Broadband temperature-insensitive optical waveguide device

Abstract

The invention discloses a broadband temperature-insensitive optical waveguide device, which comprises a core area and a cladding in mutual lamination, wherein the core area adopts silicon; the cladding adopts titanium dioxide; the other surface of the cladding is provided with a coverage layer; and the coverage layer adopts a material with a positive calorescence coefficient. The light intensity limiting factor of each structure layer in the optical waveguide is influenced by the wavelength, after the wavelength become larger, an evanescent field of the light transmitted in the optical waveguide becomes larger, and correspondingly, the light intensity limiting factor in the cladding becomes larger. Thus, corresponding to different wavelengths, the light intensity limiting factor in each layer changes, as the wavelength become larger, the total calorescence coefficient of the optical waveguide does not monotonously change along with the temperature, a curve similar to a parabolic change is formed, and temperature insensitivity in a broad wavelength range can be realized.

Description

technical field [0001] The invention relates to the field of silicon-based optical waveguides, in particular to a novel temperature-insensitive optical waveguide device with a wide wavelength range. Background technique [0002] Due to the high thermo-optic characteristics of silicon materials, the micro-resonator based on silicon waveguide on SOI insulator will affect its resonance characteristics due to the change of material refractive index caused by high temperature during operation, resulting in the drift of resonance wavelength. In order to achieve temperature insensitivity domestic There are many methods outside, which are mainly divided into active and passive. The active method is realized by adding a feedback thermoelectric temperature control system. [1] Realization, this method will generate additional power consumption, which is not conducive to silicon-based integration; passive methods include: Guha et al. proposed in 2010 the method of using Mach-Zehnder int...

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Problems solved by technology

[0009] In order to solve the characteristic that the existing optical waveguide is sensitive to temperature in a wide wavelength range, aiming at the existing optical waveguide design method that achieves single-wavelength temperature insensitivity by superimposing titanium dioxide as cladding material [4] , the

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