The invention discloses a method and product for improving microchannel plate soft X-
ray-
extreme ultraviolet ray imaging performance. The method includes the steps that gaseous
aluminium trimethide serves as an aluminum source, gaseous deionized water servers as an
oxygen source, high-purity
nitrogen serves as carrier gas and cleaning gas, an atom layer deposition
system is utilized, and an aluminum
oxide film is deposited on a square-hole microchannel plate made of lead-
bismuth glass; and
solid iridium acetylacetonate serves as an
iridium source,
metal iridium reduction is conducted with high-purity
oxygen as an
oxygen source, the high-purity
nitrogen serves as the carrier gas and the cleaning gas, the atom layer deposition
system is utilized, and the iridium film is deposited. Compared with an untreated microchannel plate, according to an aperture inner wall reflection increasing film of the square-hole microchannel plate manufactured through the method, the iridium serves as the
metal reflection increasing film, and reflection efficiency is improved remarkably, so that the
light intensity efficiency of the microchannel plate in the soft X-
ray-
extreme ultraviolet waveband imaging process can be improved effectively. By means of the method, the performance of the square-hole microchanel plate is improved, and application of the microchannel plate in a
grazing incidence imaging
system such as an X-ray
telescope is further promoted.