Three-electrode discharge device for generating large-volume atmosphere pressure plasma

Abstract

The invention relates to a three-electrode discharge device for generating a large-volume atmosphere pressure plasma. The device comprises a coaxial medium tube, a grounding flat hydropower pole, a tungsten needle electrode and a low temperature plasma generator power source, wherein the coaxial medium tube is a double-layer tubular sealed container having an axial center inner-cavity and a U-shaped section, and the side wall of the sealed container is provided with an air inlet used for filling working air; the tungsten needle electrode is inserted from the seal end of the coaxial medium tube into a center inner-cavity of the coaxial medium tube, the front end of the tungsten needle electrode is positioned at the open end of the center inner-cavity of the coaxial medium tube, and the back end of the tungsten needle electrode is connected with an output electrode of the low temperature plasma generator power source; and the grounding flat hydropower pole is positioned on the outer side of the open end of the coaxial medium tube, and is electrically connected with a grounding electrode of the low temperature plasma generator power source. The device can be used in the technical fields of plasma lamp and plasma display manufacturing, plasma film generation, plasma surface modification and the like, and can be used for generation of ozone, treatment for waste water and exhaust gas, sterilization and disinfection, plasma stealth and the like.

Description

technical field [0001] The invention relates to a gas discharge device, in particular to a three-electrode discharge device for generating large-volume atmospheric pressure plasma. Background technique [0002] Atmospheric pressure plasma has become a hotspot in the research and application of low temperature plasma. At present, conventional methods for generating low-temperature plasma under atmospheric pressure include: corona discharge, arc discharge, dielectric barrier discharge, and spray gun. The disadvantages of these generation methods are: the plasma generated by corona discharge is weak and thin and has low efficiency, which is not suitable for large-scale industrial applications; the plasma energy density generated by arc discharge is high, but it requires higher energy density. At the same time, the generated plasma is in a thermal equilibrium state, and the gas temperature is very high, so it is easy to damage the workpiece; the discharge area of ​​the dielectr...

AI Technical Summary

Problems solved by technology

[0003] The object of the present invention is to provide a three-electrode discharge device for generating large-volume atmospheric-pressure plasma, so as to solve the problem of small volume of low-temperature plasma produced by conventional methods

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