a transparent lamp body defining a sealed internal volume, a glass-to-metal fitting with a metal flange, and a glass-to-metal seal hermetically coupling the lamp body and fitting. The lamp flange is configured to connect to an external gas fitting for supplying and removing working gas to and from the sealed internal volume during plasma operation. The lamp body may be connected to a glass portion of the glass-to-metal fitting via a glass-to-glass connection. The lamp assembly may include a fill port for gas exchange between the lamp flange and the external gas fitting. This construction enables dynamic control of gas composition and pressure in semiconductor metrology and inspection applications. The refillable design improves safety by permitting unpressurized shipping and resists deterioration from reactive gases.

Example phototherapy systems, methods of using a phototherapy system, and methods of manufacturing a phototherapy system are described. An example phototherapy system includes a handle and a phototherapy light source. The phototherapy light source is attached to the handle, adapted to emit a light in a therapeutic wavelength, and includes a plasma lamp. The plasma lamp can be disposed between sheets of transparent material, including quartz. The phototherapy light source can be adapted to emit a light in a UVB wavelength between about 300 nanometers and about 320 nanometers and can have an output of between about 15 mW / cm2 and about 21 mW / cm2.

The invention discloses a laser maintaining plasma light source and a temperature adjusting method and an air flow adjusting device thereof, and relates to the technical field of plasma light sources, the laser maintaining plasma light source comprises a bulb shell and the air flow adjusting device, and the air flow adjusting device comprises an air blowing hole, a valve and a flow guide assembly, the method includes: acquiring temperature distribution of each area on the surface of a bulb shell; judging whether the temperature distribution meets a preset condition or not; if not, the air flow and the air flow direction of cooling air flow are determined; the opening degree of the valve is adjusted according to the air flow, and the direction of the flow guide assembly is adjusted according to the air flow direction, so that the surface temperature of the bulb shell is adjusted. Therefore, the air flow and the air flow direction of the cooling air flow can be determined according to the temperature distribution of all areas on the surface of the bulb shell, the air flow and the blowing direction of the cooling air flow on the surface of the bulb shell can be flexibly controlled by combining the opening degree of the valve and the direction of the flow guide assembly, the surface temperature of the bulb shell can be effectively adjusted, and the problem of uneven temperature is solved.

The invention provides a high-voltage ignited long-life wide-spectrum plasma lamp, and relates to the field of radio frequency microwave plasma light sources, an external high-voltage module is adopted to output a high-voltage pulse signal, the high-voltage pulse signal is input to two ends of the top of a bulb, the high-voltage module discharges to generate a high-voltage ignition signal, gas in the bulb is broken down, and initial plasma is generated; the microcontroller controls the radio frequency microwave power signal source to output radio frequency microwave energy, a high-intensity electric field is generated through the resonant cavity, plasma discharge is maintained, and after the microcontroller removes a high-voltage ignition signal, discharge is maintained by means of the radio frequency microwave energy; signals of the radio frequency microwave power signal source are adjusted, plasma arc distribution is controlled through an electric field, and the arc center gradually moves from the position between the electrodes to the resonant cavity end and leaves the electrodes. Discharge is excited in a radio frequency microwave mode, the system luminous efficiency and the output light power of the wide-spectrum light source are improved, meanwhile, the bulb electrode is prevented from making contact with plasma, light attenuation is reduced, and the service life is prolonged.

An LSP broadband light source is disclosed. The LSP broadband light source may include a pump source configured to generate a pump beam and one or more collimating optical elements configured to collimate the pump beam into a collimated pump beam. The light source may include one or more focusing optical elements and a beamsplitter located at a conjugate plane between the one or more collimating optical elements and the one or more focusing optical elements. The light source may include a gas containment structure. The beamsplitter may be configured to split the collimated pump beam into a set of pump beamlets, wherein the one or more focusing optical elements are configured to focus the set of pump beamlets to a set of focus positions within the gas to generate multiple plasma regions at the different focus positions.