Broadband temperature-insensitive optical waveguide device
An optical waveguide and broadband technology, which is applied in the field of temperature-insensitive optical waveguide devices in a wide wavelength range, and can solve problems such as temperature sensitivity and broadband temperature insensitivity
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[0030] The technical solution of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments, and the described specific embodiments are only for explaining the present invention, and are not intended to limit the present invention.
[0031] The main design idea of the broadband temperature-insensitive optical waveguide device of the present invention is: on the basis of superimposing a layer of titanium dioxide, a material with a negative thermo-optic coefficient, such as titanium dioxide, on the silicon waveguide as a cladding layer, by superimposing a layer of material with a positive thermo-optic coefficient material to achieve temperature insensitivity over a wide wavelength range.
[0032] A broadband temperature-insensitive optical waveguide device proposed by the present invention comprises mutually stacked core regions and cladding layers, the core region is made of silicon, the cladding layer...
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