Splicing-interference-detection aspheric surface shape apparatus using distorting lens and method thereof

Abstract

A splicing-interference-detection aspheric surface shape apparatus using a distorting lens and a method thereof belong to the optical detection technology field. In the invention, an interference detection system, a distorting lens compensation system, a mechanical adjusting mechanism and a computer data processing module are included. The method comprises the following steps of step1, constructing a splicing interference detection apparatus using the distorting lens; step2, dividing a subaperture; step3, removing to a position of the subaperture to be detected and adjusting a distorting lens surface shape or a refractive index according to modeling and interference fringes; step4, carrying out subaperture interferogram acquisition processing; step5, carrying out subaperture backhaul error correction; and step6, carrying out full aperture surface shape splicing. In the invention, the distorting lens and the subaperture splicing interference detection method are combined; the subaperture number needed by full aperture coverage can be effectively reduced and effective areas of each subaperture and an overlapping region are increased; a problem that the overlapping region is small so that splicing precision is influenced is solved.

Description

technical field [0001] The invention belongs to the technical field of optical detection, and in particular relates to a device and method for detecting an aspheric surface shape by splicing and interfering deformable mirrors. Background technique [0002] Interference detection technology is a commonly used surface shape detection technology, which is the relative detection of the surface to be measured and the reference surface. The reference surfaces are generally flat or spherical, and there will not be more interference fringes when using them to test the polished plane and spherical surface, while using spherical reference surfaces to detect aspheric surfaces, when the slope of the aspheric surface is larger, the density of interference fringes is also higher. many. When the interference fringe density exceeds the Nyquist frequency of the interferometer detector, the interference fringe cannot be resolved by the detector, resulting in the aspheric surface being unable...

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