The invention discloses a wide-spectrum high-uniformity
black silicon integrated nanogold quadrant
detector and a preparation method thereof, the wide-spectrum high-uniformity
black silicon integrated nanogold quadrant
detector comprises a substrate base material, a micro-nano conical B-Si structure is etched on the substrate base material, gold nanoparticles are deposited and covered on the surface of the micro-nano conical B-Si structure, the photoelectric
detector is a double-four-quadrant photoelectric detector, and the thickness of the double-four-quadrant photoelectric detector is larger than that of the micro-nano conical B-Si structure. And the boundary area of the double
four quadrants is electrically isolated by
etching deep grooves and filling
oxygen-
silicon compounds to form isolation grooves. The gold nanoparticles are compounded on the surface of B-Si,
hot electrons can be excited through a localized surface
plasma resonance mechanism and injected into a
black silicon conduction band to participate in the
photoelectric conversion process, the
band gap limitation of the B-Si material is broken through, wide
spectral response is achieved, the response capability in a near-
infrared region is improved, and the
photoelectric conversion efficiency is improved. And meanwhile, a
silicon oxide and
silicon nitride passivation film is introduced to the surface of the black silicon and gold
nanoparticle composite structure, and a surface carrier recombination process is inhibited by filling dangling bonds and defect states on the surface of the black silicon pointed cone structure, so that the
dark current level of the device is reduced.