Patents
Literature
Patsnap Copilot is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Patsnap Copilot

109results about How to "Lower barrier height" patented technology

Enhanced A1N/GaN high-electron mobility transistor and fabrication method thereof

The invention relates to the technical field of a semiconductor, and discloses an enhanced A1N/GaN high-electron mobility transistor and a fabrication method of the enhanced A1N/GaN high-electron mobility transistor. The fabrication method comprises the steps of: providing a substrate, planting a nucleating layer on the substrate; planting a gallium nitride high-resistance buffer layer on the nucleating layer; planting a high-mobility gallium nitride groove layer on the gallium nitride high-resistance buffer layer; planting a thin-layer aluminum nitride barrier layer on the gallium nitride groove layer; planting a SiNx surface donor layer on the aluminum nitride barrier layer; forming a source electrode and a drain electrode on the SiNx surface donor layer; and etching the SiNx surface donor layer between the source electrode and the drain electrode to form a grid groove area, and forming a grid electrode in the grid groove area. The ultra-thin A1N barrier layer under the grid can not form two-dimensional electronic gas in the groove, so that the overall groove is cut off, and an enhanced HEMT (high electron mobility transistor) apparatus is formed. The enhanced A1N/GaN high-electron mobility transistor can be applied to the fields such as a high-power power switch, a micro-wave switch and a digital circuit.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Method for increasing ohmic contact characteristic of silicon carbide semiconductor

InactiveCN105702712AEffective cleaning and passivationDecrease the density of surface statesSemiconductor devicesRCA cleanTitanium carbide
The invention relates to the field of microelectronic technology, a method for improving the ohmic contact characteristics of a silicon carbide semiconductor, comprising the following steps: (1) performing traditional RCA cleaning on a silicon carbide sample; (2) placing the silicon carbide sample in electron cyclotron resonance microwave plasma In the bulk system, hydrogen plasma treatment is carried out; (3) electrode pattern is formed on the silicon carbide sample by photolithography; (4) metal electrode material titanium or titanium carbide is deposited by magnetron sputtering; (5) The silicon sample was stripped of metal other than the electrodes in an ultrasonic cleaner with acetone, and dried with nitrogen; (6) the silicon carbide sample was annealed in a nitrogen atmosphere. In the present invention, after pre-treating the surface of silicon carbide with hydrogen plasma generated by an electron cyclotron resonance system, the surface of silicon carbide is effectively cleaned and passivated, and the surface state density is significantly reduced, and combined with low work function metal titanium or titanium carbide and relatively The silicon carbide substrate with high doping concentration has a low barrier height of Ti/SiC contact, and good ohmic contact can be formed under low temperature annealing conditions.
Owner:DALIAN UNIV OF TECH

Silicon-based heterojunction solar cell and preparation method thereof

The invention discloses a silicon-based heterojunction solar cell. The silicon-based heterojunction solar cell comprises a crystalline silicon substrate; a first intrinsic amorphous silicon layer, a first doping layer, a first TCO layer and a first metal electrode are sequentially arranged on the upper surface of the crystalline silicon substrate; a second intrinsic amorphous silicon layer, a second doping layer, a second TCO layer and a second metal electrode are sequentially arranged on the lower surface of the crystalline silicon substrate. The preparation method comprises the following steps: (1), obtaining a crystalline silicon substrate; (2), carrying out plasma chemical vapor deposition on a first intrinsic amorphous silicon layer, a second intrinsic amorphous silicon layer, a firstdoping layer and a second doping layer ; (4), depositing a first TCO layer and a second TCO layer, and performing plasma treatment at the same time; and (5), forming a first metal electrode and a second metal electrode through silk-screen printing. The method is rapid, practical and easy to implement, the functional interface contact of TCO and doped amorphous silicon can be optimized, and the conversion efficiency of the heterojunction solar cell is remarkably improved.
Owner:晋能光伏技术有限责任公司

Light emitting diode and preparation method thereof

ActiveCN108110104AIncreased electron-hole wavefunction overlapConducive to radiative recombination luminescenceSemiconductor devicesContact layerBlocking layer
The application discloses a light emitting diode and a preparation method thereof. According to the light emitting diode, the last quantum barrier layer of a plurality of quantum well layers and an electron blocking layer in a conventional structure are replaced with a super lattice structure comprising a plurality of first-type super lattice layers and a plurality of second-type super lattice layers; the super lattice structure reduces polarization electric field intensity of the last quantum barrier layer, improves an electron hole wave function overlapping degree of the light emitting diodeand is beneficial to radiation composite light emitting of the light emitting diode; and the super lattice structure not only reduces the preparation difficulty of the light emitting diode, but alsoenables growth of the high-quality super lattice structure and second-type contact layer to be possible. In addition, existence of the super lattice structure also enables a electronic barrier heightof a conduction band of the integral second-type structural layer to be further increased, greatly reduces electron leakage, meanwhile, reduces a barrier height of a valence band hole, promotes transmission of the hole, greatly promotes internal quantum efficiency of multiple quantum well layers, reduces sudden reduction of efficiency, and greatly promotes integral light emitting power of the light emitting diode.
Owner:XIAMEN CHANGELIGHT CO LTD

ZnO piezoelectric effect-based low-power consumption flexible resistance-variable memory and preparation method thereof

The invention discloses a ZnO piezoelectric effect-based low-power consumption flexible resistance-variable memory and a preparation method thereof. The low-power consumption flexible resistance variable random-access memory (RAM) of the invention comprises a TE layer, a ZnO layer and an ITO / PET layer which are sequentially distributed from top to bottom, wherein the TE layer is made of Pt, Cu or Au of which the function is greater than a ZnO function. The method includes the following steps that: with an ITO / Pet flexible substrate adopted as a bottom electrode, a ZnO thin film is prepared through a sputtering method, and ZnO / ITO / PET can be obtained; and the ZnO / ITO / PET base body is arranged in a deposition chamber, and a metal upper electrode can be obtained through electron beam evaporation and by means of a mask method, so that a metal thin film electrode can be deposited on the ZnO thin film, and finally a flexible TE / ZnO / ITO / PET device can be obtained. According to the ZnO piezoelectric effect-based low-power consumption flexible resistance-variable memory and the preparation method thereof of the invention, set and reset voltage of the ZnO thin film layer can be adjusted and controlled through the piezoelectric effect of the ZnO thin film layer itself, and therefore, the operating voltage of the device can be decreased, and the power consumption of the device can be reduced, and the service life of the device can be prolonged.
Owner:芜湖启博知识产权运营有限公司

Manufacturing method of silicon MOS transistor on partially consumed insulating layer

InactiveCN101661889BImproving the ability to resist short channel effectEnhanced ability to resist short channel effectsSemiconductor/solid-state device manufacturingSilicon chipIon implantation
The invention discloses a manufacturing method of a PD SOI MOS transistor, which comprises the processes of defining an active area on an SOI silicon chip and doping after a gate electrode is formed, wherein the processes comprise the steps of: A. implanting angled ions by taking the gate electrode as a masking film, wherein the type of the implanted impurity is a first type of impurity with the same type as that of the impurity at the bottom inside the silicon film layer of the SOI silicon chip; B. implanting conventional ions by taking the gate electrode as the masking film, wherein the type of the implanted impurity is a second type of impurity with the type opposite to that of the first type of impurity; C. forming side wall layers at two sides of the gate electrode; D. implanting theangled ions by taking the gate electrode and the side wall layers as the masking film, wherein the type of the implanted impurity is the first type of impurity, and the ion implantation energy is setto be higher than that of the angled ions in step A; and E, implanting the conventional ions by taking the gate electrode and the side wall layers as the masking film, wherein the type of the implanted impurity is the second type of impurity. The method effectively inhibits the punch-through of DIBL effect and source leakage deep areas, thus greatly promoting the short channel effect resistant capability of the device.
Owner:PEKING UNIV SHENZHEN GRADUATE SCHOOL

Fin FET (field effect transistor) and manufacturing method of fin FET

The invention discloses a fin FET (field effect transistor), which comprises an SOI (silicon on insulator) substrate, a fin-shaped grid electrode stack structure and a channel region, wherein the fin-shaped grid electrode stacking structure is arranged on the SOI substrate, the channel region is arranged between a source drain region and a source drain region arranged at the two sides of the grid electrode stacking structure in the SOI substrate, the source drain regions and the channel region extend in the first direction, and the grid electrode stacking structure extends in the second direction vertical to the first direction. The fin FET is characterized in that the source drain regions are metal silicide, the interface part between the source drain regions and the channel region also comprises doping ion segregation regions. According to the novel fin FET device and a manufacturing method of the novel fin FET device provided by the invention, doping ions are filled into the source drain of the metal silicide of the Fin FET, in addition, the annealing driving is carried out so that the doping ions are segregated at the interface part of the channel region, the fin FET source and drain resistance is effectively reduced, and meanwhile, the Schottky barrier height is also reduced, so the driving capability is improved.
Owner:锐立平芯微电子(广州)有限责任公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products