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127 results about "Cylindrical waveguide" patented technology

Double-cavity excitation enhanced microwave plasma torch generation device

The invention relates to a double-cavity excitation enhanced microwave plasma torch generation device, and belongs to the technical field of microwave plasma. The device comprises a microwave magnetron, a circulator, a directional coupler, a microwave plasma coupling waveguide, a cylindrical waveguide, an igniter and a discharge tube. After the microwave magnetron, the circulator and the directional coupler are sequentially connected in series, the directional coupler is connected with the microwave plasma coupling waveguide. The cylindrical waveguide chamber is additionally arranged in the axial direction of the discharge tube perpendicular to a compression rectangular waveguide; a thermal resistance waveguide in the microwave plasma coupling waveguide effectively isolates the influence of thermal release of plasma discharge on a whole system; the igniter makes the whole system operated by a single person to complete a series of processes of ignition, excitation and maintenance, and the ignition success rate is close to 100% under the condition that the no-load output of a microwave source is low. Plasma torch afterglow with a larger volume action area can be obtained by increasing the maximum power of a plasma torch, so that the device can operate stably and reliably for a long time, and can be used in various relevant fields such as combustion assistance, nano material synthesis, waste gas treatment and high-temperature-resistant material surface modification.
Owner:李容毅

Apparatus for plasma processing

A plasma processing apparatus is provided. The plasma processing apparatus can generate a uniform plasma in a processing container to perform a uniform processing on even a large-diameter wafer. The apparatus includes a processing container 4 shaped to be a cylinder with a bottom and accommodating amounting table 10 for mounting a wafer W thereon, a silica plate 8 for covering an upper opening of the processing container 4 in an airtight manner, a microwave supplier 50 for supplying a microwave in TE11 mode and a cylindrical waveguide 52 having one end connected to the microwave supplier 50 to extend toward the silica plate 8 and also having an interior waveguide space. The apparatus further includes a radial waveguide box 54 connected to the other end of the cylindrical waveguide 52. The radial waveguide box 54 is shaped to extend from the other end of the cylindrical waveguide 52 radially outward in the form of a flange and successively extend toward a lid body downward as a sidewall to define an interior waveguide space. The apparatus further includes a disc-shaped slot antenna 60 arranged along the silica plate 8 to cover an opening at the lower end of the radial waveguide box 54 and have a plurality of slots 101, a circularly polarized wave converter 56 disposed in the cylindrical waveguide 52 between the microwave supplier 50 and the radial waveguide box 54 to rotate the TE11-mode microwave provided from the supplier 50 about an axis of the cylindrical waveguide 52 and send the rotating microwave to the radial waveguide box 54.
Owner:TOKYO ELECTRON LTD +3

Measuring system and measuring method for thickness of water film on inner wall of humidity sensor by adopting microwave perturbation method

The invention discloses a measuring system and a measuring method for thickness of a water film on an inner wall of a humidity sensor by adopting a microwave perturbation method. The measuring system comprises a signal processing controller, a sweep frequency signal source, an isolator, a power divider, a circulator, a microwave measurement resonant cavity, a resonant frequency scanning module, a pressure gage and a thermometer. The measuring method comprises the following steps: measuring resonant frequency of the microwave measurement resonant cavity under TE111 mode; calculating the resonant frequency of the microwave measurement resonant cavity under TE111 mode without the water film; calculating resonant frequency shift caused by the water film; solving the thickness of the water film on the inner wall of the humidity sensor under TE111 mode. The measuring system provided by the invention works on the basis of the TE111 mode of the cylindrical waveguide resonant cavity, is used for quickly and accurately measuring the thickness of the water film on the inner wall of the humidity sensor and brings convenience in eliminating the measuring error of the humidity measuring result caused by the thickness of the water film and increasing the humidity measuring precision.
Owner:NORTH CHINA ELECTRIC POWER UNIV (BAODING)

K-waveband coaxial relativistic backward wave oscillator

The invention discloses a K-waveband coaxial relativistic backward wave oscillator. The oscillator comprises positive electrode, a negative electrode, an electron beam guide grid mesh and a coaxial inner conductor, wherein the positive electrode is a cylindrical waveguide cavity containing a slow-wave structure; the negative electrode is arranged in the cylindrical waveguide cavity and connected with one end plane of the positive electrode through an insulator; the electron beam guide grid mesh is arranged in the cylindrical waveguide cavity and positioned in the downstream of the electron transmitting end of the negative electrode; the coaxial inner conductor adopts a cylindrical structure; one end of the coaxial inner conductor is arranged in the cylindrical waveguide cavity while the other end of the coaxial inner conductor is connected with the other end plane of the positive electrode through a metal bracket; and a coaxial structure is formed by the coaxial inner conductor, the negative electrode and the cylindrical waveguide cavity. According to the K-waveband coaxial relativistic backward wave oscillator, the electron beam guide grid mesh with the electron beam transmittance of greater than 90% is adopted for guiding electron beams to enter a beam interaction region, so that the required external magnetic field intensity is lowered, the guide magnetic field required by a device is reduced to 0.5T, the huge size of the guide magnetic field system on the exterior of the device is reduced, and requirement on the energy source supply is reduced.
Owner:INST OF APPLIED ELECTRONICS CHINA ACAD OF ENG PHYSICS +1

Energy coupling device suitable for winding double comb teeth slow wave structure

An energy coupling device suitable for a winding double comb teeth slow wave structure, belonging to the technical field of vacuum electrons, comprises an in-line double comb teeth loaded cylindrical waveguide (4) and a double-ridge loaded rectangular waveguide (3); the in-line double comb teeth loaded cylindrical waveguide (4) is composed of a plurality of double-ridge loaded cylindrical waveguide sheets having equal diameter and being coaxially superposed together; wherein the double-ridge loaded cylindrical waveguide sheets at even digit positions or odd digit positions have same ridge height, the double-ridges loaded by all the cylindrical waveguide sheets form the in-line double comb teeth structure with gradually reduced comb teeth height; and the double-ridge loaded rectangular waveguide (3) is connected with the in-line double comb teeth loaded cylindrical waveguide (4) by a round metal short-circuit board having an input-output window. The energy coupling device suitable for the winding double comb teeth slow wave structure implements that microwave signal energy can be coupled into the winding double comb teeth slow wave structure well, the amplified microwave signal energy can be perfectly extracted from the winding double comb teeth slow wave structure, and simultaneously, the energy coupling device is easy to be connected with the prior standard waveguide devices.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Debugging-free circular waveguide screw circular polarizer

The invention discloses a debugging-free circular waveguide screw circular polarizer. A metal wall of a cylindrical waveguide cavity is provided with integral boss mounting plates which are fixedly linked to a cylindrical waveguide body with the same arc; each boss mounting plate is provided with screw group phase regulating elements which are in sinusoidal distribution in height and are arrayed at intervals on a boss plane; and each integral boss mounting plate manufactured with the screw group phase regulating elements faces radially towards a cylindrical waveguide central line symmetrically, thereby forming the circular waveguide screw circular polarizer. According to the invention, through utilizing the structures of the screw group phase regulating elements which are in sinusoidal distribution and are arrayed at intervals on the radially symmetrical integral boss mounting plates, the conversion from microwave linear polarization to circular polarization is realized, the structure is simple, the loss consumption is less, and the power capacity is great. The integral screw group structure can be integrally manufactured and completed through the integral boss mounting plate of which the manufacturing accuracy is easy to ensure and manufacturing consistency is good, and the problems that the requirements for manufacturing tolerance by a millimeter wave high-performance circular polarizer are very rigorous, and the manual debugging difficulty is great are solved.
Owner:10TH RES INST OF CETC

Method for measuring inner wall water film thickness of microwave humidity sensor on basis of linear fitting

The invention discloses a method for measuring the inner wall water film thickness of a microwave humidity sensor on the basis of linear fitting. The measuring method comprises the following steps that the resonant frequency of a microwave measurement resonant cavity in a TE111 mode on the condition that no water film exists is calculated; the water film thickness and the corresponding frequency deviation caused by the water film thickness are calculated, wherein 0<hi<=200 micrometers, and 0<i<=N; linear fitting is conducted on the water film thickness hi and the corresponding frequency deviation deltaf<w-1,i> caused by the water film thickness; the resonant frequency of the microwave measurement resonant cavity in the TE111 mode is measured; the resonant frequency deviation caused by the water film is calculated; the water film thickness is calculated through a linear relation between the water film thickness and the frequency deviation caused by the water film thickness. According to the method, the water film thickness hi and the corresponding frequency deviation deltaf<w-1,i> caused by the water film thickness present the linear relation on the basis of the work of the cylindrical waveguide resonant cavity in the TE111 mode, the inner wall water film thickness of a wet steam humidity sensor is quickly and accurately measured, and convenient conditions are provided for eliminating measuring errors brought by the water film thickness on a humidity measuring result and improving the humidity measuring precision.
Owner:NORTH CHINA ELECTRIC POWER UNIV (BAODING)

Bionic optical compound eye of integrated structure

InactiveCN103293570AAvoid defectsConvenient high-precision couplingLensPhotovoltaic detectorsCoupling
A bionic optical compound eye of an integrated structure belongs to a microstructural optical component and an application field of the microstructural optical component. The bionic optical compound eye is arranged in an ommatidium array according to certain geometric rules of hexagons, squares and the like. Ommatidiums include a micro lens, a crystal cone and a cylindrical waveguide which are coaxial and arranged along the optical axis or the Z axis from the left to the right. No physical distance is arranged between the plano-convex lens and the crystal cone and between the crystal cone and the cylindrical waveguide along the Z axis so as to form a whole. The micro lens can be seen as a plano-convex thin lens. The length from the top end of the micro lens to the tail end of the crystal cone is the focal length of a spherical refraction surface having the same curvature radius and refraction rate as the micro lens sphere. An image space principal point and a focal point of the ommatidiums of the integrated bionic optical compound eye are closely relevant to the length of the cylindrical waveguide. By applying the bionic optical compound eye of the integrated structure to a photoelectric detection system, a photoelectronic imaging system and the like, the system size can be reduced, the system weight is reduced, and complexity of coupling of the bionic optical compound eye with an image sensor or a photoelectric detector can be reduced.
Owner:NANCHANG HANGKONG UNIVERSITY

Method of Generation of Pressure Pulsations and Apparatus For Implementation of This Method

The method of generation of pulsations of liquid jet consisting in that acoustic pulsations generated by acoustic actuator act directly or indirectly on the pressure liquid in acoustic chamber; generated pressure pulsations are amplified by mechanical amplifier of pulsations and transferred by liquid waveguide fitted with pressure liquid feed to the nozzle and/or nozzle system. Resonant natural frequency of the acoustic system can be matched to the frequency of acoustic pulsations by means of a tuneable resonant chamber. An apparatus is used for implementation of this method comprising the acoustic system, consisting of acoustic actuator (1) that consists advantageously of electromechanical transducer (10) and cylindrical waveguide (11), an acoustic chamber (2) which internal volume being filled with stationary pressure liquid (3), a mechanical amplifier of pulsations (4), and liquid waveguide (6) that is usually metal tubing or hose or combination of both; said acoustic chamber (2) is fitted with mechanical amplifier of pulsations (4) that is connected with the nozzle and/or nozzle system (7) by means of liquid waveguide (6) that is fitted with pressure liquid feed (5). The acoustic system can be complemented with tuneable resonant chamber (9) allowing tuning up of resonant natural frequency of the acoustic system to the driving frequency of pressure pulsations.
Owner:INST OF GEONICS ASCR

Double-clad layer scintillation optical fiber structure for super-long-distance radiation sensing

The invention discloses a double-clad layer scintillation optical fiber structure for super-long-distance radiation sensing. The double-clad layer scintillation optical fiber structure comprises a fiber core, an inner clad layer, an outer clad layer, a coating layer and the like; the fiber core, the inner clad layer, the outer clad layer and the coating layer are cylindrical waveguides which are concentric with each other, the outer diameters of the cylindrical waveguides being sequentially increased; the refractive indexes of the fiber core, the inner clad layer, the outer clad layer and thecoating layer are sequentially reduced; the inner clad layer is doped with scintillating substances such as cerium, terbium and europium; high-energy rays act on the scintillating substances of the inner clad layer, so that fluorescent light can be generated; and the fluorescent light is subjected to total reflection and multi-mode transmission in the inner clad layer; part of the fluorescent light is subjected to single-mode low-loss transmission in the fiber core; and the transmission distance of the fluorescent light can reach tens of kilometers. With the double-clad layer scintillation optical fiber structure for the super-long-distance radiation sensing of the invention adopted, the defects of short sensing distance and low sensitivity of a common single-clad layer scintillation optical fiber can be eliminated. The double-clad layer scintillation optical fiber structure has the advantages of long detection distance, high corrosion resistance, low cost and easiness in preparation.With the double-clad layer scintillation optical fiber structure adopted, long-distance and distributed radiation dose monitoring and analysis can be realized.
Owner:NANKAI UNIV

Cylindrical waveguide microwave cavity for rubidium clock

The invention discloses a cylindrical waveguide microwave cavity for a rubidium clock and belongs to the technical field of electronics. The cylindrical waveguide microwave cavity comprises a cylindrical waveguide tube (2) with an upper end face open, an atom absorbing bulb (3) arranged in the cylindrical waveguide tube (2), and a photoelectric component (1) arranged at an opening of a groove of the waveguide tube (2). A metal adjusting screw (4) movably connected with the waveguide tube (2) is horizontally arranged on the lateral side of the upper portion of the waveguide tube (2), and a light permeable hole (5) is reserved in the middle of the bottom of the waveguide tube. By the above arrangement, the cylindrical waveguide microwave cavity overcomes the defect that an existing microwave cavity cannot meet the requirements of small size, simple structure, batch production, high accuracy and capability of effectively suppressing microwave leakage at the same time, and is free of medium filing and simple structure, and requirements for processing accuracy of appearance size of the microwave cavity and size of the atom absorbing bulb in the microwave cavity are low. Besides, the cylindrical waveguide microwave cavity is simple to assemble and debug and favorable for batch production of the rubidium clocks.
Owner:CHENGDUSCEON ELECTRONICS

Ultra-wideband terahertz Brewster vacuum window and production method thereof

The invention discloses an ultra-wideband terahertz Brewster vacuum window and a production method thereof. The ultra-wideband terahertz Brewster vacuum window adopts a window plate supporting frame, wherein the window plate supporting frame comprises an elliptical bottom surface and a circular groove; through the elliptical bottom surface, an elliptical section of a cylindrical waveguide is welded, and through the circular groove, a circular window plate is welded, so that electromagnetic wave is propagated from the cylindrical waveguide to the circular window plate; during welding of the circular window plate, stress distribution is relatively uniform, and when the circular window plate is welded with the window plate supporting frame, the influence of stress can be reduced to avoid cracking; a rectangular through hole is formed in the window plate supporting frame, and the influence of the stress can be reduced when a passing condition of the wave is met, so that welding success rate is greatly increased; the structures are connected in a welding manner so as to meet a sealing vacuum requirement; the thickness of the circular window plate meets a requirement that reflected wave and the re-refracted wave are counteracted with each other, so that the transmission efficiency is improved; the ultra-wideband terahertz Brewster vacuum window can achieve ultra-wideband transmission of the electromagnetic wave within a terahertz wave band, has good vacuum sealing performance, and has the advantages of easy production and low price.
Owner:PEKING UNIV
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