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245 results about "Sulfur fluoride" patented technology

Sulfur(vi) fluoride compounds and methods for the preparation thereof

This application describes a compound represented by Formula (I): (I) wherein: Y is a biologically active organic core group comprising one or more of an aryl group, a heteroaryl aryl group, a nonaromatic hydrocarbyl group, and a nonaromatic heterocyclic group, to which Z is covalently bonded; n is 1, 2, 3, 4 or 5; m is 1 or 2; Z is O, NR, or N; X1 is a covalent bond or -CH2CH2-, X2 is O or NR; and R comprises H or a substituted or unsubstituted group selected from an aryl group, a heteroaryl aryl group, a nonaromatic hydrocarbyl group, and a nonaromatic heterocyclic group. Methods of preparing the compounds, methods of using the compounds, and pharmaceutical compositions comprising the compounds are described as well.
Owner:THE SCRIPPS RES INST

Etching process method

An etching process method is provided that includes outputting a first high frequency power from a first high frequency power supply in a cryogenic temperature environment where the temperature of a substrate is controlled to be less than or equal to −35° C., supplying a sulfur fluoride-containing gas and a hydrogen-containing gas, generating a plasma from the supplied sulfur fluoride-containing gas and hydrogen-containing gas, and etching a laminated film made up of laminated layers of silicon-containing films having different compositions with the generated plasma.
Owner:TOKYO ELECTRON LTD

Sulfur hexafluoride mixed gas purification recovery gas distribution gas supplementary device, and operation method thereof

The invention discloses a sulfur hexafluoride mixed gas purification recovery gas distribution gas supplementary device. The sulfur hexafluoride mixed gas purification recovery gas distribution gas supplementary device comprises a mixed gas recovery system and a gas distribution gas supplementary system; the mixed gas recovery system comprises a first recovery gas pipe, a second recovery gas pipe,a third recovery gas pipe, a recovery port, and a first buffer tank; the gas distribution gas supplementary system comprises a gas distribution main pipe and a gas supplementary pipe. The sulfur hexafluoride mixed gas purification recovery gas distribution gas supplementary device is capable of avoiding defects that conventional SF6 mixed treatment method is complex, consumed time is long, and cost is high. The sulfur hexafluoride mixed gas purification recovery gas distribution gas supplementary device can be used for high voltage switchgears, and especially can be used for heavy maintenanceor disintegration overhaul of SF6 mixed gas insulation high voltage switchgears.
Owner:ELECTRIC POWER RES INST OF STATE GRID ANHUI ELECTRIC POWER +1

Purification, separation and purification device for mixed gas of sulfur hexafluoride and nitrogen gas and sulfur hexafluoride recovery, purification and purification method

The invention provides a purification, separation and purification device for mixed gas of sulfur hexafluoride and nitrogen gas and a sulfur hexafluoride recovery, purification and purification method. A liquid outlet of a liquid nitrogen storage tank passes through a second cooling medium passage, a first cooling medium passage and a dry-type shell-and-tube heat exchanger sequentially and is connected with a nitrogen gas outlet, liquid nitrogen, as a cooling medium, flows out of the liquid nitrogen storage tank, then, passes through a solidifying tank, a liquefaction tank and the dry-type shell-and-tube heat exchanger sequentially and finally is discharged in a gas state, high-temperature gas discharged from a compressor is forcibly cooled in the dry-type shell-and-tube heat exchanger, pressurized gas SF6 can be relatively easily liquefied and then flows into the solidifying tank for low-temperature solidifying. According to the device and the method, the purification, separation andSF6 purification of SF6 / N2 mixed gas are achieved, the recovery rate of SF6 is high, nitrogen gas come from the solidifying tank can be further utilized, cold energy of the liquid nitrogen is fully utilized, and the process is environmentally friendly, energy-saving and emission-reducing, so that the device and the method have extremely high economic and environmental benefits.
Owner:XI AN JIAOTONG UNIV

Dry cleaning method for plasma reaction chamber

The dry cleaning method for plasma reaction chamber is used in metal etching process. After one substrate with metal layer is set inside the plasma reaction chamber and its metal layer is etched, the dry cleaning process is completed after the substrate is removed from the plasma reaction chamber. Plasma formed with oxygen is first used to clean the inner wall of the plasma reaction chamber; plasma formed with chlorine and barium chloride gas is then used to clean the upper and lower electrode inside the plasma reaction chamber; plasma formed with sulfur fluoride gas and oxygen is used to clean the inner wall of the plasma reaction chamber; and oxygen and helium is finally introduced into and pumped from the plasma reaction chamber to remove gas.
Owner:AU OPTRONICS CORP

Apparatus for the generation and supply of fluorine gas

InactiveUS20050161321A1Safe and inexpensive structureCellsSemiconductor/solid-state device manufacturingPhysical chemistryNitrogen fluoride
To provide an apparatus for fluorine gas generation and supply that is disposed in the gas supply system of a semiconductor processing system and that in the event of abnormalities in the apparatus enables back up by a safe and inexpensive structure. An apparatus 30 for the generation and supply of gas is disposed in the gas supply system of a semiconductor processing system. This apparatus 30 contains an electrolytic cell 34 that generates fluorine gas and a cylinder 62 that holds a substitute gas selected from the group consisting of nitrogen fluoride, sulfur fluoride, and chlorine fluoride. The electrolytic cell 34 and cylinder 62 are connected to a gas switching section 56 that selectively supplies a gas utilization section with fluorine gas from the electrolytic cell 34 or with substitute gas from the cylinder 62. A controller 40 controls the gas switching section 56 in such a manner that, upon detection of an abnormal state at the electrolytic cell 34 by an electrolytic cell detector 36, substitute gas is supplied from the cylinder 62 to the gas utilization section.
Owner:LAIR LIQUIDE SA POUR LETUDE & LEXPLOITATION DES PROCEDES GEORGES CLAUDE

Process for detecting sulfur hexafluoride (SF6) gas

The invention relates to a method of measuring the leakage of sulfur hexafluoride, which uses the infrared spectral absorption method and has a high sensibility. The steps are: shining the SF6 sample pond or the point which tend to leak by the infrared light from the infrared source whose band is 1700cm-1,1620cm-1,900cm-1,610cm-1, spectral bandwidth is 2mum, measuring the change of the infrared spectral intensity by the photoelectric detector set on the other side of the measuring point, and getting the SF6 content of the measuring point. The certainty of the measurement is above one per million, the measuring distinguishability can reach to 0.1ppm, and it can increase the measuring certainty through setting low loss optical system and high sensibility photoelectric detector.
Owner:合肥联控科技有限公司

Purification method of crude sulfur hexafluoride product

The invention provides a purification method of a crude sulfur hexafluoride product. The purification method comprises the following steps: cracking to remove impurities; washing to remove impurities;performing alkali washing to remove impurities; performing low-pressure adsorption; performing high-pressure adsorption; performing rectification to remove impurities. One to six stages of water washing towers are arranged, fluorine gas, low-sulfur fluoride and thionyl fluoride in the crude sulfur hexafluoride are effectively removed through multiple times of water washing, the purity of the sulfur hexafluoride is improved, meanwhile, by-product hydrofluoric acid in the water washing process is recycled, generation of waste water is reduced, and waste is turned into wealth. The one to six stages of alkaline washing towers are arranged, HF, CO2 and SO2 gas in sulfur hexafluoride is effectively removed through multiple times of alkaline washing, the purity of sulfur hexafluoride is improved, waste liquid generated by the alkaline washing towers is recycled after being treated with quick lime in an alkaline liquid collecting tank, generation of the waste liquid is avoided, pollution is reduced, and cost is saved.
Owner:FUJIAN DEER TECH CORP

Method for monitoring insulation state of epoxy resin insulating media in sulfur hexafluoride electrical device

The invention discloses a method for monitoring the insulation state of epoxy resin insulating media in a sulfur hexafluoride electrical device. The method comprises the steps of (1) acquiring a gas sample, wherein gas in the sulfur hexafluoride electrical device is acquired to serve as a sample to be detected; (2) detection, wherein the sample to be detected is detected with the gas chromatography, the gas-chromatography-mass spectrometry or the infrared spectroscopy to obtain analysis data of COS in the sample to be detected; (3) comparing the analysis data obtained from the step (2) with standard data of COS so that qualification and quantification of COS in the sulfur hexafluoride electrical device can be achieved and the insulation state of the epoxy resin insulating media in the sulfur hexafluoride electrical device can be judged. With COS serving as characteristic gas, whether solid insulating media, including basin-type insulators, of epoxy resin in the SF[6] electrical device are subjected to discharge erosion can be judged accurately.
Owner:ELECTRIC POWER RES INST OF GUANGDONG POWER GRID

Method of comprehensive exploitation and utilization on atmospheric carbon resources and CO2 equivalent substance

ActiveCN105989564AReduce emissions peaksRegulating the Atmospheric Greenhouse EffectData processing applicationsTechnology managementSulfur hexafluorideHydrocotyle bowlesioides
The invention discloses a method of comprehensive exploitation and utilization on atmospheric carbon resources and CO2 equivalent substance, which is a comprehensive science and technology method by applying physics, chemistry, physical chemistry, biology, biochemistry and the like. Substance such as CO, CO2, hydrocarbons, oxygenated hydrocarbons, hydrofluorocarbon, perfluorocarbon, sulfur hexafluoride and NOx in the atmosphere is captured, sealed, comprehensively developed, deeply processed and recycled, thereby benefiting the mankind, regulating the greenhouse effects, eliminating the haze, mastering the initiative of climate changes, maintaining water-air-ice coexistence climate balance and biodiversity on the earth, creating huge environmental benefits, ecological benefits, social benefits and economic benefits, realizing win-win between economic and social development, environmental protection and climate change handling, and providing inexhaustible new resources and precious wealth for human survival and development.
Owner:雷学军

Automatic heating and aerating device of sulfur hexafluoride cylinder

The invention belongs to the technical field of breakers and combined electrical apparatuses for filling sulfur hexafluoride gas and relates to an automatic heating and aerating device of a sulfur hexafluoride cylinder, which comprises a trolley, the cylinder, a circle-type heater and a control cabinet. The cylinder is inserted into the circle-type heater and fixed with a trolley platform, the heating temperature is selected on an operation panel of the control cabinet, a cylinder body is kept in a certain temperature, and the sulfur hexafluoride gas in the cylinder can be discharged to the maximum extent, and therefore the automatic heating and aerating device of the sulfur hexafluoride cylinder improves gas use ratio, shortens aerating time, saves aerating cost and is safe and convenient to use.
Owner:国网山西省电力公司朔州供电公司

Method of fabricating recess channel in semiconductor device

A method of fabricating a recess channel in a semiconductor device includes forming a hard mask pattern over a substrate, etching the substrate using the hard mask pattern to form first recesses, forming an insulation layer over the hard mask pattern and the first recesses, etching the insulation layer to form spacers on sidewalls of the first recesses and on sidewalls of the hard mask pattern, etching the substrate below the first recesses to form second recesses using a sulfur fluoride containing gas mixture, and removing the hard mask pattern and the spacers.
Owner:SK HYNIX INC

Sulfur hexafluoride decomposition product online chromatographic sampling and gas supplementing device and use method thereof

The invention relates to a sulfur hexafluoride decomposition product online chromatography sampling and gas supplementing device. A front pressure sensor, a front control valve, a booster pump and a rear control valve are connected in parallel on a pipeline between a combined electric appliance and a sulfur hexafluoride online chromatography and recovery device at one time, and the booster pump isprovided with a rear pressure sensor and a sulfur hexafluoride gas cylinder. The method comprises a gas taking test process and a non-gas taking process in use. Through all the structures and cooperation of the two processes, the sulfur hexafluoride can be automatically taken out from the combined electric appliance. The online chromatographic device can be used for analyzing decomposition products, judging the discharge condition of the gas chamber in real time, detecting the pressure of the gas chamber in real time and supplementing gas, so that the stability of the gas chamber is ensured,and the device is suitable for intensive care of the gas chamber with familial defects and gas discharge signals, and is also suitable for online detection of key equipment.
Owner:ELECTRIC POWER SCI & RES INST OF STATE GRID TIANJIN ELECTRIC POWER CO +2

Method for manufacturing lower substrate of liquid crystal display device

A method for improving the tapered angles of the insulating layer and the semiconductor layer of a lower substrate of a thin film transistor liquid crystal display device is disclosed. The method mainly applies an etching gas including a sulfur fluoride compound to etch the insulating layer. After etching, the tapered angle of the insulating layer is improved. Moreover, since the etching gas including a sulfur fluoride compound also results in lateral etching on the semiconductor layer, the step coverage of the subsequent process is improved, too. The method of the present invention can also be applied for manufacturing a multilayered thin film transistor containing a barrier layer, a semiconductor layer, and an insulating layer without delamination, breakage, or collapse. In addition, since the number of the used masks is reduced in the method of the present invention, the cost can be reduced and the process can be simplified.
Owner:AU OPTRONICS CORP

Azeotropic compositions of cyclopentane

This invention relates to compositions of cyclopentane, and a compound selected from the group consisting of hydrofluorocarbons, hydrofluoroethers, or fluorinated sulfur compounds. Specifically these compounds may be selected from the group consisting of tetrafluoroethane, hexafluoropropane, pentafluoropropane, tetrafluoropropane, trifluoropropane, difluoropropane, octafluorobutane, hexafluorobutane, pentafluorobutane, nonafluorobutane, difluorobutane, trifluoro-2-methoxyethane and bis(pentafluoroethyl)sulfide. The compositions, which may be azeotropic or azeotrope-like, may be used as refrigerants, cleaning agents, expansion agents for polyolefins and polyurethanes, aerosol propellants, refrigerants, heat transfer media, gaseous dielectrics, fire extinguishing agents, power cycle working fluids, polymerization media, particulate removal fluids, carrier fluids, buffing abrasive agents or displacement drying agents.
Owner:EI DU PONT DE NEMOURS & CO

Electrified purification treatment device and method for sulfur hexafluoride gas

The invention provides an electrified purification treatment device for sulfur hexafluoride gas. The device at least comprises a gas recovery unit, a gas circulation purification unit, a gas detectionunit, a recharging unit and a vacuumizing unit, wherein the gas recovery unit, the gas circulation purification unit, the gas detection unit and the recharging unit are connected in sequence; the vacuumizing unit, the gas recovery unit, the gas circulation purification unit, the gas detection unit and the recharging unit are all connected with a control unit; and the closing and opening of the vacuumizing unit, the gas recovery unit, the gas circulation purification unit, the gas detection unit and the recharging unit are controlled by the control unit. The invention also provides an electrified purification treatment method for the sulfur hexafluoride gas. According to the invention, the sulfur hexafluoride gas exceeding a standard in a high-voltage switch device can be purified continuously under an electrified state, while normal operation of the high-voltage switch device is not influenced.
Owner:SHENZHEN POWER SUPPLY BUREAU

Aryl sulfur fluoride type fluorination reagent and preparation method thereof

The present invention discloses an aryl sulfur fluoride type fluoro reagent, and a method for preparing the same. The structure of the fluoro reagent is shown as formula (I), wherein R can be selected from carboxy group, carboxylate, substituted or unsubsitituted amic formacyl, nitrile group, sulfonic group, sulphonic acid ester group, single substituent of trifluoromethyl, or the same or different polysubstituting group. The fluoro reagent is large in molecular weight, solid, and suitable for production and transportation. The compound can be applied to the fluoro of various types of functional group, in particular to the double fluoro of ketone, and thus a safe and effective fluoro reagent is provided to the nucleophilic double fluoro reaction.
Owner:APELOA PHARM CO LTD +1

Installation method of SF6 gas breaker

The invention provides an installation method of a sulfur fluoride (SF6) gas breaker and relates to a novel method for installing the SF6 gas breaker. By the method, the SF6 breaker can be directly installed by using the former low-oil-content breaker base and the former cement rod base through the improvement on bases without dismantling the former low-oil-content breaker base. The method is high in working efficiency; the working safety can be guaranteed, the construction amount of civil engineering is reduced, the installation construction period is shortened, the power failure time is reduced and the working safety is guaranteed. The method adopts a frozen expansion resistance technology to avoid an inclined rod of the breaker base caused by temperature variation.
Owner:绥化电业局 +1

Method of using sulfur fluoride for removing surface deposits

The present invention relates to an improved remote plasma cleaning method for removing surface deposits from a surface, such as the interior of a process chamber that is used in fabricating electronic devices. The improvement involves addition of a nitrogen source to the feeding gas mixture comprising an oxygen source and sulfur fluoride.
Owner:MASSACHUSETTS INST OF TECH

Quantitative testing method and system for mass leakage rate of sulfur hexafluoride electrical equipment

The invention discloses a quantitative testing method and system for the mass leakage rate of sulfur hexafluoride electrical equipment. The method comprises the following steps: measuring the volume of sulfur hexafluoride gas leaking from a leakage point of the sulfur hexafluoride electrical equipment within a certain time interval; calculating the absolute gas leakage rate of the leakage point ofthe sulfur hexafluoride electrical equipment, and measuring and recording the field temperature and pressure intensity; and calculating the mass leakage rate of the sulfur hexafluoride. The leaking sulfur hexafluoride is collected with a gas collection cover, and is introduced into a U-shaped measuring tube through a gas-guide tube to increase the gas pressure intensity in the U-shaped measuringtube, so that the liquid level scale drops. The volume of the leaking sulfur hexafluoride can be measured indirectly by reading the change value of the liquid level scale within a certain time interval in order to calculate the mass leakage rate of the leakage point, thereby realizing the rapid and accurate determination of the absolute gas leakage rate at the leakage point of the sulfur hexafluoride electrical equipment. Through comparison with the overall weight loss rate of the electric equipment, the existence of other leakage points in the sulfur hexafluoride electrical equipment can be judged.
Owner:YUNNAN POWER GRID CO LTD ELECTRIC POWER RES INST +1

SF6 gas on-line monitoring system

The invention relates to the technical field of gas monitoring, in particular to an SF6 gas online monitoring system comprising a sulfur hexafluoride gas detector and a monitoring system. A fixed plate is arranged on the surface of the sulfur hexafluoride gas detector; a wall connecting screw is arranged on the surface of the fixed plate, a base plate is arranged on the surface of the sulfur hexafluoride gas detector, a guide groove is formed in the surface of the base plate, a sliding plate is arranged in the guide groove, balls are arranged on the surface of the sliding plate, a telescopic plate is connected to the surface of the guide groove, and the telescopic plate is inserted into the telescopic groove. The beneficial effects of the SF6 gas online monitoring system are that: the sliding type cleaning plate is additionally arranged on the surface of the sulfur hexafluoride gas detector and can slide along the display screen on the surface of the sulfur hexafluoride gas detector toremove ash; telescopic plates are inserted into the upper side and the lower side of the connecting plate on the surface of the cleaning plate to pull the sliding plate, and the extension height of the telescopic plates is adjustable, so that the cleaning plate can be conveniently fixed at different heights.
Owner:南京奥途信息技术有限公司

Method for preparing fluoro alpha-D-arabinofuranose compound

The invention relates to a method for preparing a fluoro alpha-D-arabinofuranose compound. The method comprises the step of carrying out fluorination on substituted alpha-D-arabinofuranose compound (III) by an aryl sulfur fluoride fluoro reagent (II) so as to obtain a 2-deoxidized-2-fluorine substituted alpha-D-arabinofuranose compound (I). Compared with the traditional method, the preparation method has the advantages of simplicity, high product yield, less by-products, easy purification of products and high purity. The fluoro reagent causes less environmental pollution, is easy to store andtransport and is suitable for industrialized production. The reaction process is described in the specification of the invention.
Owner:APELOA PHARM CO LTD +1

Mounting method of 750 KV tank type breaker

The invention relates to the technical field of substation equipment, in particular to a mounting method a 750 KV tank type breaker, comprising following steps: step 101, hoisting a breaker tank body; step 102, hosting a breaker current transformer; step 103, hoisting a breaker bushing and mounting a wiring board; step 104, changing an adsorbent; step 105, inspecting leakage; step 106, evacuating; step 107, injecting sulfur hexafluoride gas. Through standard construction and full-course quality control, the hoisting problem of the 750 KV tank type breaker and the gas leakage problem are solved, and hosting is more stable and safer and accidents are avoided; through leakage inspection, gas leakage may be reduced, environmental pollution may be avoided, the damage of gas leakage to physical health of workers may be avoided, a work environment is safer and more humanized, mounting quality of the breaker is improved, the service life of the breaker is prolonged, and quality benefit is improved.
Owner:XINJIANG POWER TRANSMISSION & TRANSFORMATION ENG +1

Sulfur hexafluoride gas connecting piece

The invention discloses a sulfur hexafluoride gas connecting piece which comprises a cylinder, a column core, a first joint, a second joint and a pressure gage; two ends of the cylinder are open; thecolumn core is arranged in the cylinder; one end of each of the first joint and the second joint is arranged on the cylinder; the pressure gage is arranged at the other end of the first joint; the column core can move in the cylinder in the axial direction of the column core, so that the end part of the column core is selectively propped against the ejection pin of a high pressure equipment joint;a gas guiding chamber is formed between the inner wall of the cylinder and the outer wall of the column core; a gas passage is formed in the column core; and the gas passage, the first joint and thesecond joint communicate with the gas guiding chamber. When the sulfur hexafluoride gas connecting piece needs to be detached from the high pressure equipment joint, at first, the column core is enabled to be separated from the ejection pin of the high pressure equipment joint, the entire pipeline is still in the closed state even if the ejection pin of the high pressure equipment joint cannot reset normally, and the pressure gage displays a higher pressure value, so that a working staff does not carry out next detaching operation to prevent sudden gas leakage.
Owner:GUANGDONG POWER GRID CO LTD +1

A three-position isolating switch

The invention discloses a three-position isolating switch for overcoming the problems that electric field strength between alternative and opposite isolating fractures of the existing three-position isolating switch is higher, the insulating strength requirement can be satisfied by only charging high-pressure sulfur hexafluoride gas, and a gear rack which is adopted for meshing drive has big noises, and bad security and reliability; a middle fixed contact adopts a hyperbola body, a telescopic field control spherical conductive cover assembly is mounted in a hole in an isolating fixed contact,wherein the hole is connected with a movable contact and is in an insolating fixed contact, and a brass nut is matched with an insulating screw to form the screw drive; compared with the prior art, the three-position isolating switch has the beneficial effects that the electric field distribution is improved to reduce the electric field strength between alternative and opposite isolating fractures and to improve the insulating performance; the three-position isolating switch is suitable for low-pressure environments so as to reduce the use of the sulfur hexafluoride gas and to improve the security of the product; and since the movable contact can move stably and is free from noise in the motion process, the service life of the machinery product is improved, and the operation of the deviceis more reliable.
Owner:沈阳华利能源设备制造有限公司

Anti-vibration device for switch rocker of sulture hexafluoride gas density relay

This invention relates to a switch shockproof device used in an oil-free shockproof expansion tube sulfur fluoride gas density relay including a mandril and a switch sway bar, in which, one end of the expansion tube is connected on a fixed frame, the other end is connected on a connection base, the mandril is mounted on the connection base, the switch sway bar is installed on a microswitch set on the fixed base to drive it characterizing that the head of the mandril is opened with a groove, a long hole is set on the switch sway bar, the groove is inserted into the long hole to move along it to drive the sway bar.
Owner:上海珂利电气有限公司

Sulfur hexafluoride degradation treatment device based on gliding arc discharge and method thereof

The invention discloses a sulfur hexafluoride degradation treatment device based on gliding arc discharge and a method thereof. The sulfur hexafluoride degradation treatment device comprises a spiral electrode spray gun, and the spiral electrode spray gun is connected with a host through a cable at the tail of the spiral electrode spray gun; the cable comprises a high-voltage wire, a grounding wire and a spray gun gas inlet pipe, and is used for providing high-frequency voltage and introducing sulfur hexafluoride gas into a reactor in the spiral electrode spray gun; high-frequency discharge occurs between a high-voltage electrode and a grounding electrode in the spiral electrode spray gun, dense plasmas are generated in a discharge area, and sulfur hexafluoride gas collides with the plasmas in the discharge area to be ionized and decomposed; the front end of the spiral electrode spray gun is connected with a quartz tube, and the other end of the quartz tube is connected with an alkali liquor absorption tank which is used for absorbing toxic acid gas in decomposition tail gas of sulfur hexafluoride. According to the invention, the technical problems that the sulfur hexafluoride gas is only recovered and is not degraded or the degraded sulfur hexafluoride gas is low in treatment capacity, low in degradation rate and free of a tail gas collecting device at the present stage can be solved.
Owner:HUBEI UNIV OF TECH
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