System and method for transverse pumping of laser-sustained plasma

A plasma and pumping technology, applied in the field of plasma, can solve problems such as plasma instability

Active Publication Date: 2016-11-23
KLA TENCOR CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Furthermore, once a given plasma grows into the region of

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  • System and method for transverse pumping of laser-sustained plasma
  • System and method for transverse pumping of laser-sustained plasma
  • System and method for transverse pumping of laser-sustained plasma

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Embodiment Construction

[0022] Reference will now be made in detail to the disclosed subject matter that is illustrated in the accompanying drawings.

[0023] general reference Figures 1B to 1R , a system and method for lateral pumping of a laser sustained plasma (LSP) is described in accordance with one or more embodiments of the present invention. Embodiments of the present invention are directed to the lateral delivery of pump illumination to a light-sustained plasma. Additional embodiments of the present invention are directed to defocusing the pump beam in order to provide larger volume plasma pumping.

[0024] It will be appreciated that for stable LSP operation the pump illumination must penetrate the volume of the plasma and form a high intensity region of the pump illumination close to the focus of the illumination. As the laser light penetrates the plasma and travels to the focal point, it is partially absorbed by the plasma. It should be noted here that the degree of plasmonic absorpti...

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Abstract

A laser-sustained plasma light source for transverse plasma pumping includes a pump source configured to generate pumping illumination, one or more illumination optical elements and a gas containment structure configured to contain a volume of gas. The one or more illumination optical elements are configured to sustain a plasma within the volume of gas of the gas containment structure by directing pump illumination along a pump path to one or more focal spots within the volume of gas. The one or more collection optical elements are configured to collect broadband radiation emitted by the plasma along a collection path. Further, the illumination optical elements are configured to define the pump path such that pump illumination impinges the plasma along a direction transverse to a direction of propagation of the emitted broadband light of the collection path such that the pump illumination is substantially decoupled from the emitted broadband radiation.

Description

[0001] Related Application Cross Reference [0002] This application is asserted under 35 U.S.C. §119(e) filed April 1, 2014 and is entitled "LASER-SUSTAINED PLASMA (LSP) TRANSVERSE PUMPGEOMETRIES", The inventors are Ilya Bezel, Anatoly Shchemelinin, Richard Solarz, and Sebaek Oh in the benefit of US Provisional Application No. 61 / 973,266, which is incorporated herein by reference in its entirety. technical field [0003] The present invention relates generally to plasma-based light sources, and more particularly to plasmas formed by transverse laser pumping. Background technique [0004] The need for improved illumination sources for characterizing ever-shrinking integrated circuit device features continues to grow. One such illumination source includes a laser sustained plasma (LSP) source. Laser-sustained plasma sources are capable of producing high-power broadband light. Laser-sustained light sources operate by focusing laser radiation into a volume of gas in order t...

Claims

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Application Information

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IPC IPC(8): H01J63/08H01J61/28
CPCH01J61/025H01J61/302H01J65/042H05G2/001H05G2/008H05G2/003
Inventor I·贝泽尔A·谢梅利宁R·索拉兹S·吴M·德斯泰恩
Owner KLA TENCOR CORP
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