106 results about "Quadrupole field" patented technology

The present invention relates to an apparatus and method for focusing, separating, and detecting gas-phase ions using the principles of quadrupole fields, substantially at or near atmospheric pressure. Ions are entrained in a concentric flow of gas and travel through a high-transmission element into a RF / DC quadrupole, through a second high-transmission element, and then impact on an ion detector, such as a faraday plate; or through an aperture with subsequent identification by a mass spectrometer. Ions with stable trajectories pass through the RF / DC quadrupole while ions with unstable trajectories drift off-axis collide with the rods and are lost. Embodiments of this invention are devices and methods for focusing, separating and detecting gas-phase ions without the need for a vacuum chamber when coupled to atmospheric ionization sources.

A method and apparatus for manipulating ions using a two-dimensional substantially quadrupole field, and a method of manufacturing an apparatus for manipulating ions using a two-dimensional substantially quadrupole field are described. The field has a quadrupole harmonic with amplitude A2, an octopole harmonic with amplitude A4, and higher order harmonics with amplitudes A6 and A8. The amplitude A8 is less than A4. The A4 component of the field is selected to improve the performance of the field with respect to ion selection and ion fragmentation. The selected A4 component can be added by selecting a degree of asymmetry under a 90° rotation about a central axis of the quadrupole. The degree of asymmetry is selected to be sufficient to provide the selected A4 component.

A magnetic levitation system for supporting an object against gravity by a supporting force includes a permanent-magnet dipole aligned in a vertical position and coupled to the object, a supporting-field generator and a stabilization system. The supporting-field generator generates a supporting force on the permanent-magnet dipole via a supporting field. The supporting field is a two-dimensional or three-dimensional magnetic quadrupole field so that the supporting force is independent of a position of the dipole. The stabilization system constrains the dipole against movements in at least one horizontal direction, and includes a diamagnetic element coupled to the dipole and arranged below the dipole, and a stabilizing-field generator generating a second two-dimensional or three-dimensional stabilizing field to restore said diamagnetic element to a position where the field strength of the stabilizing field has a local minimum.

A method and apparatus satisfying growing demands for improving the precision of angle of incidence of implanting ions that impact a semiconductor wafer and the precision of ribbon ion beams for uniform doping of wafers as they pass under an ion beam. The method and apparatus are directed to the design and combination together of novel magnetic ion-optical transport elements for implantation purposes. The design of the optical elements makes possible: (1) Broad-range adjustment of the width of a ribbon beam at the work piece; (2) Correction of inaccuracies in the intensity distribution across the width of a ribbon beam; (3) Independent steering about both X and Y axes; (4) Angle of incidence correction at the work piece; and (5) Approximate compensation for the beam expansion effects arising from space charge. In a practical situation, combinations of the elements allow ribbon beam expansion between source and work piece to 350 millimeter, with good uniformity and angular accuracy. Also, the method and apparatus may be used for introducing quadrupole fields along a beam line.

The present invention is concerned with an ion analysis apparatus for conducting differential ion mobility analysis and mass analysis. In embodiments, the apparatus comprises a differential ion mobility device in a vacuum enclosure of a mass spectrometer, located prior to the mass analyser, wherein the pumping system of the apparatus is configure to provide an operating pressure of 0.005 kPa to 40 kPa for the differential ion mobility device, and wherein the apparatus includes a digital asymmetric waveform generator that provides a waveform of frequency of 50 kHz to 25 MHz. Examples demonstrate excellent resolving power and ion transmission. The ion mobility device can be a multipole, for example a 12-pole and radial ion focusing can be achieved by applying a quadrupole field to the device in addition to a dipole field.

A method and apparatus for manipulating ions using a two-dimensional substantially quadrupole field, and a method of manufacturing and operating an apparatus for manipulating ions using a two-dimensional substantially quadrupole field are described. The field has a quadrupole harmonic with amplitude A2 and a hexapole harmonic with amplitude A3. The amplitude A3 of the hexapole component of the field is selected to improve the performance of the field with respect to ion selection and ion fragmentation.

The present invention relates to an apparatus and method for focusing, separating, and detecting gas-phase ions using the principles of electrohydrodynamic quadrupole fields at high pressures, at or near atmospheric pressure. Ions are entrained in a concentric flow of gas and travel through a high-transmission element into a RF / DC quadrupole, exiting out of the RF / DC quadrupole, and then impacting on an ion detector, such as a faraday plate; or through an aperture or capillary tube with subsequent identification by a mass spectrometer. Ions with stable trajectories pass through the RF / DC quadrupole while ions with unstable trajectories drift off-axis collide with the rods and are lost. Alternatively, detection of ions with unstable trajectories can be accomplished by allowing the ions to pass through the rods and be detected by an off-axis detector. Embodiments of this invention are devices and methods for focusing, separating, and detecting gas-phase ions at or near atmospheric pressure, when coupled to mass spectrometers.

A mass spectrometer having an elongated rod set, and a method of operating same. The rod set has an entrance end, an exit end and a longitudinal axis. Ions are admitted into the entrance end of the rod set. At least some of the ions are trapped in the rod set by producing a barrier field at an exit member adjacent to the exit end of the rod set and by producing an RF field between the rods of the rod set adjacent at least the exit end of the rod set. The RF and barrier fields interact in an extraction region adjacent to the exit end of the rod set to produce a fringing field. Ions in the extraction region are energized to mass selectively eject at least some ions of a selected mass to charge ratio axially from the rod set past the barrier field. The RF field is a two-dimensional substantially quadrupole field having a quadrupole harmonic with amplitude A2, an octopole harmonic with amplitude A4, and a hexadecapole harmonic with amplitude A8. A8 is less than A4, and A4 is greater than 0.1% of A2.

Electron-optical rotationally symmetrical lenses inevitably suffer from chromatic aberration which often determines the resolution limit at low acceleration voltages. This lens defect cannot be eliminated by compensation by means of rotationally symmetrical fields. In order to improve the resolution nevertheless, it has already been proposed to correct the chromatic aberration by means of a corrector (28) provided with two correction elements (34, 40). Each correction element consists of a number of quadrupole fields. Using the known corrector, it has been found that the chromatic magnification error is inadmissibly high. In order to solve this problem, the correction elements in the corrector according to the invention are provided with at least five layers of electrodes (60-a, 60-b, 60-c, 60-d) which produce quadrupole fields. Because of the strong periodicity of the electron paths in the correcting quadrupole fields, the chromatic magnification error is limited sufficiently (or even reduced to zero) so as to allow the use of the corrector for practical purposes.

A method and apparatus for manipulating ions using a two-dimensional substantially quadrupole field, and a method of manufacturing and operating an apparatus for manipulating ions using a two-dimensional substantially quadrupole field are described. The field has a quadrupole harmonic with amplitude A2 and a hexapole harmonic with amplitude A3. The amplitude A3 of the hexapole component of the field is selected to improve the performance of the field with respect to ion selection and ion fragmentation.

Electron-optical rotationally symmetrical lenses inevitably suffer from spherical and chromatic aberration which often impose a limit on the resolution. These lens defects cannot be eliminated by compensation by means of rotationally symmetrical fields. In order to enhance the resolution nevertheless, it has already been proposed to correct the spherical aberration by means of a correction device provided with two hexapoles (24, 26) and two rotationally symmetrical transmission lens systems (28, 30). Each transmission lens system in the known correction device consists of two lenses. According to the invention, one or both transmission lens systems can be replaced by a respective system (46) of four quadrupoles (48, 50, 52, 54), without the correction capability being reduced or only hardly so. If the two central quadrupoles (50, 52) of the quadrupole system (46) forming part of the correction device (22) are also arranged to produce electric quadrupole fields, the chromatic aberration of the lens to be corrected can also be corrected.

The present invention is concerned with an ion analysis apparatus for conducting differential ion mobility analysis and mass analysis. In embodiments, the apparatus comprises a differential ion mobility device in a vacuum enclosure of a mass spectrometer, located prior to the mass analyzer, wherein the pumping system of the apparatus is configure to provide an operating pressure of 0.005 kPa to 40 kPa for the differential ion mobility device, and wherein the apparatus includes a digital asymmetric waveform generator that provides a waveform of frequency of 50 kHz to 25 MHz. Examples demonstrate excellent resolving power and ion transmission. The ion mobility device can be a multipole, for example a 12-pole and radial ion focusing can be achieved by applying a quadrupole field to the device in addition to a dipole field.

An apparatus and method for correcting deviations in a quadrupole field in a quadrupole ion trap is provided. More specifically the invention provides for correction electrodes positioned in at least one primary quadrupole electrode and a method of using the correction electrodes to provide a field correction potential.

The invention relates to a linear ion trap analyzer. The linear ion trap analyzer comprises an ion trapping space surrounded by a plurality of cylinder electrodes, wherein high frequency voltage is applied to at least one part of cylinder electrodes so as to generate a radial trapping electric field which mainly has two dimensional quadrupole fields in the trapping space; at least one ion leading-out slot is formed on an ion trap in the direction perpendicular to a center axis, and an alternating electric field for exciting dipoles is overlapped in the direction; a strip-type field regulating electrode is arranged in a slit in the cylinder electrode right opposite to the ion leading-out slot, or in the gap between two cylinder electrodes; and the voltage on the field regulating electrode is set as the sum of all or one part of the high frequency voltage on the adjacent cylinder electrode and direct current (DC) voltage, and the DC voltage can be regulated as required. By setting the field regulating electrode and regulating the DC voltage, one or more aims of optimizing a field form in a linear ion trap and influencing ion motion characteristics during resonance excitation can be fulfilled.

A particle beam to treat malignant tissue is delivered to a patient by a gantry. The gantry includes a plurality of small magnets sequentially arranged along a beam tube to transfer the particle beam with strong focusing and a small dispersion function, whereby a beam size is very small, allowing for the small magnet size. Magnets arranged along the beam tube uses combined function magnets where the magnetic field is a combination of a bending dipole field with a focusing or defocusing quadrupole field. A triplet set of combined function magnets defines the beam size at the patient. A scanning system of magnets arranged along the beam tube after the bending system delivers the particle beam in a direction normal to the patient, to minimize healthy skin and tissue exposure to the particle beam.

A magnetic levitation system for supporting an object against gravity by a supporting force includes a permanent-magnet dipole aligned in a vertical position and coupled to the object, a supporting-field generator and a stabilization system. The supporting-field generator generates a supporting force on the permanent-magnet dipole via a supporting field. The supporting field is a two-dimensional or three-dimensional magnetic quadrupole field so that the supporting force is independent of a position of the dipole. The stabilization system constrains the dipole against movements in at least one horizontal direction, and includes a diamagnetic element coupled to the dipole and arranged below the dipole, and a stabilizing-field generator generating a second two-dimensional or three-dimensional stabilizing field to restore said diamagnetic element to a position where the field strength of the stabilizing field has a local minimum.

An energy filter with reduced aberration. The energy filter has a first stage of filter for receiving an electron beam entering along the optical axis and for focusing the beam in one direction vertical to the optical axis and a second stage of filter positioned along the optical axis behind the first stage of filter. The beam once focused by the first stage of filter is made to enter the second stage of filter. In the second stage of filter, the orbit of the electron beam is inverted with respect to the focal point. The two stages of filters are identical in length taken along the optical axis. The first and second stages of filters have electric and magnetic quadrupole fields, respectively, along the optical axis. These quadrupole fields make an angle of 45 degrees to the optical axis to achieve astigmatic focusing.

The invention concerns a corrector (10) for chromatic and aperture aberration correction in a scanning electron microscope or a scanning transmission electron microscope, comprising four multipole elements (1, 2, 3, 4) which are consecutively disposed in the optical path (9), the first (1) and fourth (4) of which are used to generate quadrupole fields (5, 6) and the second (2) and third (3) of which are used to generate octupole fields (11, 12) and quadrupole fields (7, 7′, 8, 8′), wherein the latter are superposed magnetic (7, 8) and electric (7′, 8′) fields, and wherein the quadrupole fields (5, 6, 7, 8) of all four multipole elements (1, 2, 3, 4) are successively rotated with respect to one another through 90°. Elimination of errors up to fifth order can be realized with a corrector (10) of this type in that the second (2) and the third (3) multipole elements are designed as twelve-pole elements, and an additional twelve-pole element (13) is inserted between the second (2) and the third (3) multipole element, and is loaded with current and / or voltage, such that an octupole field (14) is generated that is superposed by a twelve-pole field (15).

A system and method involving processing ions in a linear ion trap are provided, involving a two-dimensional asymmetric substantially quadrupole field having a hexapole and octopole component.

A corrector (1) for the axial and off-axial beam path of a particle-optical system, comprises a first (10) and a second (20) correction piece, which are disposed one behind the other in the beam path (2) on an optical axis (3). Each correction piece (10, 20) comprises four successive multipole elements (11, 12, 13, 14; 24, 23, 22, 21) disposed symmetrically with respect to a center plane (5) and with the following fields: wherein the first (11; 24) and the fourth (14; 21) multipole elements of the multipole elements (11, 12, 13, 14; 24, 23, 22, 21) are used to generate quadrupole fields (11′, 14′; 24′, 21′) and the second (12; 23) and third (13; 22) are used to generate octupole fields (12′″, 13′″; 23′″,22′″) and quadrupole fields (12′, 13′; 23′,22′), wherein the latter are superposed magnetic (12′, 13′; 23′, 22′) and electric fields (12″, 13″; 23″, 22″), wherein the quadrupole fields (11′, 12′, 13′, 14′; 24′, 23′, 22′, 21′) of all four multipole elements (11, 12, 13, 14; 24, 23, 22,21) are rotated from one to the next through 90°. An astigmatism of third order is corrected by a central multipole element disposed in the center plane and generating an octupole field.

A method and apparatus satisfying growing demands for improving the precision of angle of incidence of implanting ions that impact a semiconductor wafer and the precision of ribbon ion beams for uniform doping of wafers as they pass under an ion beam. The method and apparatus are directed to the design and combination together of novel magnetic ion-optical transport elements for implantation purposes. The design of the optical elements makes possible: (1) Broad-range adjustment of the width of a ribbon beam at the work piece; (2) Correction of inaccuracies in the intensity distribution across the width of a ribbon beam; (3) Independent steering about both X and Y axes; (4) Angle of incidence correction at the work piece; and (5) Approximate compensation for the beam expansion effects arising from space charge. In a practical situation, combinations of the elements allow ribbon beam expansion between source and work piece to 350 millimeter, with good uniformity and angular accuracy. Also, the method and apparatus may be used for introducing quadrupole fields along a beam line.

The invention relates to devices and methods for the storage of ions in mass spectrometers. The invention proposes the generation and superposition of two multipole fields of different order, independent of each other, in an RF multipole rod system. In an embodiment with eight pole rods, for example, it is thus possible to jointly store low-energy electrons in a central RF quadrupole field, which effectively acts only on electrons and holds them together radially, on the one hand, and multiply charged heavy positive ions in an RF octopole field, which effectively acts only on the ions, on the other hand, in order to fragment the positive ions by electron capture dissociation (ECD). In a different embodiment, multiply charged positive analyte ions and suitable negative reactant ions can react with each other in an octopole field by electron transfer dissociation (ETD) with a high fragmentation yield, and the fragment ions can subsequently be bundled by a transition to a quadrupole field to form a fine ion beam, which can leave the multipole rod system axially. A mixture of hexapole and dodecapole systems is also possible.

The present invention relates to an ion trap mass spectrometer using a cold electron source, in a production of a portable mass spectrometer, in which a microchannel plate (MCP) module is used, initial electrons are induced by injecting ultraviolet photons emitted from an ultraviolet diode to a front surface of the MCP module, electron beams amplified from the electrons are amplified using a channeltron electron multiplier (CEM), the amplified electron beams are accurately adjusted and injected into an ion trap, thus increasing the amplification rate, and since a quadrupole field is used as an ion filter which returns the initially injected electrons to the inside of an ion trap mass separator, the ionization rate increases.

An optical particle corrector with a straight optical axis for eliminating color and aperture aberrations in optical particle lenses includes multipole elements in the form of electric and / or magnetic quadrupole and octupole elements. There are at least twelve quadrupole elements and ten octupole elements, in which three quadrupole elements and two octupole elements are assembled into a group. These groups are arranged successively along the straight optical axis, in which a first symmetrical plane is defined between the first and second groups, a second symmetrical plane is defined between the second and third groups and a third symmetrical plane is defined between the third and fourth groups. The multipole elements from one group to another correspond to each other in pairs, in which the multipole elements of the corresponding following group are positioned in reverse order along the straight optical axis in comparison with the corresponding multipole elements of the preceding group. The structure and refractive powers of the multipole elements that correspond to each other are mirror-symmetrically configured relative to the corresponding symmetrical plane between the groups. At least two of the quadrupole elements generate electric-magnetic quadrupole fields, in which the quadrupole element are, preferably, arranged in a mirror-symmetrical manner relative to the second, or to all, symmetrical planes. An additional octupole element is arranged in the first and third symmetrical planes. The corrector enables the transmission of extremely large image fields, while the optical quality remains the same due to the fact image aberrations outside the axis can be corrected.

The invention is directed to a corrector for correcting energy-dependent first-order aberrations of the first degree as well as third-order spherical aberrations of electron-optical lens systems. The corrector includes at least one quadropole septuplet (S1) having seven quadrupoles (Q1 to Q7). The quadrupoles are mounted symmetrically to a center plane (ZS) so as to permit excitation along a linear axis. The corrector furthermore includes at least five octopoles (O1 to O7) which can be excited within the quadrupole septuplet. In an advantageous embodiment, two quadrupole septuplets are mounted in series one behind the other. The quadrupole fields of the two quadrupole septuplets are excited antisymmetrically to a center plane lying between the two quadrupole septuplets. With such a system, all geometric third-order aberrations and additional energy-dependent first-order aberrations of the third degree and geometric fifth-order aberrations of a lens system can be corrected in addition to the axial and off-axial first-order chromatic aberrations of the first degree.

A linear ion beam bonding apparatus and an array structure thereof, comprising a pair of primary radiofrequency electrodes (501 and 502) extending along the axial direction and oppositely arranged on two sides of the central axis of the linear ion beam bonding apparatus. Section patterns on different section planes of each of the primary radiofrequency electrodes (501 and 502) and perpendicular to the central axis are all kept symmetric via a primary symmetric plane (506) of the central axis. Radiofrequency voltages attached to the primary radiofrequency electrodes (501 and 502) are of identical phases. An ion extraction groove (84) is arranged on at least one of the primary radiofrequency electrodes (501 and 502), while at least one pair of auxiliary electrodes (503 and 505) are arranged on two sides of the pair of primary radiofrequency electrodes (501 and 502). The auxiliary electrodes (503 and 505) are arranged in duality to the primary symmetric plane (506). At least one of the auxiliary electrodes (503 and 505) is provided with a finite number of symmetric planes (507), while a minimal angle greater than 0 degrees and less than 90 degrees is provided between each symmetric plane (507) and the symmetric plane (506) of the primary radiofrequency electrodes (501 and 502). By means of this, a quadrupole field component of an ion beam bonding radiofrequency electric field within the ion beam bonding apparatus is strengthened.

The chromatic aberration corrector (100) has a first multipole element (110) for producing a first electromagnetic field and a second multipole element (120) for producing a second electromagnetic field. The first multipole element (110) first, second, and third portions (110a, 110b, 110c) arranged along an optical axis (OA) having a thickness and producing a quadrupole field in which an electric quadrupole field and a magnetic quadrupole field are superimposed. In the first and third portions (110a, 110c), the electric quadrupole field is set stronger than the magnetic quadrupole field. In the second portion (110b), the magnetic quadrupole field is set stronger than the electric quadrupole field. The second portion (110b) produces a two-fold astigmatism component that is opposite in sign to two-fold astigmatism components produced by the first portion (110a) and third portion (110c).