The invention discloses a fin FET (
field effect transistor), which comprises an SOI (
silicon on insulator) substrate, a fin-shaped grid
electrode stack structure and a channel region, wherein the fin-shaped grid
electrode stacking structure is arranged on the
SOI substrate, the channel region is arranged between a source drain region and a source drain region arranged at the two sides of the grid
electrode stacking structure in the
SOI substrate, the source drain regions and the channel region extend in the first direction, and the grid electrode stacking structure extends in the second direction vertical to the first direction. The fin FET is characterized in that the source drain regions are
metal silicide, the interface part between the source drain regions and the channel region also comprises
doping ion segregation regions. According to the novel fin FET device and a manufacturing method of the novel fin FET device provided by the invention,
doping ions are filled into the source drain of the
metal silicide of the Fin FET, in addition, the annealing driving is carried out so that the
doping ions are segregated at the interface part of the channel region, the fin FET source and
drain resistance is effectively reduced, and meanwhile, the
Schottky barrier height is also reduced, so the driving capability is improved.