The invention discloses a
phosphorane mixed gas filling method, and relates to the technical field of mixed gases, the
phosphorane mixed gas filling method comprises instrument pretreatment, step-by-step filling, post-vacuum treatment, quality detection and
safety monitoring, and the
phosphorane mixed gas filling method has the advantages that a mixed
accelerant is added into a filling pipeline in the phosphorane and
argon filling process, so that the filling efficiency is improved; by providing a large number of active sites and unique gas
diffusion channels, uniform mixing of phosphorane and
argon can be accelerated, the uniformity and accuracy of mixed gas matching are improved, in the process of action of an
accelerant and gas,
argon molecules are fully contacted and collided with dissociated and adsorbed
phosphorus atoms under the guidance of a special structure of a nano-porous material, and the
phosphorus atoms are separated and adsorbed. The mixed
accelerant is added to promote rapid and uniform mixing of the
phosphorus and the
alkane, stable and accurate-proportion phosphorus and
alkane mixed gas is formed, and in the whole process, the mixed accelerant continuously plays a role, so that the uniform mixing efficiency of the mixed gas in the filling process is greatly improved compared with a traditional mode.