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Splicing-interference-detection aspheric surface shape apparatus using distorting lens and method thereof

A technology of interference detection and deformable mirror, applied in the field of optical detection, can solve the problems of low detection efficiency, large mechanical error, long detection time, etc.

Inactive Publication Date: 2016-03-23
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The purpose of the present invention is to propose a device and method for detecting aspheric surface shape using splicing and interference of deformable mirrors, so as to solve the problems of low detection efficiency, large mechanical error, long detection time and large amount of data processing in the prior art

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  • Splicing-interference-detection aspheric surface shape apparatus using distorting lens and method thereof
  • Splicing-interference-detection aspheric surface shape apparatus using distorting lens and method thereof
  • Splicing-interference-detection aspheric surface shape apparatus using distorting lens and method thereof

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Embodiment Construction

[0057] Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0058] The device of the present invention adopting splicing interference detection of deformable mirrors to detect aspheric surface shape comprises a deformable mirror compensation system, an interference detection system, a mechanical adjustment mechanism and a computer data processing module;

[0059] The computer data processing module includes a deformable mirror control unit 12, a multi-dimensional adjustment table control unit 13, an interferogram acquisition processing unit 14, a backhaul error correction unit and a sub-aperture splicing algorithm unit;

[0060] The aspherical surface 8 to be detected is fixed on the mechanical adjustment mechanism, and the interference detection system compensates the optical path difference with the reflected light from the aspheric surface 8 to be detected through a deformation mirror compensation system. The i...

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Abstract

A splicing-interference-detection aspheric surface shape apparatus using a distorting lens and a method thereof belong to the optical detection technology field. In the invention, an interference detection system, a distorting lens compensation system, a mechanical adjusting mechanism and a computer data processing module are included. The method comprises the following steps of step1, constructing a splicing interference detection apparatus using the distorting lens; step2, dividing a subaperture; step3, removing to a position of the subaperture to be detected and adjusting a distorting lens surface shape or a refractive index according to modeling and interference fringes; step4, carrying out subaperture interferogram acquisition processing; step5, carrying out subaperture backhaul error correction; and step6, carrying out full aperture surface shape splicing. In the invention, the distorting lens and the subaperture splicing interference detection method are combined; the subaperture number needed by full aperture coverage can be effectively reduced and effective areas of each subaperture and an overlapping region are increased; a problem that the overlapping region is small so that splicing precision is influenced is solved.

Description

technical field [0001] The invention belongs to the technical field of optical detection, and in particular relates to a device and method for detecting an aspheric surface shape by splicing and interfering deformable mirrors. Background technique [0002] Interference detection technology is a commonly used surface shape detection technology, which is the relative detection of the surface to be measured and the reference surface. The reference surfaces are generally flat or spherical, and there will not be more interference fringes when using them to test the polished plane and spherical surface, while using spherical reference surfaces to detect aspheric surfaces, when the slope of the aspheric surface is larger, the density of interference fringes is also higher. many. When the interference fringe density exceeds the Nyquist frequency of the interferometer detector, the interference fringe cannot be resolved by the detector, resulting in the aspheric surface being unable...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/24G01B11/2441
Inventor 张敏武东城苗二龙隋永新杨怀江
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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