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Terahertz wave adjustable narrow band filter based on silicon-based photonic crystal structure

A photonic crystal and filter technology, applied in impedance networks, electrical components, multi-terminal-pair networks, etc., can solve the problems of narrow filter bandwidth, adjustable frequency range, harsh manufacturing process requirements, and complex modulation mechanisms, and achieve precise, fast and reliable performance. The effect of adjustment, absorption loss and low cost

Inactive Publication Date: 2012-01-18
CHINA JILIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, the schemes for realizing tunable terahertz wave filters mainly include: introducing variable refraction dielectric layers such as ferroelectric chips and liquid crystals into the multilayer dielectric film photonic crystal structure, and adjusting the filtering frequency by controlling the device temperature and electrode voltage. This type of filter has a narrow filtering bandwidth and a large adjustable frequency range, but its structural material has a large absorption of terahertz waves, and the modulation mechanism is complex and difficult to modulate; the other is to use light Control, electric control or temperature control can change the resonance characteristics of the metamaterial structure to realize an adjustable filter, but this type of filter often constitutes a band-stop filter instead of a more commonly used band-pass filter. The device manufacturing process is demanding and the device Great absorption of terahertz waves

Method used

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  • Terahertz wave adjustable narrow band filter based on silicon-based photonic crystal structure
  • Terahertz wave adjustable narrow band filter based on silicon-based photonic crystal structure
  • Terahertz wave adjustable narrow band filter based on silicon-based photonic crystal structure

Examples

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Effect test

Embodiment 1

[0013] Embodiment 1: refer to figure 1 Schematic diagram, select a high-resistance silicon wafer with a thickness of 500μm±10μm (resistivity greater than 1000 ohm / cm) and cut it into a square piece of 2.2mm×2.2mm by a dicing machine; the ring piece is machined with a copper sheet of 0.6mm±0.2mm The inner hole is 1.9mm×1.9mm; the spring sheet is processed into a spring steel sheet with an inner hole of 1.9mm×1.9mm and an outer dimension of 2.2mm×2.2mm (unstressed length 1.2mm, minimum force length is 0.6). Put 6 square high-resistance silicon chips, ring-shaped copper sheets and a piece of spring alternately into the metal shell (inner size 2.3mm×2.3mm×20mm) to form a one-dimensional photonic crystal filter, put it into the aluminum square tube push column (2.2 mm×2.2mm×40mm), the outer end of the push column is fixed on the translation platform driven by the stepping motor through screws, and the metal tube and the base of the translation platform are fixed; the thickness of ...

Embodiment 2

[0014] Example 2: Select a high-resistance silicon wafer with a thickness of 300 μm ± 5 μm (resistivity greater than 1000 ohms / cm), process a uniform square groove (groove depth about 200 μm) through an etching process, and use the square groove as the ring gasket 3, The silicon remaining at the bottom is a high-resistance silicon wafer 2 (2.2mm×2.2mm), forming a silicon wafer with a composite structure of a high-resistance silicon wafer and a ring gasket. The tunable filter is composed of six composite structure silicon chips and spring sheets, and its main working frequency bands are: 200GHz-360GHz, 520GHz-630GHz, 1THz-1.2THz, 1.85THz-2.02THz, etc., taking the 200GHz-360Ghz frequency band as an example, The transmittance of the filter center frequency is greater than 0.75, the filter bandwidth is about 300MHz, and the Q value is about 960. Figure 5 shows the relationship between the filter center frequency and the thickness of the defect.

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Abstract

The invention discloses a terahertz wave adjustable narrow band filter based on a silicon-based photonic crystal structure. The filter comprises a filter metal shell, uniform high-resistance silicon wafers, annular gaskets, a spring piece, a driving motor, a lead, a motor driving controller, a translation table and a hollow push post, wherein one end of the filter metal shell is provided with a vertical edgefold inwardly; a plurality of groups of uniform high-resistance silicon wafers and annular gaskets are uniformly arranged at intervals in the filter metal shell, then the spring piece is arranged in the filter metal shell, and the same quantity of groups of uniform high-resistance silicon wafers and annular gaskets are arranged at intervals in the filter metal shell again; the hollow push post is sleeved in the other end of the filter metal shell; the outer end of the hollow push post is fixed on the translation table; a translation table base is fixed with the metal shell; the translation table is driven to shift by using the driving motor; and the motor driving controller is used for controlling the driving motor through the lead. The terahertz wave adjustable narrow band filter has the advantages of simple structure, low cost, extremely narrow filtering bandwidth, small loss, wide frequency adjustable range, high modulating speed and high performance.

Description

technical field [0001] The invention relates to the field of terahertz wave technology and wireless communication devices, in particular to a terahertz wave tunable narrow-band filter based on a silicon-based photonic crystal structure. Background technique [0002] Terahertz (THz) wave connects the microwave and infrared light bands in the frequency band. It has low photon energy, can penetrate most non-polar molecular materials, high spatial resolution, and wide bandwidth. Therefore, it is widely used in detection, security, imaging and It has a good application prospect in communication. Although terahertz wave technology has achieved great development in recent years, conventional microwave electronic devices cannot be used in the terahertz wave band due to the extremely high frequency of terahertz waves relative to microwaves, and its relative light wavelength is too long, making optical Most optical devices in the field are also difficult to apply, and most optical ma...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H7/12
Inventor 何金龙刘平安何雅兰洪治
Owner CHINA JILIANG UNIV
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