Fin FET (field effect transistor) and manufacturing method of fin FET
A fin-type field effect and manufacturing method technology, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problems of reduced driving current and increased leakage current, so as to reduce height, improve driving ability, reduce The effect of source-drain resistance
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[0034] The features and technical effects of the technical solution of the present invention will be described in detail below with reference to the drawings and in conjunction with illustrative embodiments, and a novel FinFET device that can effectively reduce the source-drain resistance and improve the driving capability is disclosed. It should be pointed out that similar reference signs indicate similar structures. The terms "first", "second", "upper", "lower", etc. used in this application can be used to modify various device structures or manufacturing processes. . Unless otherwise specified, these modifications do not imply the spatial, order, or hierarchical relationship of the modified device structure or manufacturing process.
[0035] The present invention provides a method for manufacturing a novel FinFET device that can effectively reduce the source and drain resistance while improving the driving capability. The flowchart is Figure 5 Shown. Specifically refer to F...
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