236 results about "Sulfur fluoride" patented technology

The invention discloses a sulfur hexafluoride mixed gas purification recovery gas distribution gas supplementary device. The sulfur hexafluoride mixed gas purification recovery gas distribution gas supplementary device comprises a mixed gas recovery system and a gas distribution gas supplementary system; the mixed gas recovery system comprises a first recovery gas pipe, a second recovery gas pipe,a third recovery gas pipe, a recovery port, and a first buffer tank; the gas distribution gas supplementary system comprises a gas distribution main pipe and a gas supplementary pipe. The sulfur hexafluoride mixed gas purification recovery gas distribution gas supplementary device is capable of avoiding defects that conventional SF6 mixed treatment method is complex, consumed time is long, and cost is high. The sulfur hexafluoride mixed gas purification recovery gas distribution gas supplementary device can be used for high voltage switchgears, and especially can be used for heavy maintenanceor disintegration overhaul of SF6 mixed gas insulation high voltage switchgears.

The dry cleaning method for plasma reaction chamber is used in metal etching process. After one substrate with metal layer is set inside the plasma reaction chamber and its metal layer is etched, the dry cleaning process is completed after the substrate is removed from the plasma reaction chamber. Plasma formed with oxygen is first used to clean the inner wall of the plasma reaction chamber; plasma formed with chlorine and barium chloride gas is then used to clean the upper and lower electrode inside the plasma reaction chamber; plasma formed with sulfur fluoride gas and oxygen is used to clean the inner wall of the plasma reaction chamber; and oxygen and helium is finally introduced into and pumped from the plasma reaction chamber to remove gas.

To provide an apparatus for fluorine gas generation and supply that is disposed in the gas supply system of a semiconductor processing system and that in the event of abnormalities in the apparatus enables back up by a safe and inexpensive structure.

An apparatus 30 for the generation and supply of gas is disposed in the gas supply system of a semiconductor processing system. This apparatus 30 contains an electrolytic cell 34 that generates fluorine gas and a cylinder 62 that holds a substitute gas selected from the group consisting of nitrogen fluoride, sulfur fluoride, and chlorine fluoride. The electrolytic cell 34 and cylinder 62 are connected to a gas switching section 56 that selectively supplies a gas utilization section with fluorine gas from the electrolytic cell 34 or with substitute gas from the cylinder 62. A controller 40 controls the gas switching section 56 in such a manner that, upon detection of an abnormal state at the electrolytic cell 34 by an electrolytic cell detector 36, substitute gas is supplied from the cylinder 62 to the gas utilization section.

A process for recovering SF6 from electric distribution equipment includes adsorbing the gas mixture containing SF6 in said electric distribution equipment, liquefying the gas mixture to obtain liquefied SF6, and evaporating it to obtain high-purity SF6 gas. Its apparatus is composed of washing filter, compressor, and water pool, which are serially communicated.

The invention provides a purification method of a crude sulfur hexafluoride product. The purification method comprises the following steps: cracking to remove impurities; washing to remove impurities;performing alkali washing to remove impurities; performing low-pressure adsorption; performing high-pressure adsorption; performing rectification to remove impurities. One to six stages of water washing towers are arranged, fluorine gas, low-sulfur fluoride and thionyl fluoride in the crude sulfur hexafluoride are effectively removed through multiple times of water washing, the purity of the sulfur hexafluoride is improved, meanwhile, by-product hydrofluoric acid in the water washing process is recycled, generation of waste water is reduced, and waste is turned into wealth. The one to six stages of alkaline washing towers are arranged, HF, CO2 and SO2 gas in sulfur hexafluoride is effectively removed through multiple times of alkaline washing, the purity of sulfur hexafluoride is improved, waste liquid generated by the alkaline washing towers is recycled after being treated with quick lime in an alkaline liquid collecting tank, generation of the waste liquid is avoided, pollution is reduced, and cost is saved.

The invention belongs to the technical field of breakers and combined electrical apparatuses for filling sulfur hexafluoride gas and relates to an automatic heating and aerating device of a sulfur hexafluoride cylinder, which comprises a trolley, the cylinder, a circle-type heater and a control cabinet. The cylinder is inserted into the circle-type heater and fixed with a trolley platform, the heating temperature is selected on an operation panel of the control cabinet, a cylinder body is kept in a certain temperature, and the sulfur hexafluoride gas in the cylinder can be discharged to the maximum extent, and therefore the automatic heating and aerating device of the sulfur hexafluoride cylinder improves gas use ratio, shortens aerating time, saves aerating cost and is safe and convenient to use.

The invention relates to a sulfur hexafluoride decomposition product online chromatography sampling and gas supplementing device. A front pressure sensor, a front control valve, a booster pump and a rear control valve are connected in parallel on a pipeline between a combined electric appliance and a sulfur hexafluoride online chromatography and recovery device at one time, and the booster pump isprovided with a rear pressure sensor and a sulfur hexafluoride gas cylinder. The method comprises a gas taking test process and a non-gas taking process in use. Through all the structures and cooperation of the two processes, the sulfur hexafluoride can be automatically taken out from the combined electric appliance. The online chromatographic device can be used for analyzing decomposition products, judging the discharge condition of the gas chamber in real time, detecting the pressure of the gas chamber in real time and supplementing gas, so that the stability of the gas chamber is ensured,and the device is suitable for intensive care of the gas chamber with familial defects and gas discharge signals, and is also suitable for online detection of key equipment.

A method for fabricating one or more conductive lines in an integrated circuit includes providing a layer of copper containing conductive metal in a multi-layer structure fabricated upon a wafer, providing a first hard mask layer over the layer of copper containing conductive metal, performing a first sputter etch of first hard mask layer using a chlorine-based plasma or a sulfur fluoride-based plasma, and performing a second sputter etch of first hard mask layer using a second plasma, wherein a portion of the layer of copper containing conductive metal residing below a portion of the first hard mask layer that remains after the second sputter etch forms the one or more conductive lines. In one embodiment, the second plasma is a fluorocarbon-based plasma.

The present invention discloses an aryl sulfur fluoride type fluoro reagent, and a method for preparing the same. The structure of the fluoro reagent is shown as formula (I), wherein R can be selected from carboxy group, carboxylate, substituted or unsubsitituted amic formacyl, nitrile group, sulfonic group, sulphonic acid ester group, single substituent of trifluoromethyl, or the same or different polysubstituting group. The fluoro reagent is large in molecular weight, solid, and suitable for production and transportation. The compound can be applied to the fluoro of various types of functional group, in particular to the double fluoro of ketone, and thus a safe and effective fluoro reagent is provided to the nucleophilic double fluoro reaction.

The invention provides an installation method of a sulfur fluoride (SF6) gas breaker and relates to a novel method for installing the SF6 gas breaker. By the method, the SF6 breaker can be directly installed by using the former low-oil-content breaker base and the former cement rod base through the improvement on bases without dismantling the former low-oil-content breaker base. The method is high in working efficiency; the working safety can be guaranteed, the construction amount of civil engineering is reduced, the installation construction period is shortened, the power failure time is reduced and the working safety is guaranteed. The method adopts a frozen expansion resistance technology to avoid an inclined rod of the breaker base caused by temperature variation.

The present invention relates to an improved remote plasma cleaning method for removing surface deposits from a surface, such as the interior of a process chamber that is used in fabricating electronic devices. The improvement involves addition of a nitrogen source to the feeding gas mixture comprising an oxygen source and sulfur fluoride.

The invention relates to a method for preparing a fluoro alpha-D-arabinofuranose compound. The method comprises the step of carrying out fluorination on substituted alpha-D-arabinofuranose compound (III) by an aryl sulfur fluoride fluoro reagent (II) so as to obtain a 2-deoxidized-2-fluorine substituted alpha-D-arabinofuranose compound (I). Compared with the traditional method, the preparation method has the advantages of simplicity, high product yield, less by-products, easy purification of products and high purity. The fluoro reagent causes less environmental pollution, is easy to store andtransport and is suitable for industrialized production. The reaction process is described in the specification of the invention.

The invention relates to the technical field of substation equipment, in particular to a mounting method a 750 KV tank type breaker, comprising following steps: step 101, hoisting a breaker tank body; step 102, hosting a breaker current transformer; step 103, hoisting a breaker bushing and mounting a wiring board; step 104, changing an adsorbent; step 105, inspecting leakage; step 106, evacuating; step 107, injecting sulfur hexafluoride gas. Through standard construction and full-course quality control, the hoisting problem of the 750 KV tank type breaker and the gas leakage problem are solved, and hosting is more stable and safer and accidents are avoided; through leakage inspection, gas leakage may be reduced, environmental pollution may be avoided, the damage of gas leakage to physical health of workers may be avoided, a work environment is safer and more humanized, mounting quality of the breaker is improved, the service life of the breaker is prolonged, and quality benefit is improved.

The invention discloses a sulfur hexafluoride gas connecting piece which comprises a cylinder, a column core, a first joint, a second joint and a pressure gage; two ends of the cylinder are open; thecolumn core is arranged in the cylinder; one end of each of the first joint and the second joint is arranged on the cylinder; the pressure gage is arranged at the other end of the first joint; the column core can move in the cylinder in the axial direction of the column core, so that the end part of the column core is selectively propped against the ejection pin of a high pressure equipment joint;a gas guiding chamber is formed between the inner wall of the cylinder and the outer wall of the column core; a gas passage is formed in the column core; and the gas passage, the first joint and thesecond joint communicate with the gas guiding chamber. When the sulfur hexafluoride gas connecting piece needs to be detached from the high pressure equipment joint, at first, the column core is enabled to be separated from the ejection pin of the high pressure equipment joint, the entire pipeline is still in the closed state even if the ejection pin of the high pressure equipment joint cannot reset normally, and the pressure gage displays a higher pressure value, so that a working staff does not carry out next detaching operation to prevent sudden gas leakage.

The invention discloses a three-position isolating switch for overcoming the problems that electric field strength between alternative and opposite isolating fractures of the existing three-position isolating switch is higher, the insulating strength requirement can be satisfied by only charging high-pressure sulfur hexafluoride gas, and a gear rack which is adopted for meshing drive has big noises, and bad security and reliability; a middle fixed contact adopts a hyperbola body, a telescopic field control spherical conductive cover assembly is mounted in a hole in an isolating fixed contact,wherein the hole is connected with a movable contact and is in an insolating fixed contact, and a brass nut is matched with an insulating screw to form the screw drive; compared with the prior art, the three-position isolating switch has the beneficial effects that the electric field distribution is improved to reduce the electric field strength between alternative and opposite isolating fractures and to improve the insulating performance; the three-position isolating switch is suitable for low-pressure environments so as to reduce the use of the sulfur hexafluoride gas and to improve the security of the product; and since the movable contact can move stably and is free from noise in the motion process, the service life of the machinery product is improved, and the operation of the deviceis more reliable.

This invention relates to a switch shockproof device used in an oil-free shockproof expansion tube sulfur fluoride gas density relay including a mandril and a switch sway bar, in which, one end of the expansion tube is connected on a fixed frame, the other end is connected on a connection base, the mandril is mounted on the connection base, the switch sway bar is installed on a microswitch set on the fixed base to drive it characterizing that the head of the mandril is opened with a groove, a long hole is set on the switch sway bar, the groove is inserted into the long hole to move along it to drive the sway bar.

The invention discloses a sulfur hexafluoride degradation treatment device based on gliding arc discharge and a method thereof. The sulfur hexafluoride degradation treatment device comprises a spiral electrode spray gun, and the spiral electrode spray gun is connected with a host through a cable at the tail of the spiral electrode spray gun; the cable comprises a high-voltage wire, a grounding wire and a spray gun gas inlet pipe, and is used for providing high-frequency voltage and introducing sulfur hexafluoride gas into a reactor in the spiral electrode spray gun; high-frequency discharge occurs between a high-voltage electrode and a grounding electrode in the spiral electrode spray gun, dense plasmas are generated in a discharge area, and sulfur hexafluoride gas collides with the plasmas in the discharge area to be ionized and decomposed; the front end of the spiral electrode spray gun is connected with a quartz tube, and the other end of the quartz tube is connected with an alkali liquor absorption tank which is used for absorbing toxic acid gas in decomposition tail gas of sulfur hexafluoride. According to the invention, the technical problems that the sulfur hexafluoride gas is only recovered and is not degraded or the degraded sulfur hexafluoride gas is low in treatment capacity, low in degradation rate and free of a tail gas collecting device at the present stage can be solved.