The invention discloses a
gallium nitride epitaxial
wafer using a buried layer type
silicon substrate and a preparation method of the
gallium nitride epitaxial
wafer, and belongs to the technical field of
semiconductor materials, the buried layer type
silicon substrate sequentially comprises a
surface layer, a buried layer and a base layer from top to bottom, the
surface layer is made of
silicon, and the thickness of the
surface layer is 1-2000 nm; the buried layer is made of a
silicon oxide insulating material, and the thickness of the buried layer is 1-50 microns; the base layer is made of silicon, the thickness of the base layer ranges from 50 micrometers to 1500 micrometers, and
nitriding treatment is carried out on the surface layer before the aluminum
nitride nucleating layer grows on the buried layer type silicon substrate. According to the invention, the problem that the operation loss of the silicon-based
gallium nitride power device is obviously increased when the frequency is increased is avoided, the
stress problem existing in the silicon-based
gallium nitride heteroepitaxy process is improved, and the
electric field voltage withstanding characteristic of the
gallium nitride epitaxial structure is obviously improved.