The invention discloses a barrier GaN
heterojunction transistor with low source-
drain resistance and high Al component and a preparation method thereof, the
transistor structurally comprises a substrate, a composite buffer layer, a channel layer, an
isolation layer, a
barrier layer and a cap layer which are sequentially arranged from bottom to top, source and drain electrodes are arranged at two ends of the surface of the cap layer, and a gate
electrode is arranged between the source and drain electrodes.
Etching is carried out on a partial region below the source and drain electrodes to form a nano groove array structure, inclined-angle
ion implantation activation is carried out, N-type heavy
doping is formed near a nano groove, and
metal is filled in the nano groove to form the source and drain electrodes. Source and drain
electrode metal of the structure is in direct contact with 2DEG, and forms
ohmic contact after being annealed together with an N-type heavily doped region, so that the
contact resistance is reduced. According to the method, the problem that the resistance value of a source-drain
electrode contact
resistor prepared by a conventional method of a high-Al-component barrier GaN
heterojunction material is large is solved, the output current of a GaN
heterojunction high-
electron-mobility
transistor device is increased, and the preparation process is simple, easy to implement and outstanding in effect.