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191results about "Spectrum generation using refracting elements" patented technology

Interferometer

An interferometer including an analysis optical system including a retroreflector configured to reflect analysis light and a first light receiver configured to receive the analysis light and output a first light reception signal, the analysis optical system irradiating a sample with the analysis light and causing the analysis light to interfere; a length measuring optical system including a laser light source configured to output laser light, an optical modulator configured to modulate a frequency of the laser light by using a vibrator and add a modulation component to the laser light, and a second light receiver configured to receive the laser light containing the modulation component and a length measurement component generated when the retroreflector is irradiated with the laser light and output a second light reception signal, the length measuring optical system causing the laser light to interfere; and a driver configured to change a position of the retroreflector.
Owner:SEIKO EPSON CORP

Optical imaging apparatus and spectral imaging method for creating spectrally and spatially resolved image data

An optical imaging apparatus 100, being configured for receiving an input light field 1 and for creating spectrally and spatially resolved image data Sω of the input light field 1, said input light field 1 having an input light field spectrum and two different polarization components 1A, 1B, comprises an autocorrelation device 10 being configured for receiving the input light field 1, controlling a delay between the polarization components 1A, 1B of the input light field 1 and providing an autocorrelation light field 2 including a superposition of the polarization components 1A, 1B, a photosensor device 20 having at least one polarizing element 21 and a photosensor 22 with a photosensor sensitivity spectrum and being configured for receiving the autocorrelation light field 2 and providing sensed spatially resolved light field sensor data Fτ, wherein the light field sensor data Fτ include a superposition of the spectrally resolved image data Sω to be obtained and the light field sensor data Fτ depend on said delay between the polarization components 1A, 1B of the input light field 1, and an image processor device 30 being coupled with the photosensor device 20 and being configured for calculating the spectrally resolved image data Sω based on the light field sensor data Fτ, wherein the image processor device 30 is configured for calculating the spectrally resolved image data Sω by applying a regularized inversion to the light field sensor data Fτ, said inversion being constructed in dependency on prior information on at least one of the input light field 1, the spectrally resolved image data Sω and the optical imaging apparatus 100. Furthermore, a spectral imaging method is described.
Owner:LUDWIG-MAXIMILIANS-UNIVERSITÄT MÜNCHEN IN VERTRETUNG DES FREISTAATES BAYERN

MHz frame frequency high-speed spectral measurement system and method

The invention discloses a MHz frame frequency high-speed spectral measurement system and method, and mainly solves the technical problems that a traditional spectrometer is low in frame frequency, cannot capture spectral change in a high-speed dynamic process in real time, is limited in application scene and the like. The spectral measurement system comprises a slit, a first collimating mirror, a spectral dispersion element, a spectral signal amplification module, a spectral coupling module, a spectral acquisition module and a data processing module, the slit is used for limiting an incident space of a light beam and changing a divergence angle of the light beam; the first collimating mirror is located on the side, away from the to-be-measured object, of the slit. The spectral dispersion element is located on a reflection light path of the first collimating mirror; the spectral signal amplification module is located on a diffraction light path of the spectral dispersion element; the spectrum coupling module, the spectrum acquisition module and the data processing module are sequentially arranged, the spectrum coupling module is used for focusing the spectrum band captured by the spectrum signal amplification module to form a spectrum image, and the spectrum image is acquired by the spectrum acquisition module and then transmitted to the data processing module.
Owner:XIAN INST OF OPTICS & PRECISION MECHANICS CHINESE ACAD OF SCI

Illumination systems and optical devices for laser beam shaping

Various embodiments of a laser illumination system are disclosed. In some examples, a system includes one or more lasers and a beam combiner configured to direct a combined light beam along a path. The system can include a polychroic optical assembly that receives the combined light beam and to output a first beam of the first light of the first wavelength and a second beam of the second light of the second wavelength. The second beam can be offset from the first beam. The polychroic optical assembly can be a prism assembly. The system can include one or more optical elements configured alter a distribution of light of the first beam to output a first output line at a sample plane, and to alter a distribution of light of the second beam to output a second output line at the sample plane.
Owner:IDEX HEALTH & SCIENCE LLC

Spectrum acquisition method and device

A spectrum acquisition method and device belong to the technical field of optics. The spectrum acquisition device comprises a light splitting unit, a first spectrum calculation unit, a second spectrum calculation unit and a processing unit, the light splitting unit is used for receiving a light beam from the light source, splitting the light beam into a first polarization component and a second polarization component which are different in polarization direction, transmitting the first polarization component to the first spectrum calculation unit, and transmitting the second polarization component to the second spectrum calculation unit. The first spectrum calculation unit is used for calculating the spectrum of the first polarization component; the second spectrum calculation unit is used for calculating the spectrum of the second polarization component; the processing unit is used for obtaining the spectrum of the light beam according to the spectrum of the first polarization component and the spectrum of the second polarization component. According to the spectrum acquisition device, the problem that the computational spectrometer cannot determine the spectrum of the light beam when the light beam is the non-polarized light can be solved, and the spectrum acquisition device provided by the invention can acquire the spectrum of the light beam when the light beam is the non-polarized light. The method is used for acquiring the spectrum.
Owner:HUAWEI TECH CO LTD

High-speed multispectral camera based on fusion of beam splitter prism and multichannel TDI chip

The invention discloses a high-speed multispectral camera based on fusion of a beam splitter prism and a multichannel TDI chip, which relates to the technical field of optical imaging and high-speed sensing and comprises an imaging objective lens, a beam splitting module, a sensor array and a processing chip. During use, external natural light reflected by an object is projected to the light splitting module through the imaging objective lens, the light splitting module decomposes incident light into a plurality of wave bands to generate multi-channel color information, and the sensor array receives the multi-channel color information generated by the light splitting module. And finally, the processing chip processes and fuses the multi-channel color information received by the sensor array into a color multispectral image. According to the invention, fine decomposition of the spectrum can be realized, so that a camera can obtain rich and detailed spectrum information, and the method can be used for analyzing chemical components and physical characteristics of an object; the system can complete the image collection of a plurality of spectral bands in a short time, and is suitable for shooting a fast moving object or a transient phenomenon.
Owner:BEIJING BOVISION TECH CO LTD

Imaging spectrometer and camera with sliding lens group

A hyperspectral imaging device includes an optical channel arranged to focus light at a first image plane. A spectrometer includes a slit formed at the first image plane to allow a slit-shaped portion of the light pass through. A dispersive element receives light from the slit and spectrally disperses it along a direction perpendicular to a width of the slit. A focusing lens focuses the spectrally dispersed light at a second image plane such that the spectral dispersion is imaged along a first axis thereof, and a spatial image of the slit width is imaged along a second axis for detection by a sensor. A sliding lens group between the optical channel and the first image plane moves to direct the incident light, scanning the entire image over the slit such that multiple frames acquired by the sensor each correspond to a horizontal line of the image.
Owner:KARL STORZ SE & CO KG

Dual-band small spectral imaging system based on double slits

The invention relates to a dual-band small spectral imaging system based on double slits, and the system is characterized in that a slit incident plane controls the incidence of light, and obtains incident light; after incident light is transmitted by the plano-convex lens, a first transmission light beam is obtained; the concave spherical reflector converges an incident first transmission light beam and generates and reflects a convergent light beam; the convex spherical reflection grating receives the reflected convergent light beam, generates a monochromatic divergent light beam and reflects the monochromatic divergent light beam to the concave spherical reflection mirror; the positive meniscus lens transmits the light beam reflected by the concave spherical reflector to obtain a second transmission light beam; the dichroscope converges the second transmission light beam, generates visible, near-infrared and short-wave infrared light beams, and reflects the visible, near-infrared and short-wave infrared light beams to a first image surface and a second image surface for imaging; wherein the direction of the inner concave surface of the concave spherical reflector is opposite to the direction of incident light; the outer convex spherical surface direction of the convex spherical surface reflection grating is the same as the direction of incident light; the mirror surface normal of the dichroscope and the optical axis of the incident light form an acute angle. The device is compact in structure, small in size, light in weight and easy to machine, install and adjust.
Owner:SUZHOU CITY UNIV

Space-based infrared coding spectral imaging optical system and imaging method thereof

The invention discloses a space-based infrared coding spectral imaging optical system and an imaging method thereof, and belongs to the technical field of optics, the space-based infrared coding spectral imaging optical system is composed of a long-wave infrared channel and a medium-wave infrared channel, the two channels share a three-mirror system for primary image imaging, a light splitter is adopted for light splitting, medium-wave infrared light is reflected, long-wave infrared light is transmitted, and collimation is performed after light splitting. Dispersion and aliasing of spectrums are carried out in a biprism mode, each sub-channel is composed of a front prism, a main optical lens, a relay lens 1, a coding plate (a primary imaging surface), a relay lens 2, a rear prism and the like, data acquisition is carried out after dispersion aliasing is carried out, and resolving imaging is carried out by adopting a spectrum coding algorithm.
Owner:BEIJING RES INST OF SPATIAL MECHANICAL & ELECTRICAL TECH

Detection arrangement for an optical scanning microscope and optical scanning microscope

A detection arrangement (102) for an optical scanning microscope (100, 900) comprises a beam splitting element (120) configured to receive descanned detection light (118), to split the detection light (118) into two parts, to direct a first part (128a) of the detection light (118) into a first beam path (130a), and to direct a second part (128b) of the detection light (118) into a second beam path (130b). The first and second beam paths (130a, 130b) each comprise a dispersive element (122a, 122b) configured to spectrally separate the detection light (118) along a spectral separation direction (132a, 132b), and an array detector (124a, 124b) configured to receive the spectrally separated detection light (118). The beam splitting element (120), the first dispersive element (122a), and the second dispersive element (122b) are configured such that a first reference direction (134a) corresponding to a first spectral separation direction (132a) imaged back via the first beam path (130a) to a plane arranged before the beam splitting element (120, 702) and a second reference direction (134b) corresponding to a second spectral separation direction (132b) imaged back via the second beam path (130b) to the plane arranged before the beam splitting element (120) are different from each other.
Owner:LEICA MICROSYSTEMS CMS GMBH

Method and system for active line scan imaging

A line scan imaging system scans a targeted inspection area and gathers reflectance and fluorescence data. The inspection system comprises at least a rotatable / pivotable mirror-faced triangular prism, a line illumination source, and a line scan hyperspectral camera. The prism has a mirrored camera face and a mirrored illumination face. In operation, as the prism rotates, the camera instantaneous field of view (IFOV) and the projected illumination line converge at a nadir convergence scan line so that the hyperspectral camera receives line scan data from the nadir convergence scan line as the nadir convergence scan line traverses an inspection area.
Owner:US SEC AGRI

Hyperspectral imaging system

The invention provides a hyperspectral imaging system. The hyperspectral imaging system comprises a telescope group, a collimator objective, a prism, a volume holographic diffraction grating, an imaging objective and an imaging sensor which are arranged in sequence, the telescope group is composed of a primary reflector, a secondary reflector, a third reflector, a plane reflector and an entrance slit; the primary reflector, the secondary reflector and the third reflector form an off-axis three-reflector structure; the plane reflector is used for folding a light path; the collimating objective lens, the prism, the volume holographic diffraction grating, the imaging objective lens and the imaging sensor form an imaging spectrometer, and an entrance slit is used as object space input; the formed off-axis three-mirror and folded light path and an imaging spectrometer are in coaxial butt joint by taking an entrance slit as a node, and are used for joint correction and splicing to form a hyperspectral imaging system. According to the optical path architecture, optimal matching of the unobstructed total reflection front end and the transmission type rear end is realized, and the detection sensitivity of crop weak spectrum signals is greatly improved while a better modulation transfer function of a full view field is ensured.
Owner:CHONGQING INNOVATION CENTER OF BEIJING INSTITUTE OF TECHNOLOGY

High-throughput hyperspectral imaging systems

High-throughput hyperspectral imaging systems are provided. According to an aspect of the invention, a system includes an excitation light source; an objective that is configured to image excitation light onto the sample, such that the excitation light causes the sample to emit fluorescence light; a channel separator that is configured to separate the fluorescence light into a plurality of spatially dispersed spectral channels; and a sensor. The excitation light source includes a light source and a plurality of lenslet arrays. Each of the lenslet arrays is configured to receive light from the light source and to generate a pattern of light, and the patterns of light generated by the lenslet arrays are combined to form the excitation light. The objective is configured to simultaneously image each of the patterns of light to form a plurality of parallel lines or an array of circular spots at different depths of the sample.
Owner:VERILY HEALTH INC

Remote color matching devices and system

The invention comprises a method and system for cost effective, convenient remote high fidelity color reproduction and matching that can be used to convey color to observers remote from the physical source of color. Such remote observers can include product consumers wishing to view a product color, for example. In a preferred embodiment, the method comprises capture of article or product reflectance spectra and the use of this spectrum to filter ambient light or directed light in the environment of a user remote from the article or product. Other embodiments of methods include various techniques to capture product spectral information and color matching functions useful for color reproduction using colored light sources. Additional systems embodiments include devices exploiting multiprimary displays to render the product color with reduced metamerism.
Owner:DAVIS DENNIS WILLARD +2

Two-way spatial-spectral domain joint compressed sensing imaging method and device

The invention discloses a double-path spatial-spectral domain joint compressed sensing imaging method and device, and belongs to the field of high-resolution spectral imaging and compressed imaging. Target light is divided into two paths through the beam splitter prism, and one path is imaged to the high-spatial-resolution detector through the imaging lens. And the other path enters a spatial spectrum compression measurement light path. A spatial-spectral joint coding matrix is generated for a spatial-spectral compression measurement light path, a DMD is introduced into the light path to serve as a spatial light modulator to load the joint coding matrix to carry out high-resolution spatial-spectral joint coding on a target scene, and then a prism is used as a dispersion element to carry out dispersion on the coding scene. And finally, carrying out space and spectrum down-sampling measurement on the coded information of dispersion through an imaging lens by using a low-spatial-resolution detector to obtain a low-spatial-resolution two-dimensional spectrum aliasing measurement value. An original high-space and high-spectral-resolution image can be reconstructed through a back-end reconstruction algorithm on the collected high-spatial-resolution gray-scale image and the low-spatial-resolution spectral aliasing image.
Owner:BEIJING INST OF TECH

Multi-slit configured hyperspectral imager

Systems and methods relating to a multi-slit hyperspectral imager. The imager is configured with multiple slits that are parallel to one another. Each slit produces its own hyperspectral cube and is limited to a specific wavelength range. The multiple slits produce multiple data sets, obtained in quick succession, for the same section of an area to be imaged. In optical spectrometry applications such as trace gas sensing and quantification, this allows for improved measurement precision. The imager may be used for any gas of interest by adjusting the wavelength range to one that contains absorption features of the targeted gas.
Owner:GHGSAT

Optical emission spectrometer and method for analyzing spectral peaks

A method of analyzing spectral peaks obtained by an optical spectrometer is provided. The method includes imaging a spectral peak using an optics assembly and a detector of the optical spectrometer to generate a detected image of the spectral peak. An image correction function is applied to the detected image of the spectral peak to obtain a corrected image of the spectral peak, wherein the image correction function increases the spectral power density of the spectral peak in the corrected image of the spectral peak. Information representing the spectral peak is extracted from the corrected image of the spectral peak.
Owner:THERMO FISHER SCI BREMEN

Detection arrangement of optical scanning microscope and optical scanning microscope

A detection arrangement for an optical scanning microscope includes a beam splitting element configured to receive reversely scanned detection light, split the detection light into two portions, direct a first portion of the detection light into a first light path and direct a second portion of the detection light into a second light path. The first and second optical paths each include a dispersive element configured to spectrally separate the detection light in a spectrally separating direction and an array detector for receiving the spectrally separated detection light. A beam splitting element, first and second dispersive elements are configured such that a first reference direction corresponding to a first spectral separation direction in which reverse imaging is performed via a first optical path toward a plane arranged before a beam splitting element and a second spectral separation direction in which reverse imaging is performed via a second optical path toward a plane arranged before a beam splitting element correspond The two reference directions are different from each other.
Owner:LEICA MICROSYSTEMS CMS GMBH

Small-F-number imaging spectrum system

The invention discloses a small-F-number imaging spectrum system, and relates to the technical field of imaging spectrums, and the system comprises a front telescoping system, a slit system, a collimation system, a light splitting system, an imaging system and a detector which are arranged in sequence. The front telescope system comprises a plurality of spherical lenses which are arranged in sequence and form an image space telecentric optical path structure; the slit system comprises a parallel flat plate; the collimation system comprises a plurality of spherical lenses which are arranged in sequence; the light splitting system is of a prism-grating-prism combined structure; the imaging system comprises a plurality of spherical lenses which are arranged in sequence; the detector is used for imaging display according to the light beams focused by the imaging system. The method has the characteristic of small F number, and the detail distinguishing capability of an imaging spectrum system can be improved.
Owner:CHANGCHUN UNIV OF SCI & TECH

A visible light interferometric polarization imaging spectrometer for detecting high-order oscillation modes of gaseous planets

The present invention discloses a visible light band interferometric polarization imaging spectrometer for detecting high-order oscillation modes of gaseous planets. The system designed by the present invention has a working center wavelength of 519.5nm and a bandwidth of 2nm; the system is composed of three modules: a collimation system, a spectroscopic system, and a focusing system, wherein the spectroscopic system is the core module of the system, which is composed of an interferometer module and a Wollaston prism polarization module. The interferometer module is made of two prisms of different materials glued together, and can output two interference lights with a phase difference of π. After the interference light is incident on the Wollaston prism, it is divided into four beams of polarized light with a phase difference of π / 2. The system can simultaneously obtain characteristic images of 4 different phases of the same scene. The interferometric polarization imaging spectrometer in the present invention has a compact structure, the core module has good stability, and the MTF of the full field of view at the Nyquist frequency is greater than 0.55, and has good imaging quality.
Owner:HEFEI INSTITUTE OF PHYSICAL SCIENCE CHINESE ACADEMY OF SCIENCES

Endoscopic imaging device for visible and hyperspectral imaging with sliding lens group

A hyperspectral imaging device includes an optical channel arranged to focus light at a first image plane. A spectrometer includes a slit formed at the first image plane to allow a slit-shaped portion of the light pass through. A dispersive element receives light from the slit and spectrally disperses it along a direction perpendicular to a width of the slit. A focusing lens focuses the spectrally dispersed light at a second image plane such that the spectral dispersion is imaged along a first axis thereof, and a spatial image of the slit width is imaged along a second axis for detection by a sensor. A sliding lens group between the optical channel and the first image plane moves to direct the incident light, scanning the entire image over the slit such that multiple frames acquired by the sensor each correspond to a horizontal line of the image.
Owner:KARL STORZ IMAGING INC

A method for assembling and adjusting a satellite-borne limb detection payload

The present invention discloses a method for assembling a satellite-borne limb detection payload. The main steps of the method include: 1. using a three-coordinate measuring instrument to complete the pre-assembly of the off-axis three-mirror telescope module; 2. establishing a whole system assembly benchmark, building a front optical system assembly optical path, using the imaging spot size and shape as criteria to complete the assembly and detection of each module of the front optical system; 3. establishing a whole machine joint adjustment optical path, completing the joint adjustment and testing of the front optical system and the spectral imaging system. This method is used to complete the high-precision assembly and adjustment of the satellite-borne limb detection payload, solving the problems in the prior art that the laser interferometer assembly method cannot determine the imaging focus and the lack of a whole system assembly method for the limb detection payload. This method simplifies the assembly and adjustment process and saves assembly and adjustment costs on the basis of ensuring the assembly and adjustment accuracy, and is suitable for the assembly and adjustment of semi-enclosed and compact space optical and mechanical systems.
Owner:HEFEI INSTITUTE OF PHYSICAL SCIENCE CHINESE ACADEMY OF SCIENCES

Flex-spectrum optical detector

An optical system may include an optical source to provide an excitation light and a collecting element to direct an optical signal, received from a sample in response to incidence of the excitation light on the sample, to an optical device. The optical device may include a separating element to separate the optical signal into a plurality of spectral bands that are spatially or angularly separated along a band separation direction, a dispersive element comprising a dispersive region to disperse spectral components of a spectral band along a dispersion direction to form a dispersed spectral band, and an optical element to manipulate the dispersed spectral band in association with imaging the spectral band onto a detector area of a detector array. The optical system may include a controller to obtain one or more read-out signals from the detector array.
Owner:WELLS FARGO BANK NA

OPTICAL FLEX SPECTRUM DETECTOR

An optical system may include an optical source for providing excitation light and a collection element for directing an optical signal received from a sample in response to the excitation light being incident on the sample to an optical device. The optical device may include a separation element for separating the optical signal into a plurality of spectral bands spatially or angularly separated along a band separation direction, a dispersive element comprising a dispersive region for dispersing spectral components of a spectral band along a dispersion direction to form a dispersed spectral band, and an optical element for manipulating the dispersed spectral band in association with imaging the spectral band onto a detector area of a detector array.The optical system may include a controller for obtaining one or more readout signals from the detector array.
Owner:LUMENTUM OPERATIONS LLC

Optical Spectrum Obtaining Method and Apparatus

An optical spectrum obtaining apparatus includes: a beam splitting unit, a first / second optical spectrum computation unit, and a processing unit. The beam splitting unit is configured to: receive a light beam from a light source, split the light beam into a first polarization component and a second polarization component with different polarization directions, transmit the first polarization component to the first optical spectrum computation unit, and transmit the second polarization component to the second optical spectrum computation unit. The first optical spectrum computation unit is configured to compute an optical spectrum of the first polarization component. The second optical spectrum computation unit is configured to compute an optical spectrum of the second polarization component. The processing unit is configured to obtain an optical spectrum of the light beam based on the optical spectrum of the first polarization component and the optical spectrum of the second polarization component.
Owner:HUAWEI TECH CO LTD

Detection device for optical scanning microscope and optical scanning microscope

To provide a detection device for an optical scanning microscope.SOLUTION: A detection device includes a beam splitting element configured to receive descanned detection light, split the detection light into two portions, direct a first portion of the detection light into a first beam path, and direct a second portion of the detection light into a second beam path. The first beam path and the second beam path include, respectively, a dispersive element configured to spectrally separate the detection light along a spectral separation direction and an array detector configured to receive the spectrally separated detection light. The beam splitting element, a first dispersive element, and a second dispersive element are configured such that a first reference direction corresponding to a first spectral separation direction imaged back to a plane arranged before the beam splitting element via the first beam path and a second reference direction corresponding to a second spectral separation direction imaged back to the plane arranged before the beam splitting element via the second beam path are different from each other.SELECTED DRAWING: Figure 1
Owner:LEICA MICROSYSTEMS CMS GMBH

Flex-spectrum optical detector

To provide an optical system that can detect responses from a sample over a full spectrum with high sensitivity and high resolution.SOLUTION: An optical system 100 includes an optical source 102 to provide excitation light 150 and a collecting element to direct an optical signal 160 received from a sample in response to incidence of the excitation light on a sample 155, to an optical device 110. The optical device includes: a separating element to separate the optical signal into a plurality of spectral bands that are spatially or angularly separated along a band separation direction; a dispersive element having a dispersive region to disperse spectral components of a spectral band along a dispersion direction to form a dispersed spectral band; and an optical element to manipulate the dispersed spectral band in association with imaging the spectral band onto a detector area of a detector array. The optical system includes a controller 122 to obtain one or more read-out signals from the detector array.SELECTED DRAWING: Figure 1A
Owner:LUMENTUM OPERATIONS LLC

Method for calibrating a spectrometer device

A method for calibrating a spectrometer device (110) is disclosed. The spectrometer device (110) comprises at least one detector element (112) configured for generating at least one detector signal in response to an illumination of the detector element (112) by incident light. The spectrometer device (110) further comprises at least one light source (118) configured for emitting illumination light (120) in at least one optical spectral range. The spectrometer device (110) further comprises at least one sample interface (126) configured for allowing the illumination light (120) from the light source (118) to illuminate at least one object (128) and configured for allowing detection light (130) from the object (128) to propagate to the detector element (112). The spectrometer device (110) further comprises at least one temperature sensor (134) configured for determining at least one temperature of the detector element (112). The method comprises: i. providing at least one predetermined calibration model (146), wherein the predetermined calibration model (146) comprises a plurality of items of calibration information for at least one temperature range; ii. illuminating the detector element (112) via the sample interface (126) having no object (128) applied to the sample interface (126) to obtain at least one open port detector signal (156); iii. determining at least one temperature (154) of the detector element (112); and iv. determining at least one temperature-corrected calibration model (148) using the predetermined calibration model (146) and taking into account the open port detector signal (156) and the temperature (154) of the detector element (112).
Owner:TRINAMIX GMBH

Spectrometer and spectroscopic measurement system

To provide a spectrometer and a spectroscopic measurement system that can disperse and detect light in a wide wavelength region with sufficient diffraction efficiency.SOLUTION: A spectrometer 4 comprises: a spectroscopic portion 23; a light separation portion 25 that separates light P2 dispersed by the spectroscopic portion 23 into first light L1 in a first wavelength region and second light L2 in a second wavelength region shorter than the first wavelength region; and a light detection portion 27 that detects N-th order diffracted light included in the first light L1 separated by the light separation portion 25 and detects M-th order diffracted light included in the second light L2 separated by the light separation portion 25. N and M are integers other than 0 where the absolute value of N is less than the absolute value of M.SELECTED DRAWING: Figure 3
Owner:HAMAMATSU PHOTONICS KK