Ultraviolet lamp system and method
A technology of ultraviolet radiation and relationship, applied in the field of ultraviolet lamp system, can solve problems such as reducing the life of plasma lamp, and achieve the effect of reducing microwave energy
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[0017] The invention relates to a microwave-excited UV lamp system configured to uniformly irradiate a substrate located in a microwave chamber processing space with UV radiation. In the present invention, the substrate is positioned in the process volume close to a microwave-excited plasma lamp to increase the intensity of the ultraviolet radiation. In addition, the present invention incorporates a reflector which is capable of providing relatively uniform illumination in a surrounding relationship with respect to the substrate - or around the substrate. In addition, the present invention separates the substrates with a UV transmissive conduit, which can supply fragile substrates and provide sufficient airflow to cool the microwave generator and plasma lamp. Additionally, the present invention allows substrates to enter the microwave chamber and travel through the process volume without actual leakage of microwaves from the chamber. In addition, the well-defined relative pos...
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