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Splicing-interference-detection aspheric surface shape apparatus using distorting lens and method thereof

A splicing-interference-detection aspheric surface shape apparatus using a distorting lens and a method thereof belong to the optical detection technology field. In the invention, an interference detection system, a distorting lens compensation system, a mechanical adjusting mechanism and a computer data processing module are included. The method comprises the following steps of step1, constructing a splicing interference detection apparatus using the distorting lens; step2, dividing a subaperture; step3, removing to a position of the subaperture to be detected and adjusting a distorting lens surface shape or a refractive index according to modeling and interference fringes; step4, carrying out subaperture interferogram acquisition processing; step5, carrying out subaperture backhaul error correction; and step6, carrying out full aperture surface shape splicing. In the invention, the distorting lens and the subaperture splicing interference detection method are combined; the subaperture number needed by full aperture coverage can be effectively reduced and effective areas of each subaperture and an overlapping region are increased; a problem that the overlapping region is small so that splicing precision is influenced is solved.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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