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Method for making gas electron multiplier polymer film grid

A technology of gas electron multiplication and polymer film, which is applied in the field of X-ray detection and can solve the problems of high equipment requirements, impact, and high price

Inactive Publication Date: 2004-11-17
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Because lithography technology has high requirements on equipment and is expensive, the actual use is affected

Method used

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  • Method for making gas electron multiplier polymer film grid
  • Method for making gas electron multiplier polymer film grid

Examples

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Embodiment Construction

[0014] figure 2 It is a schematic diagram of an embodiment of the present invention. 308nm excimer laser 1 passes through the attenuator 2 and the fly-eye homogenizer 3, passes through the converging lens 4, and irradiates the polyimide (PI) film 6 coated with copper film on both sides, which is one piece before the PI film 6 The microhole array mask plate 5 obtained by drilling holes with a YAG laser. The microhole size of the microhole array 5 is 70 μm, the hole spacing is 140 μm, and the mask plate thickness is 70 μm. The PI film is 50 μm thick, and each side is coated with 10 μm copper film. The effective spot size irradiated on the PI thin film 6 is 3.5mm×3.5mm, the laser single pulse energy is 120mJ, and the working frequency is 10Hz.

[0015] Microwell grids of any size can be obtained by scanning the x-y platform.

[0016] Actually what we make is a grid of 20mm×20mm.

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Abstract

The invention is a manufacturing method for gas electron multiplier polymers film mesh applied to the X ray detection. The invention uses 308nm norm molecular laser to irradiate the polyimide (PI) coated with red copper film at the two surfaces, the micro-aperture mesh are formed on the PI film by using the effect of the micro-aperture array mask board attached on the PI film. The mesh with any size can be acquired with X-Y scanning platform. The invention produces the gas electron multiplier polymer film mesh can be acquired by using 308nm norm molecular laser poring method. It is simple and effective.

Description

Technical field: [0001] The invention relates to X-ray detection, in particular to a manufacturing method of a polymer film grid applied to a gas electron multiplier for X-ray detection. Background technique: [0002] Gas Electron Multipliers (GEM) such as figure 1 As shown, its main component is the polymer film mesh. At present, the method of making polymer film grid mainly adopts photolithography technology. Because lithography technology has high requirements on equipment and is expensive, the actual use is affected. Invention content: [0003] The technical problem to be solved by the present invention is to overcome the shortcomings of the prior art and provide a simple and practical method for manufacturing the polymer film grid of the gas electron multiplier. [0004] Technical solution of the present invention: [0005] A method for manufacturing a gas electron multiplier polymer film grid, characterized in that the essence of the method is to use a 308nm exci...

Claims

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Application Information

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IPC IPC(8): G01T1/28H01J9/00H01J43/04
Inventor 叶震寰楼祺洪魏运荣董景星汪琳
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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