Method and product for improving microchannel plate soft X-ray-extreme ultraviolet ray imaging performance

Abstract

The invention discloses a method and product for improving microchannel plate soft X-ray-extreme ultraviolet ray imaging performance. The method includes the steps that gaseous aluminium trimethide serves as an aluminum source, gaseous deionized water servers as an oxygen source, high-purity nitrogen serves as carrier gas and cleaning gas, an atom layer deposition system is utilized, and an aluminum oxide film is deposited on a square-hole microchannel plate made of lead-bismuth glass; and solid iridium acetylacetonate serves as an iridium source, metal iridium reduction is conducted with high-purity oxygen as an oxygen source, the high-purity nitrogen serves as the carrier gas and the cleaning gas, the atom layer deposition system is utilized, and the iridium film is deposited. Compared with an untreated microchannel plate, according to an aperture inner wall reflection increasing film of the square-hole microchannel plate manufactured through the method, the iridium serves as the metal reflection increasing film, and reflection efficiency is improved remarkably, so that the light intensity efficiency of the microchannel plate in the soft X-ray-extreme ultraviolet waveband imaging process can be improved effectively. By means of the method, the performance of the square-hole microchanel plate is improved, and application of the microchannel plate in a grazing incidence imaging system such as an X-ray telescope is further promoted.

Description

technical field [0001] The invention belongs to the field of optical imaging devices manufactured by micro-nano technology, and specifically relates to a method and a product for improving the soft X-ray-extreme ultraviolet imaging performance of a square hole microchannel plate as a plate by using atomic layer deposition technology. Background technique [0002] Microchannel plate (MCP) is a special optical fiber device, which is an electron multiplier with high spatial resolution and enhanced electron image function. It has the advantages of small size, light weight, high gain, good resolution, low noise and strong radiation resistance. Generally, we add an electron emission layer during the production of microchannel plate, which can multiply the energy of electrons colliding with the inner wall (channel) at high speed, so that it can increase the flow of electrons by more than 10,000 times. Taking advantage of this feature, microchannel plates are now widely used in pho...

AI Technical Summary

Problems solved by technology

[0008] The invention provides a method for improving the imaging performance of square-hole microchannel plates in the soft X-ray and extreme ultraviolet bands by using atomic layer deposition technology, so as to solve the problems of channel inner wall defects of modern microchannel plates and low reflectivity to soft X-rays. In order to obtain a layer of inner wall coating with uniform thickness, stable performance, smooth surface and light reflection characteristics for soft X-rays and extreme ultraviolet bands

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