A process is disclosed which incorporates implantation of a carbon cluster into a substrate to improve the characteristics of
transistor junctions when the substrates are doped with
Boron and Phosphorous in the manufacturing of PMOS
transistor structures in integrated circuits. There are two processes which result from this novel approach: (1)
diffusion control for USJ formation; and (2) high
dose carbon implantation for
stress engineering.
Diffusion control for USJ formation is demonstrated in conjunction with a
boron or shallow
boron cluster
implant of the source / drain structures in PMOS. More particularly, first, a cluster
carbon ion, such as C16Hx+, is implanted into the source / drain region at approximately the same
dose as the subsequent
boron implant; followed by a shallow boron, boron cluster, phosphorous or phosphorous cluster
ion implant to form the source / drain extensions, preferably using a
borohydride cluster, such as B18Hx+ or B10Hx+. Upon subsequent annealing and activation, the
boron diffusion is reduced, due to the gettering of interstitial defects by the carbon atoms.