Purification method of crude sulfur hexafluoride product

A technology of sulfur hexafluoride and purification method, applied in chemical instruments and methods, hydrogen fluoride, fluorine/hydrogen fluoride, etc., can solve the problems of environmental pollution, a large amount of waste water, and the waste water is not clearly explained, and achieves improvement of purity, cost saving, and reduction of The effect of waste water

Inactive Publication Date: 2020-07-31
FUJIAN DEER TECH CORP
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Problems solved by technology

This process has the following disadvantages: a large amount of waste water will be generated in the washing and alkali wash

Method used

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  • Purification method of crude sulfur hexafluoride product
  • Purification method of crude sulfur hexafluoride product
  • Purification method of crude sulfur hexafluoride product

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Embodiment Construction

[0028] The invention provides a method for preparing high-purity sulfur hexafluoride, which mainly includes the preparation of crude sulfur hexafluoride and the impurity removal and purification process of crude sulfur hexafluoride, and the purity of the obtained high-purity sulfur hexafluoride can reach 99.9995% Above, far higher than 99.999% of the national standard, and the impurity control item is added compared with the national standard: H 2 、C 2 f 6 、C 3 f 8 , these impurities will affect the etching or cleaning of the wafer.

[0029] see figure 1 , figure 1 It is the process flow chart of the preparation method embodiment of high-purity sulfur hexafluoride of the present invention, and the preparation method comprises the following steps:

[0030] S1. Electrolytic fluorine production: electrolysis of anhydrous hydrogen fluoride to prepare fluorine gas;

[0031] S2, fluorine-sulfur reaction: pass the fluorine gas prepared in step S1 into the reactor to react with...

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Abstract

The invention provides a purification method of a crude sulfur hexafluoride product. The purification method comprises the following steps: cracking to remove impurities; washing to remove impurities;performing alkali washing to remove impurities; performing low-pressure adsorption; performing high-pressure adsorption; performing rectification to remove impurities. One to six stages of water washing towers are arranged, fluorine gas, low-sulfur fluoride and thionyl fluoride in the crude sulfur hexafluoride are effectively removed through multiple times of water washing, the purity of the sulfur hexafluoride is improved, meanwhile, by-product hydrofluoric acid in the water washing process is recycled, generation of waste water is reduced, and waste is turned into wealth. The one to six stages of alkaline washing towers are arranged, HF, CO2 and SO2 gas in sulfur hexafluoride is effectively removed through multiple times of alkaline washing, the purity of sulfur hexafluoride is improved, waste liquid generated by the alkaline washing towers is recycled after being treated with quick lime in an alkaline liquid collecting tank, generation of the waste liquid is avoided, pollution is reduced, and cost is saved.

Description

technical field [0001] The invention relates to the technical field of chemical production, in particular to a method for purifying crude sulfur hexafluoride. Background technique [0002] Sulfur hexafluoride is a colorless, odorless, non-toxic, non-corrosive, non-flammable, non-explosive gas at normal temperature and pressure, with a molecular weight of 146.06 and a density of 6.139g / L, about five times that of air. Its chemical composition is stable, and it is one of the gaseous substances with the best known chemical stability, and its inertness is similar to that of nitrogen. It has excellent thermal stability, and it does not decompose even at high temperatures above 500°C in its pure state. Sulfur hexafluoride has excellent electrical insulation and arc extinguishing properties. Under normal pressure, its insulation capacity is more than 2.5 times that of air, and its arc extinguishing capacity is equivalent to 100 times that of air under the same conditions. Also, u...

Claims

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Application Information

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IPC IPC(8): C01B17/45C01B7/19C25B1/24
CPCC01B17/453C01B7/191C25B1/245C01B2210/0003C01B2210/0017C01B2210/0042C01B2210/0098C01B2210/0056C01B2210/0051C01B2210/0071C01B2210/0062C01B2210/0009
Inventor 华小林曾熙李嘉磊赖金香张朝春王凤侠胡进军
Owner FUJIAN DEER TECH CORP
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